Process for the production of layers with a high degree of hardness and/or low friction properties and containing at least two components

Abstract

Abstract To produce layers having high-hardness and/or low-friction properties, especially layers based on microdisperse or nanodisperse carbide/carbon layers, target material which is at an electrical potential is converted in a vacuum into a target plasma which passes onto the substrate which is at an electrical potential which is approximately the same as or higher than that of the target material, in order to form the desired layer thereon. The target material is formed from vanadium, the vanadium being vaporised by means of an electric arc to give a vanadium plasma. The conversion of the vanadium as the target material into the plasma takes place in the gas phase of ionised carbon. The process is operated in such a way that vanadium carbide and carbon are formed which then produce the layer on the substrate.

Inventors

• 👤 Detlev Dr. Repenning

Bibliographic Details