Patent EP0312341A2 successfully refreshed from Google Patents.
EP0312341A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
High resolution imagery systems
Assignee: Individual
•
Filing: 1988-10-12
•
Granted: —
•
Expires: 2008-10-12
Abstract
Abstract The current limits of resolution of multi-element optical systems are exceeded by reducing the number of elements while introducing at the critical aperture a blazed transmission grating (60) having grating rings of low bending power defined by multiple plateaus. By illuminating the optical train with monochromatic light that constitutes a multiplicity of distributed sources having a substantial temporal coherence but spatial incoherence and by varying the slopes and widths of the grating rings, local phase delays are introduced that adjust aberrations in the optical system, providing an aligned composite wavefront. The system and method may be used for presenting an image, as for a wafer stepper, or for viewing an image, as in a microscope.
Inventors
- 👤 Theodore Robert Whitney
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 01:16
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7049; G02; G02B; G02B27/00; G02B27/0025; G02B27/0037; G02B27/0075; G02B27/42; G02B27/4205; G02B27/4211; G02B27/4222; G02B5/00; G02B5/18; G02B5/1876; G02B5/188; G03F7/00; G03F7/70; G03F7/70058; G03F7/70066; G03F7/70483; G03F7/7055; G03F7/70583
Claims Analysis
Total Claims: 105
Claim 1
Independent Claim
58 words
A system for producing a highly corrected optical image comprising: substantially monochromatic light source means; an optical system having a critical aperture; and phase transmission grating means at the critical aperture, the grating means including a plurality of sets of plateaus, the light source being disposed to provide light distributed through the lens system and the grating means.
Claim 2
Independent Claim
58 words
A system for producing a highly corrected optical image comprising: substantially monochromatic light source means; an optical system having a critical aperture; and phase transmission grating means at the critical aperture, the grating means including a plurality of sets of plateaus, the light source being disposed to provide light distributed through the lens system and the grating means.
Claim 3
Dependent Claim
44 words
The invention as set forth in claim 1 above, wherein the sets of plateaus provide incremental amounts of phase retardation in the light energy at the critical aperture and the light source means provides a plurality of light sources distributed throughout a beam area.
Claim 4
Dependent Claim
23 words
The invention as set forth in claim 2 above, wherein the sets of plateaus comprise concentric circular patterns having non-linearly varying radial widths.
Claim 5
Dependent Claim
55 words
The invention as set forth in claim 3 above, wherein the optical system has spherical type aberration and the non-linear patterns of the grating means produce a varying phase retardation as a function of radius, the phase retardation opposing and compensating the spherical type aberration of the optical system with respect to a phase reference.
Claim 6
Dependent Claim
32 words
The invention as set forth in claim 4 above, wherein the optical system has a known chromatic dispersion and the chromatic dispersion in the grating means opposes that in the optical system.
Claim 7
Dependent Claim
33 words
The invention as set forth in claim 4 above, wherein the sets of non-linear patterns are configured with at least one 90° or 180° phase change at some fraction of the critical aperture.
Claim 8
Dependent Claim
33 words
The invention as set forth in claim 4 above, wherein the sets of patterns are configured with phase changes at various incremental radii, providing a pupil function comprising more than one annular zone.
Claim 9
Dependent Claim
27 words
The invention as set forth in claim 4 above, wherein selected ones of the patterns are partially transmissive or opaque in accordance with a selected pupil function.
Claim 10
Dependent Claim
29 words
The invention as set forth in claim 1, wherein the bending of the local wavefront passing through the critical aperture is limited to angles of less than approximately 5°.
Claim 11
Dependent Claim
31 words
The invention as set forth in claim 1, above, wherein the system includes means incorporating the light source for providing spatially dispersed point sources of light throughout an area of illumination.
Claim 12
Dependent Claim
36 words
The invention as set forth in claim 1, above, wherein the optical system and phase transmission grating means are configured to bend the light into converging planar wavefronts generating narrow elongated illumination along a central axis.
Claim 13
Dependent Claim
39 words
The invention as set forth in claim 11 above, wherein the optical system comprises at least one spherical refractive element and the phase transmission grating has a plurality of concentric multi-plateau rings of substantially periodic radial width and spacing.
Claim 14
Dependent Claim
43 words
The invention as set forth in claim 1, above, wherein the optical system comprises a cylindrical lens means and the phase transmission grating comprises a plurality of substantially parallel multi-plateau tracks substantially parallel to the axis about which the cylindrical lens means curves.
Claim 15
Dependent Claim
43 words
The invention as set forth in claim 12 above, wherein the optical system comprises a microscope for viewing a specimen, the microscope including refractive elements having a degree of tolerated spherical type aberration and the grating means compensating for the spherical type aberration.
Claim 16
Dependent Claim
31 words
The invention as set forth in claim 14 above, wherein the optical system further comprises transparent cover means and the grating means further compensates for spherical aberration from the cover means.
Claim 17
Dependent Claim
83 words
An optical system for providing a desired light distribution at a chosen surface, the system comprising: light source means providing light that is temporally coherent to a selected number of waves and of limited spatial coherence; optical lens means disposed in the path of the light for providing an approximation of the desired light distribution; and phase plate means disposed with the optical lens means for phase retarding the wavefront to a substantially smaller degree than the number of waves of temporal coherence.
Claim 18
Dependent Claim
83 words
An optical system for providing a desired light distribution at a chosen surface, the system comprising: light source means providing light that is temporally coherent to a selected number of waves and of limited spatial coherence; optical lens means disposed in the path of the light for providing an approximation of the desired light distribution; and phase plate means disposed with the optical lens means for phase retarding the wavefront to a substantially smaller degree than the number of waves of temporal coherence.
Claim 19
Dependent Claim
36 words
The invention as set forth in claim 16 above, wherein the light source means comprises coherent light source means and means for controllably decreasing the spatial coherence in the light from the coherent light source means.
Claim 20
Dependent Claim
53 words
The invention as set forth in claim 16 above, including means responsive to the light for sensing the degree of spatial coherence, means responsive to the sensed degree of spatial coherence for controlling the means for decreasing the same, and wherein the light source means comprises means for providing pulse sequences of light.
Claim 21
Dependent Claim
50 words
The invention as set forth in claim 18 above, wherein the means for controllably decreasing the spatial coherence comprises a pair of surfaces having randomized phase transmissive patterns in the path of the light and means for moving one of the surfaces relative to the other during the pulse sequences.
Claim 22
Dependent Claim
59 words
The invention as set forth in claim 17 above, wherein the waves are temporally coherent to in excess of about 10,000 waves and the spherical aberration is limited to about 75 waves or less maximum difference, and wherein the light source means provides of the order of 10² point sources of light on each point at the image plane.
Claim 23
Independent Claim
96 words
A system for precision imaging of light energy comprising: means providing illumination in the form of a multiplicity of independent light sources of substantially the same wavelength throughout a beam area; a plurality of refractive lens elements together providing light imaging with a predetermined spherical type aberration; and transmission grating means cooperative with the refractive lens elements for phase delaying and redirection of waves from the multiplicity of independent light sources to compensate by locally varying phase retardation for the spherical type aberration of the refractive lens elements such that a compensated composite wavefront is provided.
Claim 24
Independent Claim
96 words
A system for precision imaging of light energy comprising: means providing illumination in the form of a multiplicity of independent light sources of substantially the same wavelength throughout a beam area; a plurality of refractive lens elements together providing light imaging with a predetermined spherical type aberration; and transmission grating means cooperative with the refractive lens elements for phase delaying and redirection of waves from the multiplicity of independent light sources to compensate by locally varying phase retardation for the spherical type aberration of the refractive lens elements such that a compensated composite wavefront is provided.
Claim 25
Dependent Claim
28 words
The invention as set forth in claim 21 above, wherein the independent light sources are substantially spatially incoherent and temporally coherent to about the order of 10,000 waves.
Claim 26
Dependent Claim
59 words
The invention as set forth in claim 21 above, wherein the transmission grating means comprises a system of concentric multi-plateau rings having different slopes and widths, and providing progressively varying amounts of phase delay in the illumination passing therethrough in increments to an integral maximum to provide of the order of about 1/20 wave precision throughout the composite wavefront.
Claim 27
Independent Claim
150 words
A system for precision adjustment of the shape of the wavefront of a beam of light energy comprising: means providing illumination in the form of a multiplicity of light sources of substantially the same wavelengths throughout a beam area; a plurality of refractive lens elements in the path of the beam illumination and together providing light imaging with predetermined spherical-type aberrations (as hereinbefore defined), but possessing a high degree of correction for aberration components which vary as the image height or as the angular orientation of the ray meridian at the critical aperture; and transmission grating means at the critical aperture in the path of the beam illumination and cooperative with the refractive lens elements for phase delay and redirection of the illumination in accordance with a second predetermined function of the ray height at the critical aperture and compensating for the predetermined spherical-type aberrations of the refractive lens elements.
Claim 28
Independent Claim
150 words
A system for precision adjustment of the shape of the wavefront of a beam of light energy comprising: means providing illumination in the form of a multiplicity of light sources of substantially the same wavelengths throughout a beam area; a plurality of refractive lens elements in the path of the beam illumination and together providing light imaging with predetermined spherical-type aberrations (as hereinbefore defined), but possessing a high degree of correction for aberration components which vary as the image height or as the angular orientation of the ray meridian at the critical aperture; and transmission grating means at the critical aperture in the path of the beam illumination and cooperative with the refractive lens elements for phase delay and redirection of the illumination in accordance with a second predetermined function of the ray height at the critical aperture and compensating for the predetermined spherical-type aberrations of the refractive lens elements.
Claim 29
Independent Claim
122 words
A system for providing a precisely compensated monochromatic image on a semiconductor wafer comprising: a series of refractive lens elements disposed along an optical axis and having a critical aperture, the cumulative spherical type aberration being no greater than about 75 waves and the cumulative chromatic aberration being positive; a transmission grating disposed at the critical aperture, the grating having a plurality of rings each with multiple plateaus providing local wavefront compensation for the spherical type aberration and compensating negative chromatism for light of a predetermined wavelength; and illuminating means directing substantially monochromatic light along the optical axis, the substantially monochromatic light being of the predetermined wavelength and having temporal coherence of the order of 10,000 waves and being substantially spatially incoherent.
Claim 30
Independent Claim
122 words
A system for providing a precisely compensated monochromatic image on a semiconductor wafer comprising: a series of refractive lens elements disposed along an optical axis and having a critical aperture, the cumulative spherical type aberration being no greater than about 75 waves and the cumulative chromatic aberration being positive; a transmission grating disposed at the critical aperture, the grating having a plurality of rings each with multiple plateaus providing local wavefront compensation for the spherical type aberration and compensating negative chromatism for light of a predetermined wavelength; and illuminating means directing substantially monochromatic light along the optical axis, the substantially monochromatic light being of the predetermined wavelength and having temporal coherence of the order of 10,000 waves and being substantially spatially incoherent.
Claim 31
Dependent Claim
59 words
The system as set forth in claim 25 above, wherein the individual plateaus provide incrementally varying amounts of optical wave retardation in the locally impinging areas of light, and wherein the illuminating means provides a plurality of spatially incoherent, phase random, light sources having a bandwidth of the order of 0.03 nm in the ultraviolet region of the spectrum.
Claim 32
Dependent Claim
54 words
The system as set forth in claim 26 above, wherein the plurality of rings each have progressively varying plateaus and are arranged in selected subsets in which the phase relation of the plateaus varies to define a pupil function of at least two zones, and wherein the illuminating means comprises a pulsed laser source.
Claim 33
Dependent Claim
60 words
The system as set forth in claim 26 above, wherein the rings are varied in width and slope to provide a wavelength of optical retardation to compensate locally for wavefront variations in the composite wavefront, wherein the phase relation of the waves is varied in π phase fashion, and wherein the maximum bending introduced by the grating is about 5°.
Claim 34
Dependent Claim
50 words
The system as set forth in claim 27 above, wherein the illuminating means comprises an excimer laser, etalon tuning cavity, and phase randomizer means comprising a pair of quasi-random phase plates in the path of the illumination and means for varying the spatial relationship of the light sources relative thereto.
Claim 35
Dependent Claim
72 words
The system as set forth in claim 29 above, wherein the phase randomizer means comprises means for sensing the degree of spatial coherence in the light sources, and means responsive to the sensed degree of coherence for introducing varying relative movement of the light sources between the quasi-random phase plates, and wherein the system further comprises means responsive to the light energy of the illuminating means for controlling the duration of exposure.
Claim 36
Dependent Claim
137 words
An optical system for providing precise aspheric correction of a composite wavefront having aberrations from idealized specifications comprising: a transmissive blazed grating plate having a microlithographic pattern of incrementally varying narrow tracks, the differential height of the tracks on the plate being at a maximum proportioned to the ratio of one wavelength of incident monochromatic light at a selected wavelength divided by the index of refraction of the plate, the width of the tracks being proportioned to provide local phase delay of the wavefront according to a predetermined function to within about 1/20 wavelength of the monochromatic light over the aperture to effect redistribution of the microstructure of the wavefront; and means for illuminating the pattern on the plate with monochromatic light of the selected wavelength, the light having predictable periodicity and constituting multiple phase random sources.
Claim 37
Dependent Claim
137 words
An optical system for providing precise aspheric correction of a composite wavefront having aberrations from idealized specifications comprising: a transmissive blazed grating plate having a microlithographic pattern of incrementally varying narrow tracks, the differential height of the tracks on the plate being at a maximum proportioned to the ratio of one wavelength of incident monochromatic light at a selected wavelength divided by the index of refraction of the plate, the width of the tracks being proportioned to provide local phase delay of the wavefront according to a predetermined function to within about 1/20 wavelength of the monochromatic light over the aperture to effect redistribution of the microstructure of the wavefront; and means for illuminating the pattern on the plate with monochromatic light of the selected wavelength, the light having predictable periodicity and constituting multiple phase random sources.
Claim 38
Dependent Claim
61 words
The invention as set forth in claim 31 above, wherein the monochromatic light is in the ultraviolet region, wherein the tracks are concentric and arranged in periodic sequences in which heights vary progressively, wherein the track widths at the minimum are of the order of 1 micron, and wherein the maximum bending of light introduced by the plate is about 3°.
Claim 39
Dependent Claim
40 words
The invention as set forth in claim 32 above, wherein the system further comprises a number of spherical optical elements in optical path with the grating plate, the optical elements providing cumulative aberrations and the plate compensating for such aberrations.
Claim 40
Dependent Claim
67 words
The invention as set forth in claim 33 above, wherein the system has a critical aperture and the plate is disposed at the critical aperture, wherein the progressive patterns are arranged in subsets of different phase to provide a pupil function comprised of at least two annular zones, and wherein the cumulative aberrations in the spherical lenses that are compensated are principally spherical type aberration and chromatism.
Claim 41
Dependent Claim
121 words
The invention as set forth in claim 34 above, wherein there is a pupil function comprising six annular zones for increase of depth of focus, wherein the monochromatic light is at about 248 nm wavelength and the periodicity of the monochromatic light is such that the waves have temporal coherence of at least about 50 times greater than the maximum phase delay, wherein the multiple phase random sources are such as to provide approximately 10² sources for each point being illuminated, and wherein the tracks are arranged in rings having 8 tracks per nominal ring varying incrementally in 1/8th wavelength optical retardation steps from 0 to 7/8th wave height and the maximum height differential of the tracks is about 0.427 microns.
Claim 42
Independent Claim
180 words
The method of making a transmission grating for providing varying wave delay of light within a wavefront transmitted through a planar transmissive substrate, comprising the steps of: illuminating a photosensitive layer on the substrate to provide tracks of the order of 2 microns in width, the tracks providing a first reference pattern; forming track layers of preselected first height on the substrate in accordance with the first reference pattern, such layers being of uniform height and transmission; providing an overlayer of photosensitive material on the thus processed substrate; defining a second set of tracks of the order of 2 microns in width by illumination of the photosensitive material, in accordance with the reference pattern; forming track layers of preselected second height on the substrate in accordance with the reference pattern, to define a second, uniform differential height, transmissive layer cumulative to the first; and successively covering the substrate with photosensitive material, defining track patterns using illumination, and forming cumulative layers of transmissive material of different heights until a plurality of tracks having different height layers are provided on the substrate.
Claim 43
Independent Claim
180 words
The method of making a transmission grating for providing varying wave delay of light within a wavefront transmitted through a planar transmissive substrate, comprising the steps of: illuminating a photosensitive layer on the substrate to provide tracks of the order of 2 microns in width, the tracks providing a first reference pattern; forming track layers of preselected first height on the substrate in accordance with the first reference pattern, such layers being of uniform height and transmission; providing an overlayer of photosensitive material on the thus processed substrate; defining a second set of tracks of the order of 2 microns in width by illumination of the photosensitive material, in accordance with the reference pattern; forming track layers of preselected second height on the substrate in accordance with the reference pattern, to define a second, uniform differential height, transmissive layer cumulative to the first; and successively covering the substrate with photosensitive material, defining track patterns using illumination, and forming cumulative layers of transmissive material of different heights until a plurality of tracks having different height layers are provided on the substrate.
Claim 44
Dependent Claim
34 words
The method as set forth in claim 36 above, wherein the layers of the tracks are provided in a binary varying progression, and the cumulative layering forms a succession of incrementally varying track heights.
Claim 45
Dependent Claim
80 words
The method as set forth in claim 36 above, wherein at least the majority of the tracks are arranged in successive incrementally varying concentric plateaus of fractional wavelength optical delay relative to monochromatic light to be incident on the transmission grating, the plateaus having a maximum optical delay relative to the base surface of the substrate, to form wave delaying multiple plateau rings having varying radial widths and slopes in accordance with a predetermined progression as a function of radius.
Claim 46
Dependent Claim
85 words
The method as set forth in claim 38 above, wherein the maximum variation in optical delay between the principal level of the substrate and the surface of the layers is no greater than about the thickness of SiO₂ required for seven-eighths wavelength optical delay for light at 248 nm wavelength, and the layers are of one-half wavelength, one-fourth wavelength and one-eighth wavelength in optical delay, relative to the wavelength of incident monochromatic light, to form cumulatively eight increments of level from 0 to 7/8th wavelength.
Claim 47
Dependent Claim
45 words
The method as set forth in claim 36 above, wherein the tracks define progressions of plateaus of predetermined maximum height, each progression of plateaus defining a ring, the rings having widths varying in accordance with a predetermined function and the plateaus thereof defining varying slopes.
Claim 48
Dependent Claim
34 words
The method as set forth in claim 36 above, wherein the layer patterns are formed by depositing a predetermined uniform height of light transmissive high purity silica on the illuminated pattern on the substrate.
Claim 49
Dependent Claim
73 words
The method as set forth in claim 41 above, wherein the tracks are provided by the steps of layering less than a micron depth of photoresist material on the substrate structure, illuminating the photoresist layer with a concentric track pattern, washing away material from the illuminated pattern to leave unexposed areas, depositing material on the unexposed areas; removing the exposed material, and repeating the sequence starting with deposition of a new photosensitive material.
Claim 50
Dependent Claim
21 words
The method as set forth in claim 36 above, wherein the layers are defined by removal of material of the substrate.
Claim 51
Dependent Claim
76 words
The method as set forth in claim 43 above, wherein successive layers are removed by sequences employing deposition of a photosensitive material; illumination of track patterns on the photosensitive material; removal of unexposed portions of the photosensitive material after illumination; etching of the substrate to a given incremental depth; removal of the exposed material from the surface, and layering with an additional layer of photosensitive material followed by repetition of the illumination, etching and removal steps.
Claim 52
Dependent Claim
50 words
The method as set forth in claim 36 above, including the steps of initially preparing the substrate with an overcoating of an opaque material; removing selected portions of the opaque material to provide fiducial tracks on the substrate and then providing the layered tracks with reference to the fiducial tracks.
Claim 53
Dependent Claim
59 words
The method as set forth in claim 45 above, wherein the fiducial tracks are disposed in an annular pattern of reflective rings outside a central region in which the multi-plateau rings are disposed in circles concentric with the fiducial rings, and wherein bands of centering and positioning grating rings are formed between the fiducial rings and the multi-plateau rings.
Claim 54
Dependent Claim
49 words
The method as set forth in claim 46 above, wherein the fiducial rings and the centering and positioning rings are of chrome material and further including the step of providing a further set of fiducial rings of chrome material at a region of lesser radius than the multi-plateau rings.
Claim 55
Dependent Claim
92 words
48 . The method of making a blazed grating phase lens comprising the steps of: layering a photoresist material on a light transmissive planar element; forming the image of a plurality of first tracks on the photoresist material; forming first tracks of a given differential height on the planar element; removing the first layer of photoresist material; and forming, using like sequences, successive tracks on the planar element of differential height that vary in binary fashion to the given differential height and selectively overlay in cumulative fashion to form incrementally varying progressions.
Claim 56
Dependent Claim
92 words
48 . The method of making a blazed grating phase lens comprising the steps of: layering a photoresist material on a light transmissive planar element; forming the image of a plurality of first tracks on the photoresist material; forming first tracks of a given differential height on the planar element; removing the first layer of photoresist material; and forming, using like sequences, successive tracks on the planar element of differential height that vary in binary fashion to the given differential height and selectively overlay in cumulative fashion to form incrementally varying progressions.
Claim 57
Dependent Claim
19 words
The method as set forth in claim 48 above, wherein the images are formed by illuminating through individual photomasks.
Claim 58
Dependent Claim
35 words
The method as set forth in claim 49 above, wherein the tracks are concentric circles and wherein the images are formed by dynamic writing of tracks on the photoresist material while rotating the planar element.
Claim 59
Dependent Claim
78 words
The method as set forth in claim 48 above, further including the steps of initially writing reference patterns on the planar element at positions chosen within arbitrary limits on opposite sides of the locations for the tracks, forming the image of successive tracks in the form of concentric rings with reference to the reference patterns, and calibrating the system by determining the center of the tracks, and radial track position relative to the center, from the reference patterns.
Claim 60
Independent Claim
108 words
A system for high resolution imagery comprising: an optical system having a critical aperture; first substantially monochromatic light source means of a given wavelength transmitting through the optical system; light bending means including a first transmission grating structure disposed at the critical aperture for providing areally distributed varying wave delays in light of the first wavelength transmitted through the optical system to provide an adjusted composite wavelength, said light bending means also including a second transmission grating structure displaced from the first transmission grating structure; and second monochromatic light source means of a second wavelength illuminating the second transmissive grating structure for alignment of the object being illuminated.
Claim 61
Independent Claim
108 words
A system for high resolution imagery comprising: an optical system having a critical aperture; first substantially monochromatic light source means of a given wavelength transmitting through the optical system; light bending means including a first transmission grating structure disposed at the critical aperture for providing areally distributed varying wave delays in light of the first wavelength transmitted through the optical system to provide an adjusted composite wavelength, said light bending means also including a second transmission grating structure displaced from the first transmission grating structure; and second monochromatic light source means of a second wavelength illuminating the second transmissive grating structure for alignment of the object being illuminated.
Claim 62
Dependent Claim
48 words
The system as set forth in claim 52 above, wherein the first transmission grating pattern is defined by a plurality of concentric tracks in an interior region of the light bending means, and wherein the second transmission grating structure is an annular pattern disposed about the interior region.
Claim 63
Dependent Claim
37 words
The system as set forth in claim 53 above, wherein the first and second transmission grating structures each comprise a plurality of concentric rings each defined by a progression of varying height plateaus on a transmissive substrate.
Claim 64
Dependent Claim
75 words
The system as set forth in claim 54 above, wherein the first monochromatic light source means operates in the ultraviolet region, and wherein the second monochromatic light source means operates in the red region, and wherein the second monochromatic light source means and the second transmission grating structure provide a finely focused reference beam at an object plane for the image defined by the first monochromatic light source means and the first transmission grating structure.
Claim 65
Dependent Claim
47 words
The system as set forth in claim 55 above, wherein the optical system further comprises aspheric means disposed along the optical path thereof for shaping the light from the second light source into an annular pupil of diameter corresponding to that of the second transmission grating structure.
Claim 66
Dependent Claim
128 words
A plate for use in an optical system, for selectively phase delaying different areal components of a substantially monochromatic illuminating beam throughout a cross sectional area, comprising: a substantially flat light transmissive substrate having a plurality of light bending rings thereon defining a base spherical bending characteristic, each of the rings being defined by a succession of plateaus relative to a nominal surface of the substrate, the plateaus varying in height by increments related to a wavelength of optical delay of monochromatic light incident thereon, the maximum height being less than one wavelength or an integral multiple thereof, and the rings varying nonlinearly in width relative to a central axis of the rings, and wherein the rings have a minimum radial width of the order of 10 microns.
Claim 67
Dependent Claim
128 words
A plate for use in an optical system, for selectively phase delaying different areal components of a substantially monochromatic illuminating beam throughout a cross sectional area, comprising: a substantially flat light transmissive substrate having a plurality of light bending rings thereon defining a base spherical bending characteristic, each of the rings being defined by a succession of plateaus relative to a nominal surface of the substrate, the plateaus varying in height by increments related to a wavelength of optical delay of monochromatic light incident thereon, the maximum height being less than one wavelength or an integral multiple thereof, and the rings varying nonlinearly in width relative to a central axis of the rings, and wherein the rings have a minimum radial width of the order of 10 microns.
Claim 68
Dependent Claim
23 words
The invention as set forth in claim 57 above, wherein the rings are defined by light transmissive silica layers deposited on the substrate.
Claim 69
Dependent Claim
27 words
The invention as set forth in claim 57 above, wherein the plateaus are defined by layers of varying depths removed from the nominal surface of the substrate.
Claim 70
Dependent Claim
39 words
The invention as set forth in claim 57 above, wherein the base spherical characteristic of the plate is selected to compensate for chromatic dispersion of an associated refractive optics system at the frequency of the substantially monochromatic illuminating beam.
Claim 71
Dependent Claim
36 words
The invention as set forth in claim 57 above, wherein the rings are disposed in sets defining a pupil function having more than one zone, the combination effectively increasing the depth of focus of the system.
Claim 72
Dependent Claim
43 words
The invention as set forth in claim 61 above, wherein the progression of plateaus within successive ring sets is interrupted to establish differences of or π between the phases of wavefronts passing through adjacent ring sets, such that the pupil function is provided.
Claim 73
Dependent Claim
26 words
The invention as set forth in claim 57 above, wherein the ring patterns are separated by selectively placed ring areas which are at least partially opaque.
Claim 74
Dependent Claim
41 words
The invention as set forth in claim 63 above, wherein the plate has transmissive patterns defining at least two π phase related pupil functions and wherein at least one of the ring patterns defining the pupils is at least partially opaque.
Claim 75
Dependent Claim
34 words
The invention as set forth in claim 57 above, wherein the substrate includes a first annular reference pattern outside the transmissive ring pattern and a second annular reference pattern inside the transmissive ring pattern.
Claim 76
Dependent Claim
23 words
The invention as set forth in claim 65 above, wherein the annular alignment patterns comprise a plurality of chrome rings on the substrate.
Claim 77
Dependent Claim
58 words
A light transmissive member for phase compensation of the microstructure of a distributed monochromatic beam in an optical system, comprising: a base of light transmissive material having a plurality of multi-plateau rings of varying widths, the plateaus varying within the rings in progressive sequences to provide fractional amounts of wave retardation at the wavelength of the monochromatic beam.
Claim 78
Dependent Claim
58 words
A light transmissive member for phase compensation of the microstructure of a distributed monochromatic beam in an optical system, comprising: a base of light transmissive material having a plurality of multi-plateau rings of varying widths, the plateaus varying within the rings in progressive sequences to provide fractional amounts of wave retardation at the wavelength of the monochromatic beam.
Claim 79
Dependent Claim
85 words
The member as set forth in claim 67 above, wherein the rings are concentric about a central axis and disposed in sets of varying phase relation to define a pupil function having different zones, wherein the rings provide maximum bending of the impinging beam of no greater than 5°, wherein the total local area wave retardation introduced by a ring is in integral multiples proportioned to a wavelength, and wherein there are in excess of about 800 rings for a 5" (125 mm) diameter pupil.
Claim 80
Dependent Claim
36 words
The member as set forth in claim 68 above, wherein the local area wave retardation is a maximum of about one wavelength, and wherein the rings are of a minimum of about 8 microns in width.
Claim 81
Dependent Claim
118 words
A light transmissive member comprising: a light transmissive substrate having an inner sector comprising a first plurality of rings each defined by a succession of plateaus of incrementally varying heights for selectively delaying the phase of local wavefronts of monochromatic wave energy of a first wavelength passing therethrough; an intermediate sector comprising a second plurality of rings each defined by a succession of plateaus of incrementally varying heights for selectively delaying the phase of local wavefronts of monochromatic wave energy of a second wavelength passing therethrough; and at least one reference sector having a plurality of rings of alternating transmissive and non-transmissive material defining a grating; and wherein all of the rings are concentric with a central axis.
Claim 82
Dependent Claim
118 words
A light transmissive member comprising: a light transmissive substrate having an inner sector comprising a first plurality of rings each defined by a succession of plateaus of incrementally varying heights for selectively delaying the phase of local wavefronts of monochromatic wave energy of a first wavelength passing therethrough; an intermediate sector comprising a second plurality of rings each defined by a succession of plateaus of incrementally varying heights for selectively delaying the phase of local wavefronts of monochromatic wave energy of a second wavelength passing therethrough; and at least one reference sector having a plurality of rings of alternating transmissive and non-transmissive material defining a grating; and wherein all of the rings are concentric with a central axis.
Claim 83
Dependent Claim
110 words
The invention as set forth in claim 70 above, wherein the first plurality of rings is dimensioned with thicknesses and widths for selective phase delay of local wavefronts of light in the ultraviolet region with the individual plateaus varying by regular fractions of the wavelength of the ultraviolet light, wherein the thicknesses and widths of the second plurality of rings in the transmissive region are selected to modify the local wavefronts of light in the red region, and wherein at least one reference sector includes bands of radially separated alignment grating rings having selected light bending powers, an outermost set of fiducial rings, and an innermost set of fiducial rings.
Claim 84
Dependent Claim
111 words
The invention as set forth in claim 71 above, wherein the substrate has a base height level and tracks within the rings define individual plateaus varying by one-eighth increments having a maximum height equal to approximately seven-eighths of the wavelength of the monochromatic light divided by the difference between the indices of refraction of the substrate and of the surrounding air, there being eight plateaus per nominal ring, and at least some tracks are partially opaque to provide light blockage of the local wavefronts thereat, and wherein the plateau sequences are interrupted in phase fashion to provide a pupil function having at least three zones in the ultraviolet light transmissive region.
Claim 85
Independent Claim
237 words
The method of preparing a substrate having multiple rings each defined by a group of minute plateaus of incrementally varying heights comprising the steps of: providing an outer sequence of reference rings while rotating the substrate in a plane normal to a nominal center axis, the axis of rotation during the definition of the fuducial rings constituting the reference axis for the plateau tracks to be defined by the system; covering the surface of the substrate on which tracks are to be provided with a photoresist material; mounting the substrate in non-centered fashion at an approximately nominal position; sensing eccentricity of the fiducial rings with respect to a fixed point as the substrate is rotated in the plane of location; directing a narrow beam onto the substrate covered with photoresist at a spaced apart region; laterally deflecting the beam in accordance with the eccentricity detected in the fiducial rings to provide an accuracy having less than 0.5 microns deviation from the center defined by the fiducial rings; removing and processing the substrate to provide a first plateau level in accordance with the exposed pattern; re-covering the substrate with a second layer of photoresist and remounting it in nominal position, with subsequent lateral readjustment to correct for eccentricity variations, followed by preparation of a second plateau level in accordance with the thus exposed photo pattern; and repeating the sequence until the desired number of plateau levels are defined.
Claim 86
Independent Claim
237 words
The method of preparing a substrate having multiple rings each defined by a group of minute plateaus of incrementally varying heights comprising the steps of: providing an outer sequence of reference rings while rotating the substrate in a plane normal to a nominal center axis, the axis of rotation during the definition of the fuducial rings constituting the reference axis for the plateau tracks to be defined by the system; covering the surface of the substrate on which tracks are to be provided with a photoresist material; mounting the substrate in non-centered fashion at an approximately nominal position; sensing eccentricity of the fiducial rings with respect to a fixed point as the substrate is rotated in the plane of location; directing a narrow beam onto the substrate covered with photoresist at a spaced apart region; laterally deflecting the beam in accordance with the eccentricity detected in the fiducial rings to provide an accuracy having less than 0.5 microns deviation from the center defined by the fiducial rings; removing and processing the substrate to provide a first plateau level in accordance with the exposed pattern; re-covering the substrate with a second layer of photoresist and remounting it in nominal position, with subsequent lateral readjustment to correct for eccentricity variations, followed by preparation of a second plateau level in accordance with the thus exposed photo pattern; and repeating the sequence until the desired number of plateau levels are defined.
Claim 87
Dependent Claim
41 words
The method as set forth in claim 73 above, wherein the increments of the plateau levels vary cumulatively in a sequence of one, two, four, etc. such that different plateau levels may be provided by a binary summation of cumulative steps.
Claim 88
Independent Claim
188 words
A system for writing a high precision pattern concentrically about a reference locus on a planar member comprising: a planar member having a surface reference pattern concentric about the reference locus; rotatable spindle means including top surface means for engaging the planar member in an approximate centered location; a stable base; carriage means movably mounted on the base and including means responsive to control signals for shifting position in a reference direction along the plane of the planar member; pattern writing means disposed in a selected writing region adjacent the plane of the planar member; sensing means positioned adjacent the surface reference pattern on the planar member to generate control signals indicative of deviation of the planar member from concentricity as the spindle rotates; and mechanical means coupling the carriage means and the base separately to one of the sensing means and the writing means for varying the position of writing on the planar member along the reference direction relative to the sensing means in response to the control signals, such that the patterns are written more precisely than the centration of the planar member on the spindle.
Claim 89
Independent Claim
188 words
A system for writing a high precision pattern concentrically about a reference locus on a planar member comprising: a planar member having a surface reference pattern concentric about the reference locus; rotatable spindle means including top surface means for engaging the planar member in an approximate centered location; a stable base; carriage means movably mounted on the base and including means responsive to control signals for shifting position in a reference direction along the plane of the planar member; pattern writing means disposed in a selected writing region adjacent the plane of the planar member; sensing means positioned adjacent the surface reference pattern on the planar member to generate control signals indicative of deviation of the planar member from concentricity as the spindle rotates; and mechanical means coupling the carriage means and the base separately to one of the sensing means and the writing means for varying the position of writing on the planar member along the reference direction relative to the sensing means in response to the control signals, such that the patterns are written more precisely than the centration of the planar member on the spindle.
Claim 90
Dependent Claim
61 words
A system as set forth in claim 75 above, wherein the rotatable spindle means is coupled to rotate in one of the base and the carriage means and the mechanical means couples the sensing means to that one of the base and the carriage means and couples the pattern writing means to the other of the base and the carriage means.
Claim 91
Dependent Claim
117 words
The system as set forth in claim 76 above, wherein the top surface means of the spindle means is horizontal, wherein the base includes first air bearing means for rotatably supporting the spindle means, wherein second air bearing means are disposed between the carriage means and the base, wherein the planar member has a photo responsive surface, wherein the pattern writing means comprises means defining a narrow light beam impinging on the surface of the planar member, wherein the means for varying the position of writing comprises a beam deflector, wherein the surface reference pattern comprises a plurality of concentric reference rings, and wherein the sensing means comprises photosensitive means including a periodic varying transmissivity reference pattern.
Claim 92
Independent Claim
289 words
A system for providing concentric circles on a substrate with high precision comprising: stable base means having a recess for receiving a rotatable member, and including a first horizontal reference surface and a second vertical reference surface; air sled means including first air bearing means for support on the first reference surface of the base member and second air bearing means for referencing the air sled means relative to the second reference surface, the second reference surface lying radial to the position of the rotatable member; air spindle means, including air spindle driver means, disposed in the recess of the base means and including air bearing means for support with respect to the base, the air spindle means having an upper horizontal surface for receiving the substrate and peripheral means for effecting two axis approximate adjustment of the substrate thereon in the horizontal plane; means including interferometer means for sensing the position of the air sled means along the second reference surface direction and servo controlled actuator means responsive to the position detected by the interferometer means for controlling the position of the air sled in the second reference surface direction; writing means mounted on to the air sled means for directing a modulated light beam toward the surface of the substrate in a track position responsive to the position of the air sled means; means responsive to the position of the substrate on the air spindle means for detecting eccentricity variations in the arbitrarily placed, roughly adjusted substrate during rotation of the air spindle; and means responsive to the detected eccentricity variations for deflecting the writing light beam in a direction parallel to the second reference surface direction before writing on the substrate, to compensate for eccentricity variations.
Claim 93
Independent Claim
289 words
A system for providing concentric circles on a substrate with high precision comprising: stable base means having a recess for receiving a rotatable member, and including a first horizontal reference surface and a second vertical reference surface; air sled means including first air bearing means for support on the first reference surface of the base member and second air bearing means for referencing the air sled means relative to the second reference surface, the second reference surface lying radial to the position of the rotatable member; air spindle means, including air spindle driver means, disposed in the recess of the base means and including air bearing means for support with respect to the base, the air spindle means having an upper horizontal surface for receiving the substrate and peripheral means for effecting two axis approximate adjustment of the substrate thereon in the horizontal plane; means including interferometer means for sensing the position of the air sled means along the second reference surface direction and servo controlled actuator means responsive to the position detected by the interferometer means for controlling the position of the air sled in the second reference surface direction; writing means mounted on to the air sled means for directing a modulated light beam toward the surface of the substrate in a track position responsive to the position of the air sled means; means responsive to the position of the substrate on the air spindle means for detecting eccentricity variations in the arbitrarily placed, roughly adjusted substrate during rotation of the air spindle; and means responsive to the detected eccentricity variations for deflecting the writing light beam in a direction parallel to the second reference surface direction before writing on the substrate, to compensate for eccentricity variations.
Claim 94
Dependent Claim
281 words
79 . A system for writing precision concentric tracks within about 0.1 micron of desired track position and eccentricity on an object element, comprising: means providing a stable reference member having a horizontal reference surface and a vertical reference surface; carriage means including means for supporting the carriage means by air bearings above the stable reference member to be movable along a first axis in the horizontal plane; air spindle means, including means for rotating the air spindle means about a vertical axis, and means for suspending the air spindle means in substantially fixed vertical central axis position relative to the reference member while rotating the air spindle means with respect thereto, the first axis being substantially parallel in the horizontal plane to a radius of the air spindle means; an object element having a planar surface with a fiducial pattern concentric with a predetermined central axis; means for initially positioning said object element on the air spindle with the planar surface being horizontal and including peripheral locator means; means mounted on the stable reference member for sensing the position of the fiducial ring pattern on said object element during rotation; means coupled to the carriage means for moving the carriage means laterally in the given direction to select track locations on said element; beam writing means coupled to the carriage means for directing a beam onto the surface of the element, said beam writing means including beam deflector means; and means responsive to variations in the second position of the fiducial rings during rotation of the object element for controlling the deflector means to compensate for variations in eccentricity of said element relative to the true rotational axis during rotation.
Claim 95
Dependent Claim
281 words
79 . A system for writing precision concentric tracks within about 0.1 micron of desired track position and eccentricity on an object element, comprising: means providing a stable reference member having a horizontal reference surface and a vertical reference surface; carriage means including means for supporting the carriage means by air bearings above the stable reference member to be movable along a first axis in the horizontal plane; air spindle means, including means for rotating the air spindle means about a vertical axis, and means for suspending the air spindle means in substantially fixed vertical central axis position relative to the reference member while rotating the air spindle means with respect thereto, the first axis being substantially parallel in the horizontal plane to a radius of the air spindle means; an object element having a planar surface with a fiducial pattern concentric with a predetermined central axis; means for initially positioning said object element on the air spindle with the planar surface being horizontal and including peripheral locator means; means mounted on the stable reference member for sensing the position of the fiducial ring pattern on said object element during rotation; means coupled to the carriage means for moving the carriage means laterally in the given direction to select track locations on said element; beam writing means coupled to the carriage means for directing a beam onto the surface of the element, said beam writing means including beam deflector means; and means responsive to variations in the second position of the fiducial rings during rotation of the object element for controlling the deflector means to compensate for variations in eccentricity of said element relative to the true rotational axis during rotation.
Claim 96
Dependent Claim
80 words
The invention as set forth in claim 79 above, wherein said means for sensing the position of the fiducial ring pattern comprises means for imaging the fiducial rings at a selected object plane, reticle means having a periodic pattern at the object plane, and photodetector means for sensing the composite image of the fiducial rings and the reticle, and wherein the deflector means deflects the writing beam along a direction parallel to the direction of movement of the carriage means.
Claim 97
Dependent Claim
156 words
81 . A system for positioning and illuminating an object having reference indicia with a precision image, comprising: an optical system including a number of refractive optical elements and a light energy transmitting element having a first region responsive to a selected first wavelength in optical path therewith for wavefront compensation of first wavelength light passing along the optical path, the compensating element including a second region responsive to a selected second wavelength for focusing a beam on the object; first wavelength light source means for illuminating the object via the optical path with a wavefront compensated beam; second wavelength light source means for illuminating the object via the second region of the transmitting element with a focused beam; means for sensing the position of the focused beam relative to the reference indicia on the object; and means coupled to the object and responsive to the means for sensing for controlling the position of the object.
Claim 98
Dependent Claim
156 words
81 . A system for positioning and illuminating an object having reference indicia with a precision image, comprising: an optical system including a number of refractive optical elements and a light energy transmitting element having a first region responsive to a selected first wavelength in optical path therewith for wavefront compensation of first wavelength light passing along the optical path, the compensating element including a second region responsive to a selected second wavelength for focusing a beam on the object; first wavelength light source means for illuminating the object via the optical path with a wavefront compensated beam; second wavelength light source means for illuminating the object via the second region of the transmitting element with a focused beam; means for sensing the position of the focused beam relative to the reference indicia on the object; and means coupled to the object and responsive to the means for sensing for controlling the position of the object.
Claim 99
Dependent Claim
95 words
The system as set forth in claim 81 above, wherein the first region of the transmitting element comprises a central area of multi-plateau rings concentric about a central axis and the second region comprises an annular region of multi-plateau rings about the central area and also concentric with the central axis, wherein the first wavelength light source operates in the ultraviolet region and the second wavelength light source operates in the red region, and wherein the object is a semiconductor wafer having fiducial marks on a photosensitive surface for receiving a number of image patterns.
Claim 100
Dependent Claim
124 words
83 . A system for positioning an object having a photosensitive surface responsive to a first wavelength of light energy and bearing positional reference indicia, comprising: positioner means responsive to control signals for adjusting the position of the object in two orthogonal axes; means providing light energy of a second wavelength different from the first for illuminating the object; light bending means disposed in the path of the light energy of the second wavelength for focusing the light energy on the object, the light bending means comprising a transmissive plate having a plurality of multi-plateau rings; and sensor means for sensing the position of the focused beam relative to the reference indicia on the object, and generating a control signal for the positioner means.
Claim 101
Dependent Claim
124 words
83 . A system for positioning an object having a photosensitive surface responsive to a first wavelength of light energy and bearing positional reference indicia, comprising: positioner means responsive to control signals for adjusting the position of the object in two orthogonal axes; means providing light energy of a second wavelength different from the first for illuminating the object; light bending means disposed in the path of the light energy of the second wavelength for focusing the light energy on the object, the light bending means comprising a transmissive plate having a plurality of multi-plateau rings; and sensor means for sensing the position of the focused beam relative to the reference indicia on the object, and generating a control signal for the positioner means.
Claim 102
Dependent Claim
104 words
A system as set forth in claim 83 above, wherein the object comprises a semiconductor wafer having photoresist material on the surface thereof, wherein the system includes an optical path, for light energy of the first wavelength, that is disposed within a given cross-sectional area and that includes means directing light energy of the first wavelength through the phase compensating area onto the photoresist material, wherein the light bending means includes a phase compensating area and is disposed about said given area, and wherein the system includes means for directing an annular beam of light of the second wavelength through the light bending means.
Claim 103
Independent Claim
91 words
The method of positioning and illuminating a semiconductor wafer having a photoresist coating responsive to a first wavelength of light energy that is to be illuminated with an image of the first wavelength, and including fiducial indicia, comprising the steps of: illuminating the wafer with a focused beam of a second wavelength different from the first; sensing the position of the focused beam relative to the fiducial indicia; positioning the wafer in response to the sensed position; and illuminating the wafer with light energy of the first wavelength forming an image.
Claim 104
Independent Claim
91 words
The method of positioning and illuminating a semiconductor wafer having a photoresist coating responsive to a first wavelength of light energy that is to be illuminated with an image of the first wavelength, and including fiducial indicia, comprising the steps of: illuminating the wafer with a focused beam of a second wavelength different from the first; sensing the position of the focused beam relative to the fiducial indicia; positioning the wafer in response to the sensed position; and illuminating the wafer with light energy of the first wavelength forming an image.
Claim 105
Dependent Claim
57 words
The method as set forth in claim 85 above, where the step of illuminating with a focused beam includes forming an annular beam, and wherein the annular beam is focused by bending through a predetermined angle, and wherein the wafer is illuminated with light energy of the first wavelength directed through the area within the annular beam.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.