Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
232 words
In a semiconductor processing system which includes: a first semiconductor wafer cassette for housing semiconductor wafers; a first transfer pod for enclosing the first cassette airtightly, said first pod having a box-like pod body with an open bottom and a bottom plate detachably attached to the pod body for closing the bottom of the pod body; a wafer processing equipment having a first port for loading the cassette and a canopy covering the first port, said processing equipment processing the wafer in the first cassette when the cassette is loaded in the first port; and first means for transferring the first cassette between the first port of the processing equipment and the first pod without exposing the cassette and the wafers therein to outside contamination, the improvement wherein said first transferring means comprises: a second port, provided on the canopy of the processing equipment at the position directly above the first port, for placing the first pod thereon, said second port including a port assembly for attaching and detaching the bottom plate of the first pod to and from the pod body when the first pod is placed on the second port; and first lift means, arranged mainly between the first and second ports, for conveying the bottom plate of the first pod between the first and second ports when the bottom plate of the pod is detached from the pod body.
Claim 2
Dependent Claim
232 words
In a semiconductor processing system which includes: a first semiconductor wafer cassette for housing semiconductor wafers; a first transfer pod for enclosing the first cassette airtightly, said first pod having a box-like pod body with an open bottom and a bottom plate detachably attached to the pod body for closing the bottom of the pod body; a wafer processing equipment having a first port for loading the cassette and a canopy covering the first port, said processing equipment processing the wafer in the first cassette when the cassette is loaded in the first port; and first means for transferring the first cassette between the first port of the processing equipment and the first pod without exposing the cassette and the wafers therein to outside contamination, the improvement wherein said first transferring means comprises: a second port, provided on the canopy of the processing equipment at the position directly above the first port, for placing the first pod thereon, said second port including a port assembly for attaching and detaching the bottom plate of the first pod to and from the pod body when the first pod is placed on the second port; and first lift means, arranged mainly between the first and second ports, for conveying the bottom plate of the first pod between the first and second ports when the bottom plate of the pod is detached from the pod body.
Claim 3
Dependent Claim
162 words
A semiconductor processing system as recited in claim 1, further comprising: a second cassette; a second transfer pod for enclosing the second cassette airtightly; and second means for transferring the second cassette into and out of the processing equipment, said processing equipment further comprising: a third port for loading the second cassette, said third port covered with said canopy; and means for processing the wafers in the first cassette located in the first port and transferring the wafers into the second cassette located in the third port when the first cassette with the wafers and the second cassette being empty are loaded in the first and third ports respectively, said second transferring means comprising: a fourth port, provided on the canopy of the processing equipment at the position directly above the third port, for placing the second pod thereon; and second lift means, arranged mainly between the third and fourth ports, for conveying the second cassette between the third and fourth ports.
Claim 4
Dependent Claim
79 words
A semiconductor processing system as recited in claim 1, wherein said second port further includes a cassette opening formed in the canopy of the processing equipment, and wherein said first lift means includes a door plate for opening and closing the cassette opening of the second port, said door plate supporting the bottom plate of the first pod when the pod is placed on the second port, and a drive unit for driving the door plate upwards and downwards.
Claim 5
Dependent Claim
45 words
A semiconductor processing system as recited in claim 1 or 3, wherein said first transferring means further comprises means for turning the bottom plate of the first transfer pod about an axis perpendicular thereto so that the horizontal orientation of the bottom plate is controlled.
Claim 6
Dependent Claim
32 words
A semiconductor processing system as recited in claim 4, wherein said processing equipment further comprises a clean air supply unit for maintaining an interior of the processing equipment at ultra high cleanliness.