Thin-film releasing apparatus

Claim 2

A thin-film releasing apparatus in which a portion of a thin film is released from a surface of a substrate on which said thin film is stuck, the remaining portion of said thin film is then released starting from said released portion thereof, and said released thin film is then removed, said apparatus comprising: a first thin-film conveyance system for releasing the remaining portion of said thin film from said substrate by nipping said thin film at said initially released portion thereof and for conveying said released thin film upward from said surface of said substrate while nipping said thin film, and a second thin-film conveyance system for mounting thereon said thin film conveyed by said first thin-film conveyance system and for conveying said mounted thin film in a direction intersecting a conveyance direction of said substrate.

Claim 3

A thin-film releasing apparatus according to Claim 1, in which first thin-film conveyance system is arranged to release and convey said thin film substantially vertically to said surface of said substrate, and said second thin-film conveyance system is arranged to convey said thin film in the direction intersecting said conveyance direction of said substrate in a plane parallel to said surface of said substrate.

Claim 4

A thin-film releasing apparatus according to Claim 1 or 2, in which a guide member for changing the conveyance direction of said thin film is provided between said first thin-film conveyance system and said second thin-film conveyance system.

Claim 5

A thin-film releasing apparatus according to Claim 3, in which said guide member is formed of a linear electrically conductive material.

Claim 6

A thin-film releasing apparatus according to Claim 2, in which fluid spraying means are provided between said first and second thin-film conveyance systems so that said thin film is smoothly conveyed from said first thin-film conveyance system to said second thin-film conveyance system.

Claim 7

A thin-film releasing apparatus according to any one of Claims 2 or in which static elimination means are provided between said first and second thin-film conveyance systems so that said thin film is smoothly conveyed from said first thin-film conveyance system to said second thin-film conveyance system.

Claim 8

A thin-film releasing apparatus in which a portion of a thin film is released from a surface of a substrate on which said thin film is stuck, the remaining portion of said thin film is then released starting from said released portion thereof, and said released thin film is then removed, said apparatus comprising: a first thin-film conveyance system for releasing the remaining portion of said thin film from said substrate by nipping said thin film at said initially released portion thereof and for conveying said released thin film upward from said surface of said substrate while nipping said thin film; and a second thin-film conveyance system having an electrically conductive belt and for mounting thereon said thin film conveyed by said first thin-film conveyance system and for conveying said mounted thin film in a direction intersecting a conveyance direction of said substrate.

Claim 9

A thin-film releasing apparatus in which a portion of a thin film is released from a surface of a substrate on which said thin film is stuck, the remaining portion of said thin film is then released starting from said released portion thereof, and said released thin film is then removed, said apparatus comprising: a first thin-film conveyance system for releasing the remaining portion of said thin film from said substrate by nipping said thin film at said initially released portion thereof and for conveying said released thin film upward from said surface of said substrate while nipping said thin film; and a second thin-film conveyance system having an electrically conductive belt and for mounting thereon said thin film conveyed by said first thin-film conveyance system and for conveying said mounted thin film in a direction intersecting a conveyance direction of said substrate.

Claim 10

A thin-film releasing apparatus according to Claim 7, in which electrically conductive belt of said second thin-film conveyance system is formed by knitting a material of linear stainless steel.

Claim 11

A thin-film releasing apparatus in which a portion of a thin film is released from a surface of a substrate on which said thin film is stuck, the remaining portion of said thin film is then released starting from said released portion thereof, and said released thin film is then removed, said apparatus comprising: a first thin-film conveyance system for releasing the remaining portion of said thin film from said substrate by nipping said thin film at said initially released portion thereof and for conveying said released thin film upward from said surface of said substrate while nipping said thin film; and a second thin-film conveyance system for mounting thereon said thin film conveyed by said first thin-film conveyance system and for conveying said mounted thin film in a direction intersecting a conveyance direction of said substrate, said second thin-film conveyance system being provided at a portion above a substrate conveyance path in a stage preceding a position of releasing said thin film.

Claim 12

A thin-film releasing apparatus in which a portion of a thin film is released from a surface of a substrate on which said thin film is stuck, the remaining portion of said thin film is then released starting from said released portion thereof, and said released thin film is then removed, said apparatus comprising: a first thin-film conveyance system for releasing the remaining portion of said thin film from said substrate by nipping said thin film at said initially released portion thereof and for conveying said released thin film upward from said surface of said substrate while nipping said thin film; and a second thin-film conveyance system for mounting thereon said thin film conveyed by said first thin-film conveyance system and for conveying said mounted thin film in a direction intersecting a conveyance direction of said substrate, said second thin-film conveyance system being provided at a portion above a substrate conveyance path in a stage preceding a position of releasing said thin film.

Claim 13

A thin-film releasing apparatus in which a portion of a thin film is released from a surface of a substrate on which said thin film is stuck, the remaining portion of said thin film is then released starting from said released portion thereof, and said released thin film is then drawn off into an exhausted thin-film receiving vessel, said apparatus comprising: a first thin-film conveyance system for releasing the remaining portion of said thin film by nipping said thin film at said initially released portion thereof and for conveying said released thin film upward from said surface of said substrate while nipping said thin film; and a second thin-film conveyance system for mounting thereon said thin film conveyed by said first thin-film conveyance system and for conveying said mounted thin film in a direction intersecting a conveyance direction of said substrate, said exhausted thin-film receiving vessel being provided at a side of said substrate conveyance path so as to receive said thin film conveyed by said second thin-film conveyance system.

Claim 14

A thin-film releasing apparatus in which a portion of a thin film is released from a surface of a substrate on which said thin film is stuck, the remaining portion of said thin film is then released starting from said released portion thereof, and said released thin film is then drawn off into an exhausted thin-film receiving vessel, said apparatus comprising: a first thin-film conveyance system for releasing the remaining portion of said thin film by nipping said thin film at said initially released portion thereof and for conveying said released thin film upward from said surface of said substrate while nipping said thin film; and a second thin-film conveyance system for mounting thereon said thin film conveyed by said first thin-film conveyance system and for conveying said mounted thin film in a direction intersecting a conveyance direction of said substrate, said exhausted thin-film receiving vessel being provided at a side of said substrate conveyance path so as to receive said thin film conveyed by said second thin-film conveyance system.

Claim 15

A thin-film releasing apparatus in which portions of first and second thin films stuck on opposite surfaces of a substrate are released from said surfaces, the remaining portion of said first and second thin films are then released starting from said released portions thereof, and said released first and second thin films are then drawn off into exhausted thin-film receiving vessels, said apparatus comprising: a first thin-film conveyance system for releasing the remaining portion of said first thin film by nipping said first thin film at said initially released portion thereof and for conveying said released first thin film upward from an upper one of said opposite surfaces of said substrate while nipping said first thin film; a second thin-film conveyance system for mounting thereon said first thin film conveyed by said first thin-film conveyance system and for conveying said mounted first thin film in a direction intersecting a conveyance direction of said substrate, a first one of said exhausted thin-film receiving vessels being provided at a side of said substrate conveyance path so as to receive said first thin film conveyed by said second thin-film conveyance system; a third thin-film conveyance system for releasing the remaining portion said second thin film by nipping said second thin film at said initially released portion thereof and for conveying said released second thin film downward from a lower one of said opposite surfaces of said substrate while nipping said second thin film; and a second one of said exhausted thin-film receiving vessels provided for receiving said second thin film conveyed by said third thin-film conveyance system, said second exhausted thin-film receiving vessel being provide integrally with said first exhausted thin-film receiving vessel at a portion below said substrate conveyance path.

Claim 16

A thin-film releasing apparatus in which portions of first and second thin films stuck on opposite surfaces of a substrate are released from said surfaces, the remaining portion of said first and second thin films are then released starting from said released portions thereof, and said released first and second thin films are then drawn off into exhausted thin-film receiving vessels, said apparatus comprising: a first thin-film conveyance system for releasing the remaining portion of said first thin film by nipping said first thin film at said initially released portion thereof and for conveying said released first thin film upward from an upper one of said opposite surfaces of said substrate while nipping said first thin film; a second thin-film conveyance system for mounting thereon said first thin film conveyed by said first thin-film conveyance system and for conveying said mounted first thin film in a direction intersecting a conveyance direction of said substrate, a first one of said exhausted thin-film receiving vessels being provided at a side of said substrate conveyance path so as to receive said first thin film conveyed by said second thin-film conveyance system; a third thin-film conveyance system for releasing the remaining portion said second thin film by nipping said second thin film at said initially released portion thereof and for conveying said released second thin film downward from a lower one of said opposite surfaces of said substrate while nipping said second thin film; and a second one of said exhausted thin-film receiving vessels provided for receiving said second thin film conveyed by said third thin-film conveyance system, said second exhausted thin-film receiving vessel being provide integrally with said first exhausted thin-film receiving vessel at a portion below said substrate conveyance path.