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EP0269128A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Method for accurate suction/removal detection and suction/transfer apparatus for practicing the same
Assignee: Toshiba Corp
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Filing: 1987-11-27
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Granted: —
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Expires: 2007-11-27
Abstract
Abstract A suction detector which can accurately detect suction and removal of an object to be chucked, includes: a pressure sensor (31) for detecting the pressure in a suction path for chucking the object and for generating pressure data corresponding to the detected pressure; a delaying circuit (37) for delaying transmission of the pressure data from the pressure sensor (31) and for generating delayed pressure data; and a suction/removal detecting unit (39, 41 - 46, 65; 39, 41 - 46, 66) for comparing first total data of the delayed pressure data from the delaying circuit (37) and adjustably-set first level difference data with the pressure data from the pressure sensor (31) to detect suction of the object, and for comparing second total data of the pressure data from the pressure sensor (31) and adjustably-set second level difference data with the delayed pressure data from the delaying circuit (37) to detect removal of the object. The delaying circuit (37) comprises an integrating circuit which includes a resistor (35) and a capacitor (36) and removes spike noise.
Inventors
- 👤 Kouichi C/O Patent Division Tamai
- 👤 Shigeyuki C/O Patent Division Motokawa
- 👤 Noriyuki C/O Patent Division Hirata
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-01 22:41
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/78
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
174 words
A suction/transfer apparatus which can accurately detect suction and removal of an object to be chucked and can reliably transfer the object to be chucked, comprising: a pressure sensor (31) for detecting a pressure in a suction path for chucking the object, and for generating pressure data corresponding to a detected pressure, characterized by further comprising: delaying means (37) for delaying transmission of the pressure data from said pressure sensor and for generating delayed pressure data; and suction/removal detecting means (39, 41 - 46, 64, 65; 39, 41 - 46, 66) for comparing first level difference data of the delayed pressure data from said delaying means and adjustably-set first level difference data with the pressure data from said first level difference data with the pressure data from said pressure sensor (31) to detect suction of the object, and for comparing second total data of the pressure data from said pressure sensor (31) and adjustably-set second level difference data with the delayed pressure data from said delaying means (37) to detect removal of the object.
Claim 2
Dependent Claim
174 words
A suction/transfer apparatus which can accurately detect suction and removal of an object to be chucked and can reliably transfer the object to be chucked, comprising: a pressure sensor (31) for detecting a pressure in a suction path for chucking the object, and for generating pressure data corresponding to a detected pressure, characterized by further comprising: delaying means (37) for delaying transmission of the pressure data from said pressure sensor and for generating delayed pressure data; and suction/removal detecting means (39, 41 - 46, 64, 65; 39, 41 - 46, 66) for comparing first level difference data of the delayed pressure data from said delaying means and adjustably-set first level difference data with the pressure data from said first level difference data with the pressure data from said pressure sensor (31) to detect suction of the object, and for comparing second total data of the pressure data from said pressure sensor (31) and adjustably-set second level difference data with the delayed pressure data from said delaying means (37) to detect removal of the object.
Claim 3
Dependent Claim
31 words
The detector according to claim 1, characterized in that said delaying means (37) comprises integrating means (37) including a resistor (35) and a capacitor (36) connected in series with each other.
Claim 4
Dependent Claim
49 words
The detector according to claim 2, further comprising: switching means (38, 48), provided in parallel with said resistor (35) of said integrating means (37), for short-circuiting said resistor for a predetermined period of time when suction of the object is detected and when removal of the object is detected.
Claim 5
Dependent Claim
55 words
The detector according to claim 1, characterized in that said suction/removal detecting means (39, 41 - 46, 64, 65; 39, 41 - 46, 66) further includes: outputting means (47, 50) for generating a suction signal which becomes active when suction of the object is detected and becomes inactive when removal of the object is detected.
Claim 6
Dependent Claim
170 words
The detector according to claim 1, characterized in that said suction/removal detecting means (39, 41 - 46, 64, 65; 39, 41 - 46, 66) includes: first level setting means (41) for generating the first level difference data which is adjustably set and substantially proportional to the delayed pressure data; second level setting means (66) for generating the second level difference data which is adjustably set and substantially proportional to the delayed pressure data; suction comparing means (42) for comparing the first total data of the delayed pressure data from said delaying means (37) and the first level difference data from said first level setting means (41) with the pressure data from said pressure sensor (31) to detect suction of the object; and removal comparing means (46) for comparing the second total data of the pressure data from said pressure sensor (31) and the second level difference data from said second level setting means (66) with the delayed pressure data from said delaying means (37) to detect removal of the object.
Claim 7
Dependent Claim
147 words
The detector according to claim 1, characterized in that said suction/removal detecting means (39, 41 - 46, 64, 65; 39, 41 - 46, 66) includes: first level setting means (41) for generating the first level difference data which is adjustably set and substantially constant; second level setting means (66) for generating second level difference data which is adjustably set and substantially constant; suction comparing means (42) for comparing the first total data of the delayed pressure data from said delaying means (37) and the first level difference data from said first level setting means (41) with the pressure data from said pressure sensor (31); and removal comparing means (46) for comparing the second total data of the pressure data from said pressure sensor (31) and the second level difference data from said second level setting means (66) with the delayed pressure data from said delaying means (37).
Claim 8
Dependent Claim
178 words
The detector according to claim 1, characterized in that said suction/removal detecting means (39, 41 - 46, 64, 65; 39, 41 - 46, 66) includes: suction comparing means (42) for comparing the first total data of the delayed pressure data from said delaying means (37) and the first level difference data with the pressure data from said pressure sensor (31) to detect suction of the object; removal comparing means (46) for comparing the second total data of the pressure data from said pressure sensor (31) and the second level difference data with the delayed pressure data from said delaying means (37) to detect removal of the object to be chucked; and level setting means for generating level difference data which is adjustably set and substantially proportional to the delayed pressure data, for outputting the level difference data as the first level difference data to said suction comparing means (42) via a first element (64), and for outputting the level difference data as the second level difference data to said removal comparing means (46) via a second element (65).
Claim 9
Dependent Claim
170 words
The detector according to claim 1, characterized in that said suction/removal detecting means (39, 41 - 46, 64, 65; 39, 41 - 46, 66) includes: suction comparing means (42) for comparing the first total data of the delayed pressure data from said delaying means (37) and the first level difference data with the pressure data from said pressure sensor (31) to detect suction of the object; removal comparing means (46) for comparing the second total data of the pressure data from said pressure sensor (31) and the second level difference data with the delayed pressure data from said delaying means (37) to detect removal of the object; and level setting means for generating level difference data which is adjustably set and substantially constant, for outputting the level difference data as the first level difference data to said suction comparing means (42) via a first element (64), and for outputting the level difference data as the second level difference data to said removal comparing means (46) via a second element (65).
Claim 10
Dependent Claim
41 words
The detector according to claim 4, further comprising: transferring means (2, 9, 6) having at a distal end thereof suction means (3) for chucking the object, for chucking/removing the object and for transferring the object in accordance with the suction signal.
References Cited (Backward Citations)
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