EP0215968A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Device for the production of amorphous silicon solar cells, method for operating this device and cathode for use in this device
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1985-09-21
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Granted: —
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Expires: 2005-09-21
Abstract
Abstract In a chamber (4) silicon layers are deposited by plasma coating, silane being fed via a cathode (12) with gas outlet openings (19) and reduced in the plasma; in order to make possible the quality of the solar cells produced with a simultaneous reduction in production costs, it is proposed to equip the chamber (4) with devices (9) for recovering and purifying the silane; advantageously, at least one freezing-out device (36, 37, 38) is used for this purpose. <IMAGE>
Inventors
- 👤 Heinrich Amlinger
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 05:02
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45593; C23C16/22; C23C16/24; C23C16/45561; H; H10; H10F; H10F71/00; H10F71/10; H10F71/103; H10F71/107; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
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References Cited (Backward Citations)
DE2918066A1
Cited
US4491604A
Cited
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