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EP0219995A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Gate turn-off thyristor with independent turn-on/off controlling transistors

Assignee: Toshiba Corp
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Filing: 1986-09-30
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Granted: —
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Expires: 2006-09-30
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Abstract

Abstract A gate turn-off thyristor (10) has first and second MOSFETs (Q1, Q2) serving as turn-on and turn-off con­trolling devices, respectively. A p type semiconductor layer (26a, 26b) is additionally formed in an n type substrate (16) functioning as a first base in such a manner as to overlap a p type second base layer (18). The additional layer (26a, 26b) is different from the second base (18) in impurity concentration, thereby causing the resistivity of the second base (18) to be smaller than that of the additional layer (26a, 26b). The first MOSFET (Q1) has an n type source layer (28) formed in the additional layer (26a) to define a surface portion of the additional layer (26a) positioned between the source layer (28) and the first base layer (16) as a channel region (CH1) of the first MOSFET (Q1). A turn-­on gate layer (34) is provided to cover a surface region of the first base (16) and the channel region (CH1) of the first MOSFET (Q1).

Inventors

  • 👤 Akio Patent Division K.K. Toshiba Nakagawa
  • 👤 Takashi Patent Division K.K. Toshiba Shinohe

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-27 18:17
CPC Classifications
H; H10; H10D; H10D18/00; H10D18/60; H10D18/65; H10D18/655; H10D18/221; H10D18/40

Claims Analysis

Total Claims: 18
Claim 1
Independent Claim 288 words
A gate turn-off thyristor (10, 80, 120, 140) having a semiconductive substrate (16) of a first con­ductivity type serving as a first base layer, wherein first emitter layer (12) and second base layer (18, 82, 126) both of a second conductivity type are formed on opposing surfaces of said substrate (16), said first base layer (16) has a surface region which is in contact with said second base layer (18, 82, 126), and a second emitter layer (20, 84, 122, 158) of the first conduc­tivity type is formed in said second base layer, charac­terized in that said thyristor comprises: an additional semiconductor layer (26, 86, 126') of the second conduc­tivity type which is formed in said first base layer (16) so as to overlap said second base layer (18, 82, 126) and which is different from said second base layer in an impurity concentration, whereby said second base layer (18, 82, 126) has smaller resistivity than said additional layer a first field effect transistor (Q1, Q3, Q5, Q7) for turning on said thyristor, said first transistor having a source layer (28, 88, 122) formed in said additional layer to define a surface portion of said additional layer positioned between said source layer and said first base layer as a channel region (CH1, CH3, CH5, CH7) of said first transistor, and a first gate layer (34, 90, 128, 142) insulatively pro­vided above said substrate to at least partially cover the surface region of said first base layer and the channel region of said first transistor; and a second field effect transistor (Q2, Q4, Q6, Q8) for short-­circuiting said first base layer and said second emitter layer with each other to thereby turn off said thyristor (10, 80, 120, 140).
Claim 2
Dependent Claim 288 words
A gate turn-off thyristor (10, 80, 120, 140) having a semiconductive substrate (16) of a first con­ductivity type serving as a first base layer, wherein first emitter layer (12) and second base layer (18, 82, 126) both of a second conductivity type are formed on opposing surfaces of said substrate (16), said first base layer (16) has a surface region which is in contact with said second base layer (18, 82, 126), and a second emitter layer (20, 84, 122, 158) of the first conduc­tivity type is formed in said second base layer, charac­terized in that said thyristor comprises: an additional semiconductor layer (26, 86, 126') of the second conduc­tivity type which is formed in said first base layer (16) so as to overlap said second base layer (18, 82, 126) and which is different from said second base layer in an impurity concentration, whereby said second base layer (18, 82, 126) has smaller resistivity than said additional layer a first field effect transistor (Q1, Q3, Q5, Q7) for turning on said thyristor, said first transistor having a source layer (28, 88, 122) formed in said additional layer to define a surface portion of said additional layer positioned between said source layer and said first base layer as a channel region (CH1, CH3, CH5, CH7) of said first transistor, and a first gate layer (34, 90, 128, 142) insulatively pro­vided above said substrate to at least partially cover the surface region of said first base layer and the channel region of said first transistor; and a second field effect transistor (Q2, Q4, Q6, Q8) for short-­circuiting said first base layer and said second emitter layer with each other to thereby turn off said thyristor (10, 80, 120, 140).
Claim 3
Dependent Claim 79 words
The thyristor according to claim 1, charac­terized in that said second base layer (18, 82, 126) comprises a surface region interposed between said additional semiconductor layer (26, 86, 126') and said second emitter layer (20, 84, 122, 158) , and that said second transistor (Q2, Q4, Q6, Q8) comprises a second gate layer (50, 56; 110, 112; 134, 136) insulatively formed on said substrate to at least cover the surface region of said second base layer (18, 82, 126).
Claim 4
Dependent Claim 70 words
The thyristor according to claim 2, charac­terized in that said first and second transistors (Q1, Q5; Q2, Q6) have the same channel types, and that said second transistor (Q2, Q6) comprises a drain layer (30, 40; 132) which is formed in said second base layer and defines a surface region of said second base layer dis­posed between itself and said second emitter layer as the channel of said second transistor.
Claim 5
Dependent Claim 45 words
The thyristor according to claim 3, charac­terized in that said second gate layer (50, 56; 134) is formed to cover a portion of the surface region of said second base layer disposed between said drain layer and said second emitter layer of said second transistor.
Claim 6
Dependent Claim 45 words
The thyristor according to claim 4, charac­terized in that the source layer (28, 122) of said first transistor and the drain layer (30, 40; 132) of said second transistor are formed of first conductivity type semiconductor diffusion layers electrically connected to said second base layer.
Claim 7
Dependent Claim 39 words
The thyristor according to claim 5, charac­terized by further comprising a conductive layer (32) formed on said additional layer (26a, 26b) to connect said source layer (28) and said drain layer (30, 40) to said second base layer (18).
Claim 8
Dependent Claim 91 words
The thyristor according to claim 5, character­ized in that said second emitter layer (20) at least partially has a substantially rectangular slender planar shape defined by long and short sides, the source layer (28) of said first transistor (Q1) is extended substan­tially parallel to the short sides of said second emit­ter (20), and the drain layer (30) of said second transistor (Q2) is extended substantially parallel to the long sides of said second emitter, whereby said second transistor (Q2) comprises a channel width longer than that of said first transistor (Q1).
Claim 9
Dependent Claim 96 words
The thyristor according to claim 2, charac­terized in that said first and second transistors (Q3, Q7; Q4, Q8) have different channel types, that said second transistor (Q4, Q8) has a second conductivity type source layer (100; 148, 150) which is formed in said second emitter layer (84, 122) to define a surface region of said second emitter layer disposed between itself and said second base layer (82, 126) as the chan­nel of the second transistor, and that said second gate layer (110, 122; 142) being formed to cover said surface region of said second emitter layer.
Claim 10
Dependent Claim 65 words
The thyristor according to claim 8, charac­terized in that the source layer (88) of said first transistor (Q3) is formed of a first conductivity type semiconductor diffusion layer electrically connected to said second base layer (82), and that the source layer (100) of said second transistor (Q4) is formed of a second conductivity type semiconductor diffusion layer electrically connected to said second emitter layer (84).
Claim 11
Dependent Claim 78 words
The thyristor according to claim 9, character­ized by further comprising: a first conductive layer (94) formed on said additional layer to connect the source layer (88) of said first transistor to said sec­ond base layer (82); and a second conductive layer (104) formed on said second emitter layer to connect the source layer (100) of said second transistor (Q4) to the second emitter layer (84), said second conductive layer func­tioning as the cathode (C) electrode of said thyristor.
Claim 12
Dependent Claim 35 words
The thyristor according to claim 10, charac­terized in that said first and second gate layers (90; 110, 112) are electrically connected to commonly receive a voltage for controlling the turn-on and off of said thyristor.
Claim 13
Dependent Claim 89 words
The thyristor according to claim 10, charac­terized in that said second emitter layer (84) at least partially comprises a substantially rectangular slender planar shape defined by long and short sides, the source layer (88) of said first transistor (Q3) is extended substantially parallel to the short sides of said second emitter layer, and the source layer (100) of said second transistor is extended substantially parallel to the long sides of said second emitter layer, whereby said second transistor has a channel width longer than that of said first transistor.
Claim 14
Dependent Claim 144 words
A gate turn-off thyristor (10, 80, 120, 140) having a semiconductive substrate (16) of a first con­ductivity type serving as a first base layer, first emitter layer (12) and second base layer (18, 82, 126) both of a second conductivity type, which are formed on opposing surfaces of said substrate (16), and a second emitter layer (20, 84, 122, 158) of the first conduc­tivity type formed in said second base layer, charac­terized in that said thyristor comprises: a first field effect transistor (Q1, Q3, Q5, Q7) switched for driving on said thyristor, said first transistor having a chan­nel width of first length; and a second field effect transistor (Q2, Q4, Q6, Q8) switched for driving off said thyristor by short-circuiting said first base layer and said second emitter layer, said second transistor having a channel length of second length longer than said first length.
Claim 15
Dependent Claim 144 words
A gate turn-off thyristor (10, 80, 120, 140) having a semiconductive substrate (16) of a first con­ductivity type serving as a first base layer, first emitter layer (12) and second base layer (18, 82, 126) both of a second conductivity type, which are formed on opposing surfaces of said substrate (16), and a second emitter layer (20, 84, 122, 158) of the first conduc­tivity type formed in said second base layer, charac­terized in that said thyristor comprises: a first field effect transistor (Q1, Q3, Q5, Q7) switched for driving on said thyristor, said first transistor having a chan­nel width of first length; and a second field effect transistor (Q2, Q4, Q6, Q8) switched for driving off said thyristor by short-circuiting said first base layer and said second emitter layer, said second transistor having a channel length of second length longer than said first length.
Claim 16
Dependent Claim 76 words
The thyristor according to claim 13, charac­terized in that said second emitter layer (20, 84, 122, 158) at least partially has a substantially rectangular slender planar shape defined by long and short sides, said first transistor comprises a channel region (CH1, CH3, CH5, CH7) formed long the short sides of said sec­ond emitter layer, and said second transistor comprises a channel region (CH2, CH4, CH6, CH8) formed along the long sides of said second emitter layer.
Claim 17
Dependent Claim 37 words
The thyristor according to claim 14, charac­terized in that said second emitter layer (20, 84, 122) is formed in said second base layer and divided into a plurality of semiconductor layers having a rectangular slender planar shape.
Claim 18
Dependent Claim 42 words
The thyristor according to claim 14, character­ized in that said second emitter layer (158) is formed in said second base layer and is formed of a first con­ductivity type semiconductor layer having a plurality of layer portions of rectangular slender planar shape.

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