Patent EP0267359A2 successfully refreshed from Google Patents.
EP0267359A2
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EP
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Mask for depositing paste material
Assignee: International Business Machines Corp
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Filing: 1987-05-05
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Granted: —
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Expires: 2007-05-05
Abstract
Abstract A mask (28) for deposition of electrically-conductive paste material on a ceramic base, in the construction of electric circuits having multiple electronic chips is formed of molybdenum with a titanium nitride coating. The coating passes through apertures of a mesh (30) on one side of the mask and continues through the apertures to appear in cutouts of stencils (32) along the opposite side of the mask. Other elements of the fourth group of the periodictable, such as zirconium, may be employed in lieu of the titanium in the formation of the coating. The coating is uniformly applied by a sputtering procedure in which nitrogen is sprayed uniformly along the mask and away from a titanium target. In an argon plasma, the nitrogen and the titanium are sputtered onto the molybdenum where the titanium and nitrogen combine to form the coating.
Inventors
- 👤 Kie Yeung Ahn
- 👤 Saryadevara Basavaiah
- 👤 Stephen Bruce Brodsky
- 👤 Charles Anthony Cortellino
- 👤 Joseph Eli Levine
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 03:51
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/10; H05K3/12; H05K3/1216; H05K3/1225; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/098; H10W70/60; H10W70/62; H10W70/63; H10W90/00; H10W90/701; H10W90/721; H10W90/724; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24273; Y10T428/24298; Y10T428/24322; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
132 words
A mask for deposition of paste material in a predetermined format comprising: a metallic substrate; a mesh formed in said metallic substrate and extending inwardly from a first exterior surface of the substrate; a stencil formed in said metallic substrate and extending inwardly from a second exterior surface of said substrate opposite said first exterior surface, there being perforations in said mesh and in said stencil, perforations in-said stencil communicating with predetermined ones of the perforations in said mesh for passage of paste material therethrough; and a coating of a compound of nitrogen and an element of the fourth group of elements of the periodic table; said coating being uniformly deposited on said substrate to provide lubricity and resistance to abrasion of said paste material within said mesh and within said stencil.
Claim 2
Dependent Claim
132 words
A mask for deposition of paste material in a predetermined format comprising: a metallic substrate; a mesh formed in said metallic substrate and extending inwardly from a first exterior surface of the substrate; a stencil formed in said metallic substrate and extending inwardly from a second exterior surface of said substrate opposite said first exterior surface, there being perforations in said mesh and in said stencil, perforations in-said stencil communicating with predetermined ones of the perforations in said mesh for passage of paste material therethrough; and a coating of a compound of nitrogen and an element of the fourth group of elements of the periodic table; said coating being uniformly deposited on said substrate to provide lubricity and resistance to abrasion of said paste material within said mesh and within said stencil.
Claim 3
Dependent Claim
28 words
A mask according to Claim 1 wherein said substrate is formed of molybdenum, and said coating has a depth of 0,2 - 0,6 µm (2000 - 6000 angstroms).
Claim 4
Dependent Claim
33 words
A mask according to Claim 1 or 2 wherein said compound is formed of nitrogen and at least one element of the fourth group of the periodic table consisting of titanium, zirconium, silicon.
Claim 5
Dependent Claim
15 words
A mask according to Claim 3 wherein said coating is formed of nitrogen and titanium.
Claim 6
Dependent Claim
15 words
A mask according to Claim 3 wherein said coating is formed of nitrogen and zirconium.
Claim 7
Dependent Claim
15 words
A mask according to Claim 3 wherein said coating is formed of nitrogen and silicon.
Claim 8
Dependent Claim
93 words
Use of a mask of one of the Claims 1 - 6 for deposition of electrically-conductive paste material on a base in the construction of an electric circuit, the mask having apertures extending therethrough from a first surface to a second surface of the mask to define the shapes of regions of the paste material to be deposited on the base, said coating being uniformly deposited within said apertures and on said first surface and on said second surface to provide lubricity and resistance to abrasion of said paste material upon said mask.
Claim 9
Independent Claim
144 words
A method of coating a mask used in the construction of modular electric circuits by imprinting conductive paths on a base material, the method comprising the steps of: constructing a mask substrate of a dimensionally stable material, the mask substrate having apertures extending inwardly from a first surface to define a screen pattern and extending inwardly from a second surface to define a stencil pattern; sputtering a group IV element of the periodic table onto the mask substrate; simultaneously discharging nitrogen into a region of space permeated by the said sputtered element to provide a coating of nitrogen and said sputtered element upon the dimensionally stable material of said substrate; and terminating said sputtering upon attainment of a depth of said coating in the range of 0,2 - 0,6 µm (2000 - 6000 angstroms), thereby providing a mask surface which is resistant to abrasion.
Claim 10
Independent Claim
144 words
A method of coating a mask used in the construction of modular electric circuits by imprinting conductive paths on a base material, the method comprising the steps of: constructing a mask substrate of a dimensionally stable material, the mask substrate having apertures extending inwardly from a first surface to define a screen pattern and extending inwardly from a second surface to define a stencil pattern; sputtering a group IV element of the periodic table onto the mask substrate; simultaneously discharging nitrogen into a region of space permeated by the said sputtered element to provide a coating of nitrogen and said sputtered element upon the dimensionally stable material of said substrate; and terminating said sputtering upon attainment of a depth of said coating in the range of 0,2 - 0,6 µm (2000 - 6000 angstroms), thereby providing a mask surface which is resistant to abrasion.
Claim 11
Dependent Claim
22 words
A method according to Claim 8 wherein the substrate of said mask is fabricated of molybdenum, and said sputtered element is titanium.
Claim 12
Dependent Claim
22 words
A method according to Claim 8 wherein the substrate of said mask is fabricated of molybdenum, and said sputtered element is zirconium.
References Cited (Backward Citations)
No citation records indexed.
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