Patent EP0319797A2 successfully refreshed from Google Patents.
EP0319797A2
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EP
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Method and apparatus for measuring defect density and defect distribution
Assignee: Mitsui Kinzoku Co Ltd
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Filing: 1988-11-25
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Granted: —
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Expires: 2008-11-25
Abstract
Abstract A method and apparatus for measuring a defect distribution comprising introducing a narrowed laser beam into an object to be observed, receiving scattering lights generated at the defect portions of the object by a photoelectric conversion element, and measuring automatically the density and density distribution of the defects inside the object on the basis of the output image data of the photoelectric conversion element.
Inventors
- 👤 Kazuo Moriya
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 23:25
CPC Classifications
G; G06; G06T; G06T7/00; G06T7/0002; G06T7/0004; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/9501; G01N21/9505; G01N21/17; G01N2021/178; G01N2021/1785; G01N21/47; G01N2021/4735; G01N21/8851; G01N2021/8887; G01N2201/00; G01N2201/10; G01N2201/102; G01N2201/108; G01N2201/1087; G06T2207/00; G06T2207/10; G06T2207/10056; G06T2207/30; G06T2207/30108; G06T2207/30148
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
61 words
A method of measuring a defect density and defect distribution comprising: introducing a narrowed laser beam into an object to be observed; receiving scattering lights obtained as image data when the laser beam falls on the defect portions inside said object; and measuring the density and density distribution of the defects inside said object on the basis of said image data.
Claim 2
Independent Claim
61 words
A method of measuring a defect density and defect distribution comprising: introducing a narrowed laser beam into an object to be observed; receiving scattering lights obtained as image data when the laser beam falls on the defect portions inside said object; and measuring the density and density distribution of the defects inside said object on the basis of said image data.
Claim 3
Independent Claim
59 words
A method of measuring a defect distribution comprising: introducing a narrowed laser beam into an object to be observed; receiving scattering lights generated when the laser beam falls on the defect portions inside said object; and measuring a DZ (Denuded Zone) width of said object on the basis of the one-dimensional distribution of scattering intensity of the scattering lights.
Claim 4
Independent Claim
59 words
A method of measuring a defect distribution comprising: introducing a narrowed laser beam into an object to be observed; receiving scattering lights generated when the laser beam falls on the defect portions inside said object; and measuring a DZ (Denuded Zone) width of said object on the basis of the one-dimensional distribution of scattering intensity of the scattering lights.
Claim 5
Independent Claim
62 words
An apparatus for measuring a defect distribution comprising: a means for introducing a narrowed laser beam into an object to be observed; a means for receiving scattering lights generated at the defect portions of said object as image data; and a means for measuring the density and density distribution of the defects inside said object on the basis of said image data.
Claim 6
Independent Claim
62 words
An apparatus for measuring a defect distribution comprising: a means for introducing a narrowed laser beam into an object to be observed; a means for receiving scattering lights generated at the defect portions of said object as image data; and a means for measuring the density and density distribution of the defects inside said object on the basis of said image data.
References Cited (Backward Citations)
No citation records indexed.
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