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EP0267599A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Fly eye lens unit for illumination

Assignee: Dainippon Screen Manufacturing Co Ltd
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Filing: 1987-11-11
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Granted: —
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Expires: 2007-11-11
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Abstract

Abstract An illumination system includes a light source (LS), an ellipsoidal mirror (EM) for converging light emitted from the light source, a fly eye lens unit (FU) disposed at a converging point of the ellipsoidal mirror, a collimation lens (CS) for collimating light rays exited from the fly eye lens unit, and an object (PM) disposed along the optical path of the illumination system. The fly eye lens unit includes a first and a second frame defining an incident aperture and an exit one, a plurality of element lenses aligned in a matrix of rows closely in contact with each other, side walls disposed between the first and second frames for housing the element lenses therein, and biasing element for applying a biasing force to the element lenses sideward with respect to the rows of matrix. The respective element lenses are fixedly held without any intermedium therebetween.

Inventors

  • 👤 Haruo Uemura

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-28 09:46
CPC Classifications
G; G02; G02B; G02B3/00; G02B3/0006; G02B3/0037; G02B3/0056; G02B19/00; G02B19/0004; G02B19/0028; G02B19/0033; G02B19/0047; G02B3/0062; G02B3/0075; G03; G03F; G03F7/00; G03F7/20; G03F7/2002; G03F7/70; G03F7/70058; G03F7/702

Claims Analysis

Total Claims: 18
Claim 1
Independent Claim 159 words
An illumination system for illuminating an object including a light source, converging means disposed with respect to said light source for converging light emitted from said light source, a fly eye lens unit dis­posed at a converging point of said converging means, collimation means for collimating light rays exited from said fly eye lens unit and an object disposed along the optical path of said illumination system, said fly eye lens unit comprising: a first frame for defining an incident aperture thereon; a second frame for defining an exit aperture thereon; a plurality of element lenses orderly aligned in two-­dimensions, said element lenses forming a plurality of rows extending in a predetermined direction and being closely in contact with each other; side walls disposed between said first and second base frames for housing said element lenses therein; and biasing means for applying a biasing force to the element lenses sideward with respect to the rows of the element lenses.
Claim 2
Dependent Claim 159 words
An illumination system for illuminating an object including a light source, converging means disposed with respect to said light source for converging light emitted from said light source, a fly eye lens unit dis­posed at a converging point of said converging means, collimation means for collimating light rays exited from said fly eye lens unit and an object disposed along the optical path of said illumination system, said fly eye lens unit comprising: a first frame for defining an incident aperture thereon; a second frame for defining an exit aperture thereon; a plurality of element lenses orderly aligned in two-­dimensions, said element lenses forming a plurality of rows extending in a predetermined direction and being closely in contact with each other; side walls disposed between said first and second base frames for housing said element lenses therein; and biasing means for applying a biasing force to the element lenses sideward with respect to the rows of the element lenses.
Claim 3
Dependent Claim 49 words
An illumination system as set forth in claim 1, wherein a plurality of bores are provided on at least one of said side walls, said bores being defined at positions corresponding to the respective rows of the element lenses, and said biasing means is accomodated in the respective bores.
Claim 4
Dependent Claim 59 words
An illumination system as set forth in claim 1 or 2, wherein said biasing means comprises a contact member for contacting with an element lens aligned in a corres­ponding row of the element lenses, a biasing coil spring for applying a biasing force to a corresponding row of the element lenses and adjusting means for adjusting the bias­ing force.
Claim 5
Dependent Claim 21 words
An illumination system as set forth in claim 3, wherein said rows of the element lenses are formed in a matrix.
Claim 6
Dependent Claim 20 words
An illumination system as set forth in claims 4, wherein said element lenses are formed in a plurality of matrices.
Claim 7
Dependent Claim 28 words
An illumination system as set forth in claim 3, wherein said adjusting means comprises a screw, and said respective bores includes a threaded section engageable with said screw.
Claim 8
Dependent Claim 20 words
An illumination system as set forth in claim 3, wherein said contact member comprises a material having heat insulating characteristics.
Claim 9
Dependent Claim 26 words
An illumination system as set forth in claim 3, wherein said contact member comprises a material having elasticity adaptable for absorbing the thermal expansion of elements.
Claim 10
Dependent Claim 24 words
An illumination system as set forth in claim 1, further comprising spacer means disposed closely between said respective side walls and said element lenses.
Claim 11
Dependent Claim 21 words
An illumination system as set forth in claim 9, wherein said spacer means comprises a resin plate made of fluorine-contained polymers.
Claim 12
Dependent Claim 19 words
An illumination system as set forth in claim 9, said spacer means comprises a material having heat insulat­ing characteristics.
Claim 13
Dependent Claim 25 words
An illumination system as set forth in claim 9, said spacer means comprises a material having elasticity adaptable for absorbing the thermal expansion of elements.
Claim 14
Dependent Claim 39 words
An illumination system as set forth in either one of claims 9 through 12, wherein a plurality of grooves extending along the optical axes of the respective element lenses, respective grooves corresponding to borders of respective adjacent element lenses.
Claim 15
Dependent Claim 34 words
An illumination system as set forth in claim 1, wherein said incident aperture provided on the first frame has an enough inner diameter to receive light rays directed toward the fly eye lens unit.
Claim 16
Dependent Claim 34 words
An illumination system as set forth in claim 1, wherein said exit aperture provided on the second frame has an enough inner diameter to pass light rays received in the fly eye lens unit.
Claim 17
Dependent Claim 109 words
A fly eye lens structure for assembling element lenses into a single unit, comprising: a first frame for defining an incident aperture of the fly eye lens thereon; a second frame for defining an exit aperture of the fly eye lens thereon; a plurality of element lenses orderly aligned in two-­dimensions, said element lenses forming a plurality of rows extending in a predetermined direction and being closely in contact with each other; side walls disposed between said first and second frames for housing said element lenses therein; and biasing means for applying a biasing force to the element lenses sideward with respect to the rows of the element lenses.
Claim 18
Dependent Claim 109 words
A fly eye lens structure for assembling element lenses into a single unit, comprising: a first frame for defining an incident aperture of the fly eye lens thereon; a second frame for defining an exit aperture of the fly eye lens thereon; a plurality of element lenses orderly aligned in two-­dimensions, said element lenses forming a plurality of rows extending in a predetermined direction and being closely in contact with each other; side walls disposed between said first and second frames for housing said element lenses therein; and biasing means for applying a biasing force to the element lenses sideward with respect to the rows of the element lenses.

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