Patent EP0288767A2 successfully refreshed from Google Patents.
EP0288767A2
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Method for forming a shielded transmission line
Assignee: International Business Machines Corp
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Filing: 1988-03-29
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Granted: —
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Expires: 2008-03-29
Abstract
Abstract A coaxial wiring structure that is constructed by depositing and etching a series of conductor layers and insulator layers: the shielded transmission line comprises a first plate structure (52) disposed on a first insulator layer (50) disposed on a substrate; a second insulator layer (54) disposed on the first insulator layer and the first plate structure, the second insulator layer having first troughs exposing end portions of the first plate structure; a central conductor (56A) and at least two peripheral conductors (56) disposed on the second insulator layer, the two peripheral conductors contacting the end portions of the first plate structure through the first troughs; a third insulator layer (58) disposed on the second insulator layer, the two peripheral conductors, and the central conductor, the third insulator layer (58) having second troughs exposing respective ones of the peripheral conductors; and an upper plate structure (60) formed on the third insulator layer, the upper plate structure contacting the peripheral conductors through the second troughs. In combination, the upper plate structure (60), the peripheral conductor structures (56) and the lower plate structure (52) surround the central conductor (56A) and are insulated therefrom by the respective insulator layers. The surrounding conductors are coupled to ground potential, and high frequency transmission signals are propagated along the central conductor.
Inventors
- 👤 John Edward Cronin
- 👤 Michael Albert Leach
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-01 15:19
CPC Classifications
H; H05; H05K; H05K1/00; H05K1/02; H05K1/0213; H05K1/0216; H05K1/0218; H05K1/0219; H05K1/0221; H10; H10W; H10W70/00; H10W70/60; H10W70/611; H10W70/62; H10W70/63; H10W70/635; H05K2201/00; H05K2201/09; H05K2201/09209; H05K2201/095; H05K2201/096; H05K2203/00; H05K2203/07; H05K2203/0703; H05K2203/0733; H05K3/00; H05K3/46; H05K3/4644; H10W44/00; H10W44/20; H10W44/203; H10W44/209; H10W44/212; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49016; Y10T29/49117; Y10T29/49123
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
207 words
A shielded transmission line, comprising: a first conductive plate structure (52) disposed on a first insulator layer (50) disposed on a substrate; a second insulator layer (54) disposed on said first insulator and said first conductive plate structure, said second insulator layer having first troughs exposing selected portions of said first plate structure (52); a central conductor structure (56A) and at least two peripheral conductor structures (56) disposed on said second insulator layer, said peripheral conductors being disposed about and spaced from said central conductor structure, said peripheral conductor structures contacting said first conductive plate structure through said first troughs; a third insulator layer (58) disposed on said second insulator layer (56), said peripheral conductor structures, and said central conductor structure, said third insulator layer insulating said central conductor from said peripheral conductors, said third insulator layer having second troughs that expose said peripheral conductor structures; and a second conductive plate structure (60) disposed on said third insulator layer, said second conductive plate structure contacting said peripheral conductor structures through said second troughs, said second conductive plate structure (60), said peripheral conductor structure (56), and said first conductive plate structure (52) preventing interference between signals propagated along said central conductor structure and signals propagated on adjacent lines.
Claim 2
Dependent Claim
207 words
A shielded transmission line, comprising: a first conductive plate structure (52) disposed on a first insulator layer (50) disposed on a substrate; a second insulator layer (54) disposed on said first insulator and said first conductive plate structure, said second insulator layer having first troughs exposing selected portions of said first plate structure (52); a central conductor structure (56A) and at least two peripheral conductor structures (56) disposed on said second insulator layer, said peripheral conductors being disposed about and spaced from said central conductor structure, said peripheral conductor structures contacting said first conductive plate structure through said first troughs; a third insulator layer (58) disposed on said second insulator layer (56), said peripheral conductor structures, and said central conductor structure, said third insulator layer insulating said central conductor from said peripheral conductors, said third insulator layer having second troughs that expose said peripheral conductor structures; and a second conductive plate structure (60) disposed on said third insulator layer, said second conductive plate structure contacting said peripheral conductor structures through said second troughs, said second conductive plate structure (60), said peripheral conductor structure (56), and said first conductive plate structure (52) preventing interference between signals propagated along said central conductor structure and signals propagated on adjacent lines.
Claim 3
Dependent Claim
37 words
The shielded transmission line as recited in Claim 1, wherein said conductor structures are comprised of a material selected from the group consisting of aluminum, aluminum alloys, refractory metals, refractory metal alloys, doped polysilicon, and mixtures thereof.
Claim 4
Dependent Claim
34 words
The shielded transmission line of Claim 1 or 2, wherein said insulator layers are comprised of a material selected from the group consisting of silicon oxide, silicon nitride, polyimide, doped glass, and mixtures thereof.
Claim 5
Dependent Claim
44 words
The shielded transmission line as recited in on of the Claims 1 - 3, wherein said peripheral conductor structure is comprised of a first conductive material (53) disposed in said first troughs and a second conductive material (57) disposed on said second insulator layer.
Claim 6
Dependent Claim
21 words
The shielded transmission line as recited in Claim 4, wherein said first conductive material is comprised of a CVD refractory metal.
Claim 7
Dependent Claim
40 words
The shielded transmission line of one of the Claims 1 - 5, wherein the second plate structure is comprised of a third conductive material disposed in said second troughs and a fourth conductive material disposed on said third insulator layer.
Claim 8
Dependent Claim
19 words
The shielded transmission line of Claim 6, wherein said third conductive material is comprised of a CVD refractory metal.
Claim 9
Dependent Claim
292 words
A shielded transmission line, comprising: a first patterned conductor layer (52) disposed on a first insulator layer (50) arranged on a substrate; a second insulator layer (54) disposed on said first insulator layer and said first conductor layer, said second insulator layer having first troughs that expose selected portions of said first conductor layer; a third insulator layer (55) disposed on said second insulator layer, said third insulating layer having second troughs, at least some of said second troughs being disposed over, and being wider than, said first troughs in said second insulating layer; a second conductor layer (56) disposed within said first and second troughs in said, second and third insulator layers, respectively, to form a central conductor structure (56A) and a pair of peripheral conductor structures (56) disposed about and spaced from said central conductor structure, said peripheral conductor structures at least partially contacting respective portions of said first conductor layer exposed by said first troughs in said second insulator layer; a fourth insulator layer (58) disposed on said second insulator layer and said third conductor layer, said fourth insulator layer having third troughs holes that expose respective ones of said peripheral conductor structures (56); a fifth insulator layer (59) disposed on said fourth insulator layer, said fifth insulator layer having a fourth trough exposing portions of said fourth insulator layer between said third troughs as well as said third troughs; and a fourth conductor layer (60) disposed within said third and fourth troughs, in said fourth and fifth insulator layers, respectively, said first conductor layer, said peripheral conductor structures, and said fourth conductor layer totally surrounding said central conductor structure and being coupled to a first potential, said central conductor structure being coupled to a source of varying potential.
Claim 10
Dependent Claim
292 words
A shielded transmission line, comprising: a first patterned conductor layer (52) disposed on a first insulator layer (50) arranged on a substrate; a second insulator layer (54) disposed on said first insulator layer and said first conductor layer, said second insulator layer having first troughs that expose selected portions of said first conductor layer; a third insulator layer (55) disposed on said second insulator layer, said third insulating layer having second troughs, at least some of said second troughs being disposed over, and being wider than, said first troughs in said second insulating layer; a second conductor layer (56) disposed within said first and second troughs in said, second and third insulator layers, respectively, to form a central conductor structure (56A) and a pair of peripheral conductor structures (56) disposed about and spaced from said central conductor structure, said peripheral conductor structures at least partially contacting respective portions of said first conductor layer exposed by said first troughs in said second insulator layer; a fourth insulator layer (58) disposed on said second insulator layer and said third conductor layer, said fourth insulator layer having third troughs holes that expose respective ones of said peripheral conductor structures (56); a fifth insulator layer (59) disposed on said fourth insulator layer, said fifth insulator layer having a fourth trough exposing portions of said fourth insulator layer between said third troughs as well as said third troughs; and a fourth conductor layer (60) disposed within said third and fourth troughs, in said fourth and fifth insulator layers, respectively, said first conductor layer, said peripheral conductor structures, and said fourth conductor layer totally surrounding said central conductor structure and being coupled to a first potential, said central conductor structure being coupled to a source of varying potential.
Claim 11
Independent Claim
238 words
A method for forming a shielded transmission line, comprising the steps of: forming a first insulator layer (50) on an exposed surface of a substrate; forming a first conductor layer (52) on a surface of said first insulator layer, and patterning said first conductor layer to form a first conductive plate structure; forming a second insulator layer (54) on said first insulator layer and said first conductor layer; etching said second insulator layer to form troughs therein that expose end portions of said first conductive plate structure; forming a second conductor layer on said second insulator layer, said second conductor layer filling said troughs in said second insulator layer to contact said first plate structure; patterning said second conductor layer so as to define a central conductor structure (56A) and a pair of peripheral conductor structures (56) separated from and disposed about said central conductor structure, said peripheral conductor structures being coupled to said first plate structure (52); forming a third insulator layer (58) on said second insulator layer and said second conductor layer; etching said third insulator layer to form troughs therein that expose said peripheral conductor structures; depositing a third conductor layer (60) on said third insulator layer, said third conductor layer filling said troughs in said third insulator layer to contact said peripheral conductor structures; and patterning said third conductor layer so as to form a second plate structure coupled to said peripheral conductor structure.
Claim 12
Independent Claim
238 words
A method for forming a shielded transmission line, comprising the steps of: forming a first insulator layer (50) on an exposed surface of a substrate; forming a first conductor layer (52) on a surface of said first insulator layer, and patterning said first conductor layer to form a first conductive plate structure; forming a second insulator layer (54) on said first insulator layer and said first conductor layer; etching said second insulator layer to form troughs therein that expose end portions of said first conductive plate structure; forming a second conductor layer on said second insulator layer, said second conductor layer filling said troughs in said second insulator layer to contact said first plate structure; patterning said second conductor layer so as to define a central conductor structure (56A) and a pair of peripheral conductor structures (56) separated from and disposed about said central conductor structure, said peripheral conductor structures being coupled to said first plate structure (52); forming a third insulator layer (58) on said second insulator layer and said second conductor layer; etching said third insulator layer to form troughs therein that expose said peripheral conductor structures; depositing a third conductor layer (60) on said third insulator layer, said third conductor layer filling said troughs in said third insulator layer to contact said peripheral conductor structures; and patterning said third conductor layer so as to form a second plate structure coupled to said peripheral conductor structure.
References Cited (Backward Citations)
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