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EP0317228A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Epitaxial wafer

Assignee: Mitsubishi Chemical Corp
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Filing: 1988-11-14
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Granted: —
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Expires: 2008-11-14
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Abstract

Abstract An epitaxial wafer comprises a single crystalline substrate (1), a p type gallium aluminum arsenide mixed crystalline layer (2) and an n type gallium aluminum arsenide mixed crystalline layer (6) having an indirect transition type band structure. The p type gallium aluminum arsenide mixed crystalline layer (2) consists of a gallium aluminum arsenide mixed crystal­line layer (4) having a direct transition type band structure extending about 3 to 10 µm from the pn junction (5) and a gallium aluminum arsenide mixed crystalline layer (3) having an indirect transition type band structure. The aluminum arsenide mixed crystal ratio in the gallium aluminum arsenide layer (2) exponentially and gradually changes in the region between the direct transition type layer and the indirect transition type layer.

Inventors

  • 👤 Tadashige Sato
  • 👤 Yasuji Kobashi

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-05 20:55
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/81; H10H20/822; H10H20/824; F; F01; F01N; F01N11/00; F01N3/00; F01N3/08; F01N3/0807; F01N3/0828; F01N3/0842; H10H20/01; H10H20/011; H10H20/013; H10H20/0133; H10H20/811; F01N2550/00; F01N2550/03; Y; Y02; Y02T; Y02T10/00; Y02T10/10; Y02T10/40; Y10; Y10S; Y10S438/00; Y10S438/936

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 116 words
An epitaxial wafer comprising of a single crystalline substrate (1), a p type gallium aluminum arsenide mixed crystalline layer (2) and an n type gallium aluminum arsenide mixed crystalline layer (6) having an indirect transition type band structure, wherein said p type gallium aluminum arsenide mixed crystalline layer (2) consists of a gallium aluminum arsenide mixed crystalline layer (4) having a direct transition type band structure, extending from the pn junction (5) and a gallium aluminum arsenide mixed crystalline layer (3) having an indirect transition type band structure, and the aluminum arsenide mixed crystal ratio in the gallium aluminum arsenide being exponentially and/or gradually changed in the region between the layer (4) and the layer (3).
Claim 2
Dependent Claim 116 words
An epitaxial wafer comprising of a single crystalline substrate (1), a p type gallium aluminum arsenide mixed crystalline layer (2) and an n type gallium aluminum arsenide mixed crystalline layer (6) having an indirect transition type band structure, wherein said p type gallium aluminum arsenide mixed crystalline layer (2) consists of a gallium aluminum arsenide mixed crystalline layer (4) having a direct transition type band structure, extending from the pn junction (5) and a gallium aluminum arsenide mixed crystalline layer (3) having an indirect transition type band structure, and the aluminum arsenide mixed crystal ratio in the gallium aluminum arsenide being exponentially and/or gradually changed in the region between the layer (4) and the layer (3).
Claim 3
Dependent Claim 27 words
An epitaxial wafer according to claim 1, wherein the thickness of the p type gallium aluminum arsenide mixed crystalline layer (2) is about 15 to 50 µm.
Claim 4
Dependent Claim 28 words
An epitaxial wafer according to claim 1, wherein the average aluminum arsenide mixed crystal ratio x in the p type layer (2) is 0.45 < x ≦ 0.65.
Claim 5
Dependent Claim 21 words
An epitaxial wafer according to claim 1, wherein the thickness of the n type layer (6) is 20 to 100 µm.
Claim 6
Dependent Claim 27 words
An epitaxial wafer according to claim 1, wherein the aluminum arsenide mixed crystal ratio x of the n type layer (6) is 0.5 ≦ x ≦ 0.8.
Claim 7
Dependent Claim 25 words
An epitaxial wafer according to claim 1, wherein the aluminum arsenide mixed crystal ratio x in the layer (3) is 0.5 ≦ x ≦ 0.8.
Claim 8
Dependent Claim 20 words
An epitaxial wafer according to claim 1, wherein the thickness of the layer (4) is about 3 to 10 µm.
Claim 9
Dependent Claim 21 words
An epitaxial wafer according to claim 1, wherein the single crystalline substrate is one of GaAs, GaP, InP, Si and Ge.
Claim 10
Dependent Claim 18 words
An epitaxial wafer according to claim 8, wherein the single crystalline substrate has a surface orientation of {100}.

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