Patent EP0239423A2 successfully refreshed from Google Patents.
EP0239423A2
Expired / Lapsed
EP
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Positive type radiation-sensitive resin composition
Assignee: JSR Corp
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Filing: 1987-03-30
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Granted: —
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Expires: 2007-03-30
Abstract
Abstract A positive type radiation-sensitive resin composition comprising an alkali-soluble novolac resin and a 1,2-quinonediazide compound, characterized in that said alkali-soluble novolac resin is a resin produced by condensing a carbonyl compound and a phenol mixture comprising 6 to 94 mole % of m-cresol and 94 to 6 mole % at least one compound represented by the formula (I) other than m-cresol: wherein X is -CH 3 , -C 2 H 5 , -C(CH 3 ) 3 , -C0 2 CH 3 or -C0 2 C 2 H 5 ; n is an integer satisfying 3 & n ≧ 1; and m is an integer satisfying 3 & m ≧ 1, in which resin when the polystyrene-reduced molecular weight is determined by a gel permeation chromatography using a monodisperse polystyrene as the standard, maximum values a, b and c present, respectively, in the molecular weight ranges of 6,300 to 25,000, 2,500 to 6,000 and 150 to 900 in the molecular weight distribution curve obtained satisfy the following relationships: a/b=0-1.5 and c/b = 1.4-2- Said positive type-radiation-sensitive resin composition is excellent in resolution, sensitivity, developability, thermal resistance and adhesion and hence is useful as a positive type resist for producing integrated circuits having a higher integration.
Inventors
- 👤 Hiroshi Oka
- 👤 Chozo Okuda
- 👤 Yoshinori Yoshida
- 👤 Toshihiko Takahashi
- 👤 Yoichi Kamoshida
- 👤 Takao Miura
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 04:13
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/023; G03F7/0233; G03F7/0236
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
168 words
A positive type radiation-sensitive resin composition comprising an alkali-soluble novolac resin and a 1,2-quinonediazide compound, characterized in that said alkali-soluble novolac resin is a resin produced by condensing a carbonyl compound and a phenol mixture comprising 6 to 94 mole % of m-cresol and 94 to 6 mole % of at least one compound represented by the formula (I) other than m-cresol: wherein X is -CH 3 , -C 2 H 5 , -C(CH 3 ) 3 , -CO 2 CH 3 or -CO L C 2 H 5 ; n is an integer satisfying 3 > n ≧ 1; and m is an integer satisfying 3 ≧ m ≧ 1, in which resin when the polystyrene-reduced molecular weight is determined by a gel permeation chromatography using a monodisperse polystyrene as the standard, maximum values a, b and c present, respectively, in the molecular weight ranges of 6,300 to 25,000, 2,500 to 6,000 and 150 to 900 in the molecular weight distribution curve obtained satisfy the following relationships:
Claim 2
Dependent Claim
168 words
A positive type radiation-sensitive resin composition comprising an alkali-soluble novolac resin and a 1,2-quinonediazide compound, characterized in that said alkali-soluble novolac resin is a resin produced by condensing a carbonyl compound and a phenol mixture comprising 6 to 94 mole % of m-cresol and 94 to 6 mole % of at least one compound represented by the formula (I) other than m-cresol: wherein X is -CH 3 , -C 2 H 5 , -C(CH 3 ) 3 , -CO 2 CH 3 or -CO L C 2 H 5 ; n is an integer satisfying 3 > n ≧ 1; and m is an integer satisfying 3 ≧ m ≧ 1, in which resin when the polystyrene-reduced molecular weight is determined by a gel permeation chromatography using a monodisperse polystyrene as the standard, maximum values a, b and c present, respectively, in the molecular weight ranges of 6,300 to 25,000, 2,500 to 6,000 and 150 to 900 in the molecular weight distribution curve obtained satisfy the following relationships:
Claim 3
Dependent Claim
81 words
A positive type radiation-sensitive resin composition according to Claim 1, wherein the at least one compound of the formula (I) is selected from the group consisting of o-cresol, p-cresol, 3,5-dimethylphenol, 2,5-dimethylphenol, 2,3-dimethylphenol, 2,4-dimethylphenol, 2,6-dimethylphenol, 3,4-dimethylphenol, 2,3,5-trimethylphenol, 4-t-butylphenol, 2-t-butylphenol, 3-t-butylphenol, 2-methylresorcinol, 4-methylresorcinol, 5-methylresorcinol, 4-t-butylcatechol, 4-methoxyphenol, 3-methoxyphenol, 2-methoxyphenol, 2-methoxycatechol, 2-methoxyresorcinol, 3-methoxyresorcinol, 2,3-dimethoxyphenol, 2,5-dimethoxyphenol, 3,5-dimethoxyphenol, methyl gallate, ethyl gallate, methyl 3-methoxy-4,5-dihydroxybenzoate, ethyl 3-methoxy-4,5-dihydroxybenzoate, methyl 4-methoxy-3,5-dihydroxybenzoate, ethyl 4-methoxy-3,5-dihydroxybenzoate, methyl 3,4-dimethoxy-5-hydroxybenzoate, ethyl 3,4-dimethoxy-5-hydroxybenzoate, methyl 3,5-dimethoxy-4-hydroxybenzoate, ethyl 3,5-dimethoxy-4-hydroxybenzoate, 3-ethylphenol, 2-ethylphenol, 4-ethylphenol, 2,3,5- triethylphenol, 3,5-diethylphenol, 2,5-diethylphenol and 2,3-diethylphenol.
Claim 4
Dependent Claim
40 words
A positive type radiation-sensitive resin composition according to Claim 1 or 2, wherein the phenol mixture comprises 30 to 90 mole % of m-cresol and 70 to 10 mole % of at least one compound represented by the formula (I).
Claim 5
Dependent Claim
22 words
A positive type radiation-sensitive resin composition according to Claim 1,2 of 3, wherein a/b = 0.2-1.3 and c/b = 0.5 - 1.5.
Claim 6
Dependent Claim
23 words
A positive type radiation-sensitive resin composition according to Claim 1, 2 or 3. wherein the compound represented by the formula (I) is 3,5-dimethylphenol.
Claim 7
Dependent Claim
33 words
A positive type radiation-sensitive resin composition according to Claim 1 or 2 wherein the phenol mixture consists of 30 to 70 mole % of m-cresol and 70 to 30 mole % of p-cresol.
Claim 8
Dependent Claim
22 words
A positive type radiation-sensitive resin composition according to Claim 6, wherein a/b = 0.4 - 1.5 and c/b = 0.4 - 2.
Claim 9
Dependent Claim
50 words
A positive type radiation-sensitive resin composition according to any of Clams 1 to 7, wherein the carbonyl compound is represented by the formula (II): wherein R 1 and R 2 , which may be the same or different, represent hydrogen atoms, alkyl groups, aryl groups, alkenyl groups or aralkyl groups.
Claim 10
Dependent Claim
50 words
A positive type radiation-sensitive resin composition according to any of Clams 1 to 7, wherein the carbonyl compound is represented by the formula (II): wherein R 1 and R 2 , which may be the same or different, represent hydrogen atoms, alkyl groups, aryl groups, alkenyl groups or aralkyl groups.
Claim 11
Dependent Claim
47 words
A positive type radiation-sensitive resin composition according to Claim 8 , wherein the carbonyl compound is at least one compound selected from the group consisting of formaldehyde, acetaldehyde, benzaldehyde, p-hydroxybenzaldehyde, acrolein, acetone, methyl ethyl ketone, diethyl ketone, methyl isobutyl ketone, methyl phenyl ketone and methyl benzyl ketone.
Claim 12
Dependent Claim
32 words
A positive type radiation-sensitive resin composition according to any of Claims 1 to 9, wherein the amount the carbonyl compound used is 0.7 to 3 moles per mole of the phenol mixture.
Claim 13
Dependent Claim
40 words
A positive type radiation-sensitive resin composition according to any of Claims 1 to 10, wherein the 1,2-quinonediazide compound is contained in an amount of 5 to 100 parts by weight per 100 parts by weight of the alkali-soluble novolac resin.
Claim 14
Dependent Claim
108 words
A positive type radiation-sensitive resin composition according to any of Claims 1 - 11, wherein the 1,2-quinonediazide compound is at least one compound selected from the group consisting of 1,2-quinonediazidesulfonic acid esters of (poly)hydroxybenzenes, 1,2-quinonediazidesulfonic acid esters of (poly)hydroxyphenylalkyl ketones or (poly)hydroxyphenyl aryl ketones, 1,2-quinonediazidesulfonic acid esters of bis[(poly)hydroxyphenyl]alkanes, 1,2-quinonediazidesulfonic acid esters of alkyl (poly)-hydroxybenzoates or aryl (poly)hydroxybenzoates, 1,2-quinonediazidesulfonic acid esters of bis[(poly)-hydroxybenzoyl]alkanes or bis[(poly)hydroxybenzoyl]-benzenes, 1,2-quinonediazidesulfonic acid esters of (poly)ethylene glycol-di[(poly)hydroxybenzoates], 1,2-quinonediazidesulfonic acid esters of alpha-pyrone type natural coloring matters having hydroxyl groups, 1,2-quinonediazidesulfonic acid esters of gamma-pyrone type natural coloring matters having hydroxyl groups and 1,2-quinonediazidesulfonic acid esters of diazine type natural coloring matters having hydroxyl groups.
References Cited (Backward Citations)
No citation records indexed.
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