Abstract A process and apparatus for cleaning then coating articles such as circuit board panels with a metallic coating encompasses an enclosed evacuated chamber (125) having a controlled low pressure gaseous process environment. The articles to be cleaned, then coated with a metallic deposit are continuously fed into the enclosed chamber through an air lock mechanism (110) that permits the evacuated chamber to remain at its predetermined pressure and gaseous composition. Included within the chamber are a plurality of transport paths or panel carrying tracks (111). The articles to be cleaned, then coated are continuously transported along the various tracks while being coated. The plurality of tracks (111) are positioned to be substantially parallel with each other so that articles on each track follow paths similar in direction and substantially equidistant from one another. A plurality of bidirectional coating sources are sequentially positioned on both sides of each article transport track so that both sides of the panels are coated.
A method of depositing a metallic coating on an article, CHARACTERIZED BY the steps of: evacuating a closed chamber and providing a controlled gaseous environment at low pressure within the closed chamber; positioning a plurality of serial arrays of bidirectional targets within the closed chamber, and the serial arrays being substantially parallel with one another; selectively transporting articles to be metallically coated along a plurality of defined transport paths, with each transport path being located substantially equidistantly intermediate to two adjacent serial arrays of bidirectional targets; and generating a magnetic field within the closed chamber which has lines of flux adjacent to a surface of the article which are substantially parallel to the surface of the article in order to minimize article heating and to enhance the sputter yield of the bidirectional targets so that emissions of at least a majority of free metallic atoms from the target have a trajectory that intersects a panel on an adjacent transport path.
Claim 2
Independent Claim
160 words
A method of depositing a metallic coating on an article, CHARACTERIZED BY the steps of: evacuating a closed chamber and providing a controlled gaseous environment at low pressure within the closed chamber; positioning a plurality of serial arrays of bidirectional targets within the closed chamber, and the serial arrays being substantially parallel with one another; selectively transporting articles to be metallically coated along a plurality of defined transport paths, with each transport path being located substantially equidistantly intermediate to two adjacent serial arrays of bidirectional targets; and generating a magnetic field within the closed chamber which has lines of flux adjacent to a surface of the article which are substantially parallel to the surface of the article in order to minimize article heating and to enhance the sputter yield of the bidirectional targets so that emissions of at least a majority of free metallic atoms from the target have a trajectory that intersects a panel on an adjacent transport path.
Claim 3
Dependent Claim
56 words
A method of depositing a metallic coating on an article as defined in claim 1 and CHARACTERIZED BY the additional step of continuously inserting articles into the closed chamber onto the path and continuously removing articles that are coated from the closed chamber without altering pressure or composition of the gaseous atmosphere within the closed chamber.
Claim 4
Dependent Claim
67 words
A method of depositing a metallic coating on an article as defined in claim 1 and CHARACTERIZED BY the additional step of inserting a woven wire screen between at least a portion of two oppositely directed coating sources per defined transport path in order to electrically neutralize ions passing through the screen whereby the neutralized sputtered atoms effect a cleaning action at a surface of the article.
Claim 5
Dependent Claim
52 words
A method of depositing a metallic coating on an article as defined in claim 1 and CHARACTERIZED BY the additional step of arranging for a surface of the article in each transport path to have tactile contact with a cooled surface in order to maintain the article below a desired temperature limit.
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