Patent EP0260734A1 successfully refreshed from Google Patents.
EP0260734A1
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EP
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Adjustable preparation mounting for a radiation beam apparatus
Assignee: Koninklijke Philips NV
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Filing: 1987-08-18
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Granted: —
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Expires: 2007-08-18
Abstract
Abstract An adjustable preparation mounting device for a radiation beam apparatus such as an electron microscope is described, which device includes a carrier and a device for adjusting a preparation slide containing a preparation relative to the carrier. The carrier (10) forms a bearing surface (12) for the preparation slide (14) and is provided with a device (16)for the frictionally held mounting of the preparation slide (14) on this surface (12). The device for adjusting the preparation slide includes two actuator elements (20, 22), each of which exhibits a respective part (20a, 22a) which serves for coupling with the preparation slide and which is movable from a position at a spacing from the preparation slide into engagement with the preparation slide and also adjustable in a controlled manner in two directions (X, Y) parallel to the plane of the bearing surface. The monitoring and control of the movement of the preparation slide (14) relative to the bearing surface (12) preferably takes place by means of a correlation of a reference particle radiation image with one or more particle radiation images recorded during and/or after the movement of the preparation slide (14) relative to the bearing surface (12) of the carrier (10).
Inventors
- 👤 Walter Hoppe
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 13:41
CPC Classifications
G; G02; G02B; G02B26/00; H; H01; H01J; H01J37/00; H01J37/02; H01J37/20
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
137 words
Adjustable preparation mounting device for a radiation beam apparatus having a carrier and a device for moving a preparation slide containing a preparation relative to the carrier, characterized in that a carrier (10) exhibits a bearing surface (12) for a preparation slide (14) and is provided with a device (16) for holding the preparation slide (14) on the bearing surface (12), and in that the movement device includes two actuator elements (20, 22) each of which exhibits a respective part (20a, 22a) which serves for coupling with the preparation slide (14) and which is movable from a position at a spacing from the preparation slide into engagement with the preparation slide and also, in order to move the preparation slide on the bearing surface, in at least one direction (x, Y) parallel to the bearing surface (12).
Claim 2
Dependent Claim
137 words
Adjustable preparation mounting device for a radiation beam apparatus having a carrier and a device for moving a preparation slide containing a preparation relative to the carrier, characterized in that a carrier (10) exhibits a bearing surface (12) for a preparation slide (14) and is provided with a device (16) for holding the preparation slide (14) on the bearing surface (12), and in that the movement device includes two actuator elements (20, 22) each of which exhibits a respective part (20a, 22a) which serves for coupling with the preparation slide (14) and which is movable from a position at a spacing from the preparation slide into engagement with the preparation slide and also, in order to move the preparation slide on the bearing surface, in at least one direction (x, Y) parallel to the bearing surface (12).
Claim 3
Dependent Claim
37 words
Device according to Claim 1, characterized in that the coupling part (20a, 22a) is movable in two different directions (X, Y) which preferably extend substantially perpendicular to one another and which are parallel to the bearing surface.
Claim 4
Dependent Claim
100 words
Device according to Claim 1, characterized in that the actuator elements (20, 22) are rod-shaped, are connected at a first end (20b) to the carrier (10), extend by a second end (20a, 22a), at which the coupling device is situated, over a region of the bearing surface (12) which serves to bear the preparation slide, and exhibit respective device (26, 30) for moving the second end perpendicular and parallel to the plane of the bearing surface (12) respectively, as well as a device (34) for moving the second end in the longitudinal direction of the pertinent actuator element (Fig. 3).
Claim 5
Dependent Claim
17 words
Device according to Claim 3, characterized in that the movement devices (26, 30, 34) are piezoelectric devices.
Claim 6
Dependent Claim
14 words
Device according to Claim 3, characterized in that the movement devices are magnetic devices.
Claim 7
Dependent Claim
49 words
Device according to one of the preceding Claims, characterized in that the carrier (10) has substantially the shape of a goniometer rod designed for a lateral introduction into the radiation beam apparatus, and in that the bearing surface (12) passes substantially through the axis (18) of the goniometer rod.
Claim 8
Dependent Claim
42 words
Device according to one of the preceding Claims, characterized in that the preparation slide (114, 214) is round, and in that the actuator elements (120, 122; 220, 222) are adjustable in opposite directions in order to rotate the preparation slide (114, 214).
Claim 9
Dependent Claim
32 words
Device according to Claim 7, characterized in that the actuator elements (120, 122) engage at diametrically opposite sides of the preparation slide (114) and are laterally pivotable in opposite directions (Fig. 4).
Claim 10
Dependent Claim
132 words
Device according to Claim 7, characterized in that the carrier (210) is a shortened goniometer rod, which ends at a spacing in front of the axis of the beam path of the microscope; in that the preparation slide (214) is substantially circular; in that the device (216) for holding the preparation slide (214) permits the latter to be held in such a manner that more than one half of its diameter projects from the end of the carrier (210) to such an extent that the axis of the beam path passes through a central region of the preparation slide (214); and in that the actuator elements (220, 222) are disposed parallel beside one another at the carrier and extend over spaced parts of the rim of the preparation slide (214) (Fig. 5).
Claim 11
Dependent Claim
84 words
Device according to Claim 9, characterized in that the ends (220a, 222a) of the actuator elements (220, 222), which ends engage at the rim of the preparation slide (214), are adjustable in opposite directions in their longitudinal direction and are also adjustable, in dependence upon the amount of the mutually opposite adjustment (x), in the same sense in the longitudinal direction (X direction) as well as in a direction (Y direction) which is parallel to the bearing surface and perpendicular to the longitudinal direction.
Claim 12
Dependent Claim
50 words
Process for the operation of an adjustable preparation mounting device, in particular according to one of the preceding Claims, characterized in that the monitoring and/or control of the adjustment takes place by correlation of a reference radiation image with at least one radiation image recorded during or after the adjustment.
Claim 13
Dependent Claim
65 words
Process according to Claim 11, characterized in that a radiation image of changed particles in the apparatus is electrically displaced in such a manner that the maximum of the correlation function is situated at a boundary of a predetermined correlation region, and in that the adjustment device is then operated until such time as the correlation maximum reaches the opposite boundary of the pertinent region.
Claim 14
Dependent Claim
43 words
Process according to Claim 11 or 12, characterized in that the correlation serving for the control of the adjustment of the preparation is carried out with a regio of the preparation/preparation carrier arrangement which is situated outside the preparation region to be investigated.
Claim 15
Dependent Claim
38 words
Process according to Claim 11, 12 or 13, characterized in that the correlation seving for the control of the preparation adjustment is carried out with smaller magnification than is employed in the recording of the preparation region concerned.
Claim 16
Dependent Claim
34 words
Process according to one of Claims 11 to 14, characterized in that a relatively coarsely structured preparation carrier, such as a coarse-grain carbon foil or a grid structure with statistically distributed pores, is employed.
References Cited (Backward Citations)
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