Patent US3136696A successfully refreshed from Google Patents.
Patent EP0260150A2 successfully refreshed from Google Patents.
EP0260150A2
Expired / Lapsed
EP
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Vacuum processing apparatus wherein temperature can be controlled
Assignee: Tokuda Seisakusho Co Ltd
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Filing: 1987-09-11
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Granted: —
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Expires: 2007-09-11
Abstract
Abstract A vacuum processing apparatus has a vacuum vessel (1) within which a work to be processed is drawn and held fixed on a specimen table (3) by an electrode functioning doubly as an electrostatic chuck, to which is connected a gas feeding pipe (15) for feeding a gas affording good heat transmission between the mutually contacting surfaces of the work and the electrode thereby to control the temperature of the work.
Inventors
- 👤 Masashi Kk Tokuda Seisakusho Tezuka
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-26 03:58
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/72; C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; H10P72/722; Y; Y10; Y10T; Y10T279/00; Y10T279/23
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
132 words
A vacuum processing apparatus wherein temperature can be controlled comprising a vacuum vessel (1) the interior of which constitutes a vacuum processing chamber, in which a work is to be vacuum processed a specimen table (3) installed in and at one side of the processing chamber and provided with means for controlling the temperature thereof and an electrode (4, 5) mounted on said specimen table and within said chamber and being functionable as an electrostatic chuck to fixedly hold the work, said first electrode comprising an electrode plate (5) and a dielectric film (4) covering the electrode plate, said apparatus being characterized by a gas feeding pipe (15) for introducing a gas for affording good heat transmission into the interfacial interstice between the work (A) thus held and the first electrode (5).
Claim 2
Dependent Claim
132 words
A vacuum processing apparatus wherein temperature can be controlled comprising a vacuum vessel (1) the interior of which constitutes a vacuum processing chamber, in which a work is to be vacuum processed a specimen table (3) installed in and at one side of the processing chamber and provided with means for controlling the temperature thereof and an electrode (4, 5) mounted on said specimen table and within said chamber and being functionable as an electrostatic chuck to fixedly hold the work, said first electrode comprising an electrode plate (5) and a dielectric film (4) covering the electrode plate, said apparatus being characterized by a gas feeding pipe (15) for introducing a gas for affording good heat transmission into the interfacial interstice between the work (A) thus held and the first electrode (5).
Claim 3
Dependent Claim
37 words
A vacuum processing apparatus as claimed in claim 1 in which said electrode comprises an electrode (5) made of aluminum and an inorganic, insulative, dielectric film (4) of Al₂O₃ covering the outer surface of said aluminum electrode.
Claim 4
Dependent Claim
38 words
A vacuum processing apparatus as claimed in claim 1 in which said electrode comprises an electrode (5b) made of copper and an organic, insulative, dielectric film (4b) of a polyimide covering the outer surface of said copper electrode.
Claim 5
Dependent Claim
30 words
A vacuum processing apparatus as claimed in claim 1 in which said electrode (4, 5) is mounted on the lower surface of the ceiling wall of the vacuum processing chamber.
Claim 6
Dependent Claim
30 words
A vacuum processing apparatus as claimed in claim 1 in which said electrode (4, 5) is mounted on the inner surface of a side wall of the vacuum processing chamber.
Claim 7
Dependent Claim
23 words
A vacuum processing apparatus as claimed in claim 1 in which a heating device (20) is imbeddedly provided in the specimen table (3).
Claim 8
Dependent Claim
22 words
A vacuum processing apparatus as claimed in claim 1 in which said gas for affording good heat transmission is a cooling gas.
References Cited (Backward Citations)
No citation records indexed.
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