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Process for the preparation of a silicon nitride sintered body

Assignee: Tosoh Corp
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Filing: 1988-01-27
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Granted: —
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Expires: 2008-01-27
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Abstract

Abstract A silicon nitride sintered body comprised of 1.5 to 3.0% by weight of Y2O3 , 0.1 to 1.0% by weight of Al2O3 and 96 to 98.4% by weight of Si3N4 wherein the Y2O3/Al2O3 weight ratio is at least 2.5, and having a density of at least 3.0 g/cm<3>, exhibits a high oxidation resistance and a high strength at a high temperature. This silicon nitride sintered body is prepared by sintering a powdery mixture consisting essentially of 1.5 to 3.0% by weight of Y2O3 powder, 0.1 to 1.0% by weight of Al2O3 powder, and 96 to 98.4% by weight of Si3N4 powder, the Y2O3/Al2O3 weight ratio being at least 2.5, the oxygen content in the Si3N4 powder being less than 2.0% by weight and the total metallic impurity content in the Si3N4 being less than 200 ppm, at a temperature of 1,850 to 2,000 DEG C in a non-oxidizing atmosphere.

Inventors

  • 👤 Toshihiko Arakawa
  • 👤 Toshiyuki Mori
  • 👤 Yoshihiro Matsumoto

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-04 20:20
CPC Classifications
C; C04; C04B; C04B35/00; C04B35/515; C04B35/58; C04B35/584; C04B35/593; C04B35/5935

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 58 words
A silicon nitride sintered body consisting essentially of 1.5 to 3.0% by weight of yttrium oxide, 0.1 to 1.0% by weight of aluminum oxide, and 96 to 98.4% by weight of silicon nitride, wherein the yttrium oxide/aluminum oxide weight ratio is at least 2.5 and the density of the silicon nitride sintered body is at least 3.0 g/cm³.
Claim 2
Dependent Claim 58 words
A silicon nitride sintered body consisting essentially of 1.5 to 3.0% by weight of yttrium oxide, 0.1 to 1.0% by weight of aluminum oxide, and 96 to 98.4% by weight of silicon nitride, wherein the yttrium oxide/aluminum oxide weight ratio is at least 2.5 and the density of the silicon nitride sintered body is at least 3.0 g/cm³.
Claim 3
Dependent Claim 103 words
A process for the preparation of a silicon nitride sintered body, which comprises sintering a powdery silicon nitride mixture consisting essentially of 1.5 to 3.0% by weight of yttrium oxide powder, 0.1 to 1.0% by weight of aluminum oxide powder, and 96 to 98.4% by weight of silicon nitride powder, the yttrium oxide/aluminum oxide weight ratio being at least 2.5, the oxygen content in the silicon nitride powder being not more than 2.0% by weight and the total metallic impurity content in the silicon nitride powder being not more than 200 ppm, at a temperature of 1,850°C to 2,000°C in a non-oxidizing atmosphere.
Claim 4
Dependent Claim 103 words
A process for the preparation of a silicon nitride sintered body, which comprises sintering a powdery silicon nitride mixture consisting essentially of 1.5 to 3.0% by weight of yttrium oxide powder, 0.1 to 1.0% by weight of aluminum oxide powder, and 96 to 98.4% by weight of silicon nitride powder, the yttrium oxide/aluminum oxide weight ratio being at least 2.5, the oxygen content in the silicon nitride powder being not more than 2.0% by weight and the total metallic impurity content in the silicon nitride powder being not more than 200 ppm, at a temperature of 1,850°C to 2,000°C in a non-oxidizing atmosphere.
Claim 5
Dependent Claim 24 words
A process according to claim 2 wherein said sintering is effected at a temperature of about 1,850°C to 1,900°C by the pressureless sintering method.
Claim 6
Dependent Claim 22 words
A process according to claim 2 wherein said sintering is effected at a temperature of 1,900°C to 2,000°C by the gas-comprising method.

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