Patent US2122908A successfully refreshed from Google Patents.
Patent EP0288001A2 successfully refreshed from Google Patents.
EP0288001A2
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EP
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Process for producing superconducting thin film and device therefor
Assignee: Nissin Electric Co Ltd
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Filing: 1988-04-19
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Granted: —
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Expires: 2008-04-19
Abstract
Abstract A process for producing a superconducting thin film of the present invention comprises: supplying onto a substrate a group IIa metal and/or an oxide thereof, a group IIIa metal and/or an oxide thereof, and copper and/or an oxide thereof; and irradiating the substrate with an oxygen neutral beam, to thereby form a thin film of IIa-IIIa-Cu oxide.
Inventors
- 👤 Shuichi Nogawa
- 👤 Eiji Kamijo
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 23:13
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0548; H10N60/0408
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
53 words
A process for producing a superconducting thin film, comprising: supplying onto a substrate a group IIa metal and/or an oxide thereof, a group IIIa metal and/or an oxide thereof, and copper and/or an oxide thereof; and irradiating the substrate with an oxygen neutral beam, to thereby form a thin film of IIa-IIIa-Cu oxide.
Claim 2
Dependent Claim
53 words
A process for producing a superconducting thin film, comprising: supplying onto a substrate a group IIa metal and/or an oxide thereof, a group IIIa metal and/or an oxide thereof, and copper and/or an oxide thereof; and irradiating the substrate with an oxygen neutral beam, to thereby form a thin film of IIa-IIIa-Cu oxide.
Claim 3
Dependent Claim
35 words
A process according to claim 1, wherein a group IIa metal and/or an oxide thereof, a group IIIa metal and/or an oxide thereof, and copper and/or an oxide thereof are simultaneously vapor-deposited on the substrate.
Claim 4
Dependent Claim
40 words
A process according to claim 1, wherein a group IIa metal and/or an oxide thereof, a group IIIa metal and/or an oxide thereof, and copper and/or an oxide thereof are successively evaporated to form layers in superposition on the substrate.
Claim 5
Dependent Claim
32 words
A process according to claim 1, wherein copper and/or an oxide thereof is evaporated alternately with the two other metals and or oxides thereof to form layers in superposition on the substrate.
Claim 6
Dependent Claim
40 words
A process according to claim 1, wherein a group IIa metal and/or an oxide thereof, a group IIIa metal and/or an oxide thereof, and copper and/or an oxide thereof are successively sputtered to form layers in superposition on the substrate.
Claim 7
Dependent Claim
31 words
A process according to claim 1 wherein copper and/or an oxide thereof is sputtered alternately with the two other metals and/or oxides thereof to form layers in superposition on the substrate.
Claim 8
Independent Claim
57 words
A device for producing a superconducting thin film, comprising: means for supplying onto a substrate a group IIa metal and/or an oxide thereof, a group IIIa metal and/or an oxide thereof, and copper and/or an oxide thereof; and means for irradiating said substrate with an oxygen neutral beam, to thereby form a thin film of IIa-IIIa-Cu oxide.
Claim 9
Independent Claim
57 words
A device for producing a superconducting thin film, comprising: means for supplying onto a substrate a group IIa metal and/or an oxide thereof, a group IIIa metal and/or an oxide thereof, and copper and/or an oxide thereof; and means for irradiating said substrate with an oxygen neutral beam, to thereby form a thin film of IIa-IIIa-Cu oxide.
Claim 10
Dependent Claim
47 words
A device of Claim 7, wherein said supplying means comprises: crucibles charged with the group IIa metal and/or an oxide thereof, the group IIIa metal and/or an oxide thereof, and the copper and/or an oxide thereof; and electron beam sources for irradiating said crucibles with electron beams.
Claim 11
Dependent Claim
46 words
A device of Claim 7, wherein said supplying means comprises: targets made of the group IIa metal and/or an oxide thereof, the group IIIa metal and/or an oxide thereof, and the copper and/or an oxide thereof; and means for generating neutral beam to sputter said targets.
Claim 12
Dependent Claim
41 words
A device of Claim 7, wherein said supplying means further comprises means for supplying the group IIa metal and/or an oxide thereof, the group IIIa metal and/or an oxide thereof, and the copper and/or an oxide thereof, alternately with one another.
Claim 13
Dependent Claim
42 words
A device of Claim 7, wherein said supplying means further comprises means for supplying the group IIa metal and/or an oxide thereof and the group IIIa metal and/or an oxide thereof and the copper and/or an oxide thereof, alternately with each other.
Claim 14
Dependent Claim
32 words
A device of Claim 7, wherein said oxygen neutral beam irradiation means comprises: oxygen ion source for generating oxygen ions; and means for neutralizing the oxygen ions to form neutral oxygen beam.
References Cited (Backward Citations)
No citation records indexed.
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