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EP0286829A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Electronic device comprising a polyimide layer, and method for its production

Assignee: Hitachi Ltd
•
Filing: 1988-03-08
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Granted: —
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Expires: 2008-03-08
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Abstract

Abstract An electronic device having a polyimide layer (7) which is in direct or indirect contact with at least one active area (6) of the electronic device, wherein the poly­imide has, at one end of the molecule, a carboxy group attached to an aliphatic carbon atom. The polyimide layer (7) of the electronic device consists of a homogeneous insulating film improved in flatness and adhesive properties without imparing the heat resistant, mechanical properties, and electrical properties inherent in polyimides, whereby it has been possible to provide the electronic device improved in reliability and performance.

Inventors

  • 👤 Takao Miwa
  • 👤 Shunichi Numata
  • 👤 Koji Fujisaki
  • 👤 Takayoshi Ikeda
  • 👤 Noriyuki Kinjo

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-05 17:50
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/68; H10P14/683; G; G11; G11B; G11B5/00; G11B5/127; G11B5/31; G11B5/62; G11B5/68; G11B5/70; G11B5/702; H01; H01B; H01B3/00; H01B3/18; H01B3/30; H01B3/303; H01B3/306; H01F; H01F10/00; H01F10/26; H01F10/30; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0313; H05K1/032; H05K1/0346; H05K3/00; H05K3/10; H05K3/14; H05K3/16; H10W; H10W20/00; H10W20/40; H10W20/45; H10W20/48; H10W70/00; H10W70/60; H10W70/67; H10W70/69; H10W74/00; H10W74/40; H10W74/47; H05K2201/00; H05K2201/03; H05K2201/0332; H05K2201/0335; H05K2201/0355

Claims Analysis

Total Claims: 23
Claim 1
Independent Claim 101 words
An electronic device having a polyimide layer which is in direct or indirect contact with at least one active area of the electronic device, wherein the main chain of polyimide is constituted of all or some of the residues: wherein, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 4, m is an integer of 0 to 3, and n is an integer of 0 to 2, and the polyimide has, at one end of the molecule, a carboxy group attached to an aliphatic carbon atom.
Claim 2
Dependent Claim 101 words
An electronic device having a polyimide layer which is in direct or indirect contact with at least one active area of the electronic device, wherein the main chain of polyimide is constituted of all or some of the residues: wherein, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 4, m is an integer of 0 to 3, and n is an integer of 0 to 2, and the polyimide has, at one end of the molecule, a carboxy group attached to an aliphatic carbon atom.
Claim 3
Dependent Claim 94 words
An electronic device having an insulating layer formed of a polyimide between conductors or between semiconductors, wherein the main chain of the polyimide is constituted of all or some of the residues: wherein, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 4, m is an integer of 0 to 3, and n is an integer of 0 to 2, and the polyimide has, at one end of the molecule, a carboxy group attached to an aliphatic carbon atom.
Claim 4
Dependent Claim 94 words
An electronic device having an insulating layer formed of a polyimide between conductors or between semiconductors, wherein the main chain of the polyimide is constituted of all or some of the residues: wherein, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 4, m is an integer of 0 to 3, and n is an integer of 0 to 2, and the polyimide has, at one end of the molecule, a carboxy group attached to an aliphatic carbon atom.
Claim 5
Dependent Claim 22 words
The electronic device of Claim 2, wherein the insulating layer is formed between a silicon wafer and a wiring or between wirings.
Claim 6
Dependent Claim 102 words
A thin-film magnetic head having an insulating layer between a substrate and a wiring or between wirings, wherein the insulating layer is a polyimide layer, the main chain of the polyimide is constituted of all or some of the residues: wherein, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 4, m is an integer of 0 to 3, and n is an integer of 0 to 2, and the polyimide has at one end of the molecule a carboxy group attached to an aliphatic carbon atom.
Claim 7
Dependent Claim 102 words
A thin-film magnetic head having an insulating layer between a substrate and a wiring or between wirings, wherein the insulating layer is a polyimide layer, the main chain of the polyimide is constituted of all or some of the residues: wherein, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 4, m is an integer of 0 to 3, and n is an integer of 0 to 2, and the polyimide has at one end of the molecule a carboxy group attached to an aliphatic carbon atom.
Claim 8
Dependent Claim 102 words
A high-density circuit board having an insulat­ing layer between a substrate and a wiring or between wirings, wherein the insulating layer is a polyimide layer, the main chain of the polyimide is constituted of all or some of the residues: wherein, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 4, m is an integer of 0 to 3, and n is an integer of 0 to 2, and the polyimide has, at one end of the molecule, a carboxy group attached to an aliphatic carbon atom.
Claim 9
Dependent Claim 102 words
A high-density circuit board having an insulat­ing layer between a substrate and a wiring or between wirings, wherein the insulating layer is a polyimide layer, the main chain of the polyimide is constituted of all or some of the residues: wherein, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 4, m is an integer of 0 to 3, and n is an integer of 0 to 2, and the polyimide has, at one end of the molecule, a carboxy group attached to an aliphatic carbon atom.
Claim 10
Dependent Claim 102 words
A magnetic bubble memory having an insulating layer between a substrate and a wiring or between wirings, wherein the insulating layer is a polyimide layer, the main chain of the polyimide is constituted of all or some of the residues: wherein, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 4, m is an integer of 0 to 3, and n is an integer of 0 to 2, and the poly­imide has, at one end of the molecule, a carboxy group attached to an aliphatic carbon atom.
Claim 11
Dependent Claim 102 words
A magnetic bubble memory having an insulating layer between a substrate and a wiring or between wirings, wherein the insulating layer is a polyimide layer, the main chain of the polyimide is constituted of all or some of the residues: wherein, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 4, m is an integer of 0 to 3, and n is an integer of 0 to 2, and the poly­imide has, at one end of the molecule, a carboxy group attached to an aliphatic carbon atom.
Claim 12
Dependent Claim 104 words
A magnetic disk having a magnetic recording medium comprising a magnetic substance-containing insulating layer formed on a nonmagnetic substrate, wherein the insulating layer is a polyimide layer, the main chain of the polyimide is constituted of all or some of the residues: wherein, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 4, m is an integer of 0 to 3, and n is an integer of 0 to 2, and the polyimide has, at one end of the molecule, a carboxy group attached to an aliphatic carbon atom.
Claim 13
Dependent Claim 104 words
A magnetic disk having a magnetic recording medium comprising a magnetic substance-containing insulating layer formed on a nonmagnetic substrate, wherein the insulating layer is a polyimide layer, the main chain of the polyimide is constituted of all or some of the residues: wherein, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 4, m is an integer of 0 to 3, and n is an integer of 0 to 2, and the polyimide has, at one end of the molecule, a carboxy group attached to an aliphatic carbon atom.
Claim 14
Dependent Claim 96 words
A solar battery comprising a substrate coated with an insulating layer, wherein the insulating layer is a polyimide layer, the main chain of the polyimide is constituted of all or some of the residues: wherein, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 4, m is an integer of 0 to 3, and n is an integer of 0 to 2, and the polyimide has, at one end of the molecule, a carboxy group attached to an aliphatic carbon atom.
Claim 15
Dependent Claim 96 words
A solar battery comprising a substrate coated with an insulating layer, wherein the insulating layer is a polyimide layer, the main chain of the polyimide is constituted of all or some of the residues: wherein, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 4, m is an integer of 0 to 3, and n is an integer of 0 to 2, and the polyimide has, at one end of the molecule, a carboxy group attached to an aliphatic carbon atom.
Claim 16
Dependent Claim 102 words
A memory device having an insulating layer as an α-ray shield film between conductors or between semi­conductors, wherein the insulating layer is a polyimide layer, the main chain of the polyimide is constituted of all or some of the residues: wherein, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 4, m is an integer of 0 to 3, and n is an integer of 0 to 2, and the polyimide has, at one end of the molecule, a carboxy group attached to an aliphatic carbon atom.
Claim 17
Dependent Claim 102 words
A memory device having an insulating layer as an α-ray shield film between conductors or between semi­conductors, wherein the insulating layer is a polyimide layer, the main chain of the polyimide is constituted of all or some of the residues: wherein, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 4, m is an integer of 0 to 3, and n is an integer of 0 to 2, and the polyimide has, at one end of the molecule, a carboxy group attached to an aliphatic carbon atom.
Claim 18
Dependent Claim 102 words
An electronic device having a polyimide film which is in direct or indirect contact with at least one active area of the electronic device, wherein the polyimide film is produced by reacting the following compounds I and II: with each other, where the n of compound I and the nʺ of compound II are each an integer of 0 to 10, the nʹ of compound I is an integer of 2 to 12, and Ar and Arʹ are aromatic residues with the proviso that one end of the compound I molecule need not take imido structure and may take acid anhydride structure.
Claim 19
Dependent Claim 102 words
An electronic device having a polyimide film which is in direct or indirect contact with at least one active area of the electronic device, wherein the polyimide film is produced by reacting the following compounds I and II: with each other, where the n of compound I and the nʺ of compound II are each an integer of 0 to 10, the nʹ of compound I is an integer of 2 to 12, and Ar and Arʹ are aromatic residues with the proviso that one end of the compound I molecule need not take imido structure and may take acid anhydride structure.
Claim 20
Dependent Claim 95 words
The electronic device of Claim 10, wherein the Ar of compounds I and II is selected from the aromatic residues: and the Arʹ of compounds I and II is selected from the aromatic residues: where, in residues III, IV, V, VI, VII, VIII, and IX, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl and halogen, ℓ is an integer of 0 to 2 in residue III and an integer of 0 to 4 in residues VII, VIII, and IX, and m is an integer of 0 to 3.
Claim 21
Dependent Claim 105 words
A process for producing an electronic device having a polyimide film which is in direct or indirect contact with at least one active area of the electronic device, wherein the polyimide film is produced by reacting the following compounds I and II: with each other, where the n of compound I and the nʺ of compound II are each an integer of 0 to 10, the nʹ compound I is an integer of 2 to 12, and Ar and Arʹ are aromatic residues with the proviso that one end of the compound I molecule need not take imido structure and may take acid anhydride structure.
Claim 22
Dependent Claim 105 words
A process for producing an electronic device having a polyimide film which is in direct or indirect contact with at least one active area of the electronic device, wherein the polyimide film is produced by reacting the following compounds I and II: with each other, where the n of compound I and the nʺ of compound II are each an integer of 0 to 10, the nʹ compound I is an integer of 2 to 12, and Ar and Arʹ are aromatic residues with the proviso that one end of the compound I molecule need not take imido structure and may take acid anhydride structure.
Claim 23
Dependent Claim 94 words
The process of Claim 12, wherein the Ar of compounds I and II is selected from the aromatic residues: and the Arʹ of compounds I and II is selected from the aromatic residues: where, in residues III, IV, V, VI, VII, VIII, and IX, R is selected from the group consisting of alkyl, fluorinated alkyl, alkoxy, fluorinated alkoxy, acyl, and halogen, ℓ is an integer of 0 to 2 in residue III and an integer of 0 to 4 in residues VII, VIII, and IX, and m is an integer of 0 to 3.

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