Patent EP0231027A2 successfully refreshed from Google Patents.
EP0231027A2
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Transmissivity inspection apparatus
Assignee: Toyo Glass Co Ltd
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Filing: 1987-01-29
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Granted: —
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Expires: 2007-01-29
Abstract
Abstract In a transmissivity inspection apparatus, laser beam (23) is radiated onto an object (2l) to be inspected. Irregularly reflected laser light components produced from the object (2l) are detected by a photoelectric converter element (25R). The transmissivity of the object (2l) with respect to the laser beam (23) is inspected by a discriminator (l2), based on a specific pattern (Pl-P3; Pl0) of the irregularly reflected laser light components detected by the photoelectric converter element (25R). The specific pattern (Pl-P3) of a transparent substance (2lG) differs from that (Pl0) of a nontransparent substance (2lF), thereby to discriminate the nontransparent substance (2lF) from the transparent substance (2lG).
Inventors
- 👤 Masahiko C/O Patent Division Iga
- 👤 Yoshihiro Yamato
- 👤 Yoshio Yamaguchi
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 18:33
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/47; G01N21/4738; B; B07; B07C; B07C5/00; B07C5/34; B07C5/342; B07C5/36; B07C5/363; B07C5/365
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
111 words
A transmissivity inspection apparatus, comprising: light source means (22, 26) for supplying coherent light (23, 23S) to an object (2l) to be inspected; reflection detection means (25R) for detecting irregular reflection components (E25) of the coherent light emitted from said object (2l); and transmissivity inspection means (9-l2; 33-34), coupled to said reflection detection means (25R), for inspecting a transmissivity of said object (2l) with respect to said coherent light (23) based on a specific pattern (Pl-P3, Pl0 in Figs. 3B-3E) of said irregular reflection components (E25), and generating an inspection signal (El2, El2*, El2**) indicating that said object (2l) includes a material (2lF) having a transmissivity lower than a predetermined transmissivity.
Claim 2
Dependent Claim
111 words
A transmissivity inspection apparatus, comprising: light source means (22, 26) for supplying coherent light (23, 23S) to an object (2l) to be inspected; reflection detection means (25R) for detecting irregular reflection components (E25) of the coherent light emitted from said object (2l); and transmissivity inspection means (9-l2; 33-34), coupled to said reflection detection means (25R), for inspecting a transmissivity of said object (2l) with respect to said coherent light (23) based on a specific pattern (Pl-P3, Pl0 in Figs. 3B-3E) of said irregular reflection components (E25), and generating an inspection signal (El2, El2*, El2**) indicating that said object (2l) includes a material (2lF) having a transmissivity lower than a predetermined transmissivity.
Claim 3
Independent Claim
77 words
An apparatus according to claim l, characterized in that said light source means (22) supplies coherent light beam (23) to said object (2l) so that a beam spot is formed on said object (2l) under inspection, and when said object (2l) under inspection includes a substantially nontransparent material (2lF) for said coherent light (23), said specific pattern (Pl0) has an area larger than an area of another specific pattern (Pl) obtained for a substantially transparent material (2lG).
Claim 4
Dependent Claim
106 words
An apparatus according to claim 2, characterized in that said transmissivity inspection means (9-l2; 33-34) includes: preprocessor means (l0), coupled to said reflection detection means (25R), for converting said irregular reflection components (E25) into electrical signal (El0); binary converter means (ll), coupled to said preprocessor means (l0), for converting said electrical signal (El0) into binary signal (Ell) indicating the area of said specific pattern (Pl-P3, Pl0); and discriminator means (l2), coupled to said binary converter means (ll), for generating said inspection signal (El2, El2*, El2**) when said binary signal (Ell) contains information that the area of said specific pattern (Pl0) is larger than a predetermined value.
Claim 5
Independent Claim
77 words
An apparatus according to claim l, characterized in that said light source means (22) supplies coherent light beam (23) to said object (2l) so that a beam spot is formed on said object (2l) under inspection, and when said object (2l) under inspection includes a substantially nontransparent material (2lF) for said coherent light (23), the number of said specific pattern (Pl0) is smaller than that of other specific patterns (Pl-P3) obtained for a substantially transparent material (2lG).
Claim 6
Independent Claim
83 words
An apparatus according to claim l, characterized in that said light source means (22) supplies coherent light beam (23) to an edge portion of said object (2l) so that a beam spot of said coherent light beam (23) is formed at the edge portion, and when said object (2l) under inspection includes a substantially transparent material (2lG) for said coherent light beam (23), said specific pattern (25l in Fig. 6A) has a portion (X) at which a configuration of the pattern changes abruptly.
Claim 7
Independent Claim
77 words
An apparatus according to claim l, characterized in that said light source means (22, 26) includes means (26) for converting said coherent light (23) into scanning coherent light beam (23S) to be scanned over said object (2l), and when said object (2l) under inspection includes a substantially transparent material (2lG) for said coherent light beam (23), said specific pattern (25l in Fig. 6A) has portions (X) at which a configuration of said specific pattern (25l) changes abruptly.
Claim 8
Independent Claim
88 words
An apparatus according to claim l, characterized in that said light source means (22, 26) includes means (26) for converting said coherent light (23) into scanning coherent light beam (23S) to be scanned over said object (2l), and when said object (2l) under inspection includes a substantially transparent material (2lG) for said coherent light beam (23), said specific pattern (25l in Fig. 6A) has a narrowed portion having a given length (L) formed between two portions (X) at which a configuration of said specific pattern (25l) changes abruptly.
Claim 9
Dependent Claim
28 words
An apparatus according to claim 7, characterized in that said transmissivity inspection means (9-l2; 33-34) includes: means (l2) for detecting the narrowed portion of said specific pattern (25l).
Claim 10
Dependent Claim
108 words
An apparatus according to claim 7, characterized in that said transmissivity inspection means (9-l2; 33-34) includes: preprocessor means (l0), coupled to said reflection detection means (25R), for converting said irregular reflection components (E25) into electrical signal (El0); differentiator means (33), coupled to said preprocessor means (l0), for differentiating said electrical signal (El0) to provide a differentiated signal (E33); and signal detector means (34), coupled to said differentiator means (33), for detecting whether said differentiated signal (E33) contains a specific pair of positive and negative waveforms (E34 in Fig. l0A) which indicates that said object (2l) includes a material (2lG) substantially transparent with respect to said coherent light (23).
Claim 11
Dependent Claim
62 words
l0. An apparatus according to claim l, characterized in that said transmissivity inspection means (9-l2) detects portions (Pl-P3, Pl0 in Fig. 3; 25l, 252 in Fig. 6) exhibiting a specific transmissivity being different from the transmissivity of other portion of said object (2l), in accordance with an irregular reflection pattern of the coherent light (23) reflected from said object (2l) under inspection.
Claim 12
Independent Claim
46 words
An apparatus according to any one of claims l to l0, characterized by further comprising: means (l3-l5) for removing said low transmissivity material (2lF) from a number of the inspected objects (2l) when said transmissivity inspection means (9-l2; 33-34) generates said inspection signal (El2, El2*, El2**).
References Cited (Backward Citations)
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