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EP0305076A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Personality board

Assignee: HP Inc
•
Filing: 1988-08-09
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Granted: —
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Expires: 2008-08-09
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Abstract

Abstract A semiconductor wafer tester personality board (103) having groups of contact pads (220,221,222) on an upper subboard (201) providing contact points for a test head (101) input/output spring pins (102) and a lower, underlying subboard (213) is provided. Each pad group includes a force pad (221), a sense pad (222) and a guard pad (220)and is partially enclosed by a guard pattern (204,205,206) of an electrically conductive material which is electrically connected to the guard pad (220). The pad groups are further separated by slits (202) formed in the upper subboard (201) separating adjacent groups. Within the groups, the force pad (221) is electrically separated from the sense pad (222) allowing separate lead wires (105) to the semiconductor wafer under test (108).

Inventors

  • 👤 Mitsuhiro Ogura

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-05 02:21
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07364; G01R1/07342

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 202 words
A personality board (103) for use with a semiconductor wafer test set interposed between said test set test head (101) and a probe card (106), said personality board (103) comprising: a plurality of electrically conductive pad groups (220,221,222) disposed on a circuit board (201) of insulating material, each of said pad groups (220,221,222) corresponding to a terminal group (102) of said test head (101), said terminal group (102) including at least a force terminal, a sense terminal and a guard terminal; each pad group (220,221,222) disposed on said circuit board (201) in spaced-apart relationship with each of the other pad groups, each pad group (220,221,222) separated from adjacent pad groups by a slit (202) in said insulating material; an electrically conductive material disposed on said circuit board (201) in a predetermined pattern forming a first guard pattern (204,205) surrounding said plurality of pad groups, (220,221,222) said first guard pattern (204,205) electrically connected to the pad (220) in each of said plurality of pad groups (220,221,222) corresponding to said guard terminal; characterized in that each of the pads (221,222) in each group corresponding to said force terminal and said sense terminal, respectively, being electrically separated from each other on said circuit board (201).
Claim 2
Dependent Claim 202 words
A personality board (103) for use with a semiconductor wafer test set interposed between said test set test head (101) and a probe card (106), said personality board (103) comprising: a plurality of electrically conductive pad groups (220,221,222) disposed on a circuit board (201) of insulating material, each of said pad groups (220,221,222) corresponding to a terminal group (102) of said test head (101), said terminal group (102) including at least a force terminal, a sense terminal and a guard terminal; each pad group (220,221,222) disposed on said circuit board (201) in spaced-apart relationship with each of the other pad groups, each pad group (220,221,222) separated from adjacent pad groups by a slit (202) in said insulating material; an electrically conductive material disposed on said circuit board (201) in a predetermined pattern forming a first guard pattern (204,205) surrounding said plurality of pad groups, (220,221,222) said first guard pattern (204,205) electrically connected to the pad (220) in each of said plurality of pad groups (220,221,222) corresponding to said guard terminal; characterized in that each of the pads (221,222) in each group corresponding to said force terminal and said sense terminal, respectively, being electrically separated from each other on said circuit board (201).

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