Patent US4266246A successfully refreshed from Google Patents.
Patent EP0283923A1 successfully refreshed from Google Patents.
EP0283923A1
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EP
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Sputtered titanium oxynitride films
Assignee: PPG Industries Ohio Inc
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Filing: 1988-03-17
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Granted: —
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Expires: 2008-03-17
Abstract
Abstract A titanium oxynitride film, method for its production, and coated articles comprising titanium oxynitride in combination with other metal-containing films are disclosed.
Inventors
- 👤 Frank Howard Gillery
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 23:14
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/22; C23; C23C; C23C16/00; C23C16/006; C23C14/00; C23C14/0015; C23C14/06; C23C14/0676
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
82 words
A method of making a coated article by placing a substrate in a coating chamber, evacuating said chamber and depositing a coating onto a surface of a substrate, characterized by a. providing an atmosphere comprising oxygen and nitrogen in said chamber; b. placing a titanium cathode in said chamber facing a surface of said substrate; c. sputtering said titanium cathode in said atmosphere comprising oxygen and nitrogen in said chamber thereby depositing a titanium oxynitride coating on said surface of said substrate.
Claim 2
Independent Claim
82 words
A method of making a coated article by placing a substrate in a coating chamber, evacuating said chamber and depositing a coating onto a surface of a substrate, characterized by a. providing an atmosphere comprising oxygen and nitrogen in said chamber; b. placing a titanium cathode in said chamber facing a surface of said substrate; c. sputtering said titanium cathode in said atmosphere comprising oxygen and nitrogen in said chamber thereby depositing a titanium oxynitride coating on said surface of said substrate.
Claim 3
Dependent Claim
11 words
A method according to claim 1, wherein said substrate is glass.
Claim 4
Dependent Claim
22 words
A method according to claim 1, wherein said atmosphere comprises from 10 to 50 percent oxygen and 50 to 90 percent nitrogen.
Claim 5
Dependent Claim
25 words
A method according to claim 1, wherein a second layer of a highly infrared reflective metal film is deposited on a surface of said substrate.
Claim 6
Independent Claim
24 words
A method according to claims 1 and 4, wherein as a further step a third layer is deposited on said substrate comprising titanium oxynitride.
Claim 7
Independent Claim
51 words
A method according to claims 1, 4 and 5, wherein a first layer of titanium oxynitride is deposited on said substrate, a layer of a highly infrared reflective metal film is deposited over the titanium oxynitride, and a second titanium oxynitride layer is deposited over the highly infrared reflective metal film.
Claim 8
Dependent Claim
24 words
A method according to claim 4 wherein as a further step a third layer is deposited on said substrate comprising a second metallic film.
Claim 9
Dependent Claim
29 words
A method according to claim 7, wherein said second metallic film comprises a metal alloy selected from the group of nickel alloys and iron alloys, stainless steel and Inconel.
Claim 10
Independent Claim
26 words
A method according to claims 4 and 6, wherein said highly infrared reflective metal film is selected from the group consisting of copper, silver or gold.
Claim 11
Dependent Claim
26 words
A method according to claim 1, wherein a second layer of a metallic film is deposited in an inert atmosphere on a surface of said substrate.
Claim 12
Independent Claim
21 words
A method according to claims 1 and 10, wherein a third layer of a metallic film is deposited on said substrate.
Claim 13
Independent Claim
23 words
A method according to claims 1, 10 and 11, wherein said titanium oxynitride film is deposited between said first and second metallic films.
Claim 14
Independent Claim
27 words
A method according to claims 10, 11 and 12, wherein said metal is selected from the group consisting of nickel alloys, iron alloys, titanium and mixtures thereof.
Claim 15
Dependent Claim
21 words
A method according to claim 13, wherein said metal alloy is selected from the group consisting of stainless steel and Inconel.
Claim 16
Independent Claim
15 words
A method according to claims 1 to 14, wherein said layers are deposited by sputtering.
Claim 17
Dependent Claim
13 words
An article of manufacture prepared by the method of claims 1 to 15.
Claim 18
Dependent Claim
24 words
Use of a coated article as a structural element according to claims 1 to 6, 9 and 15 for the reflectance of solar energy.
Claim 19
Dependent Claim
32 words
Use of a coated article as a structural element according to claims 1 to 9 and 15 for the reflectance of solar energy with reduced total luminous reflectance of the coated article.
Claim 20
Dependent Claim
20 words
Use of a coated article according to claims 1 to 3 and 10 to 15 as a colored architectural product.
References Cited (Backward Citations)
DE2851584B2
Cited
EP0083043A1
Cited
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