Patent EP0316667A2 successfully refreshed from Google Patents.
EP0316667A2
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EP
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Storage stable positive photoresist composition
Assignee: Novartis AG
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Filing: 1988-11-03
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Granted: —
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Expires: 2008-11-03
Abstract
Abstract Translated from German Die Erfindung betrifft Positiv-Fotoresist-Zusammensetzungen, die zur Steigerung ihrer Lagerstabilität mindestens eine Verbindung aus der Gruppe der primären, sekundären und tertiären niederaliphatischen Aminoverbindungen oder Pyridin enthalten. The invention relates to positive photoresist compositions which contain at least one compound from the group of primary, secondary and tertiary lower aliphatic amino compounds or pyridine to increase their storage stability.
Inventors
- 👤 Dietmar Raulin
- 👤 Andreas Dr. Wächtler
- 👤 Karl Heinz Dr. Neisius
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 04:31
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/0226
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