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EP0228042A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Mirror assembly

Assignee: Honeywell Inc
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Filing: 1986-12-19
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Granted: —
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Expires: 2006-12-19
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Abstract

Abstract A mirror assembly for ring laser angular rate sensors which is inexpensive to manufacture comprises a mirror chip (200M) from silicon material with at least one mirror material (212, 214) being deposited on a polished surface (202) of said chip. A further polished surface (204) serves to bond the mirror chip on a further substrate.

Inventors

  • 👤 Theodore J. Podgorski

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-09 12:29
CPC Classifications
G; G02; G02B; G02B5/00; G02B5/08; G02B5/0816; G02B5/0825; G02B5/0833; G01; G01C; G01C19/00; G01C19/58; G01C19/64; G01C19/66; G01C19/661; H; H01; H01S; H01S3/00; H01S3/05; H01S3/08; H01S3/08059; H01S3/081; H01S3/083

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 62 words
A mirror assembly, characterized by: a first substrate (15) having a first polished surface (17); a second substrate (200) having a first polished surface (204) sufficient to bond together said first surface of said first and second substrates by an optical contact seal; and a mirror material (212, 214) on a second surface (202) of said second substrate to form a mirror.
Claim 2
Dependent Claim 62 words
A mirror assembly, characterized by: a first substrate (15) having a first polished surface (17); a second substrate (200) having a first polished surface (204) sufficient to bond together said first surface of said first and second substrates by an optical contact seal; and a mirror material (212, 214) on a second surface (202) of said second substrate to form a mirror.
Claim 3
Dependent Claim 15 words
Assembly according to claim 1, charac­terized in that said second sub­strate is comprised of silicon.
Claim 4
Dependent Claim 33 words
Assembly according to claim 1, character­ized in that said second substrate (200) is comprised of silicon and said mirror material (212, 214) is comprised of alternating layers of silicon dioxide and titanium dioxide.
Claim 5
Dependent Claim 29 words
Assembly according to claim 1, character­ized by a plurality of alternating layers of at least two dielectric materials deposited on said second surface to form a highly reflective mirror.
Claim 6
Dependent Claim 21 words
Assembly according to claim 1, character­ized in that said first and second sub­strates (15, 200) are comprised of a translucent material.
Claim 7
Dependent Claim 46 words
Assembly according to one of claims 1 to 5, char­acterized by its use in a ring laser angular rate sensor with said first substrate (15) having portions of its polished surface (17) fixed to portions of a mechanically and thermally stable block (10) of said sensor.
Claim 8
Dependent Claim 33 words
A mirror chip, characterized by : a silicon substrate (200) having a polished sur­face (202); and at least one mirror material (212, 214) deposited on said polished surface (202) to form a mirror.
Claim 9
Dependent Claim 33 words
A mirror chip, characterized by : a silicon substrate (200) having a polished sur­face (202); and at least one mirror material (212, 214) deposited on said polished surface (202) to form a mirror.
Claim 10
Dependent Claim 33 words
Mirror chip according to claim 7, further characterized by a plurality of alternating layers of at least two dielectric materials (212, 214) deposited on said polished surface to form a highly reflective mirror.

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