EP0213409A1
Expired / Lapsed
EP
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Structure for the quality testing of a semiconductor substrate
Assignee: Siemens AG
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Filing: 1986-07-31
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Granted: —
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Expires: 2006-07-31
Abstract
Abstract Translated from German Struktur (Fig.3) bzw. Maskensatz zur Herstellung einer solchen Struktur, die darauf abgestimmt ausgebildet ist, Substratscheiben (30) aus Halbleitermaterial mit genügender Zuverlässigkeit auf deren Qualit;a at für die Verwendung für integrierte Schaltung zu überprüfen. Structure (FIG. 3) or set of masks for producing such a structure, which is designed to check substrate wafers (30) made of semiconductor material with sufficient reliability for their quality for use in integrated circuits.
Inventors
- 👤 Gerhard Dipl.-Phys. Dr. Packeiser
- 👤 Helmut Dipl.-Phys. Dr. Schink
- 👤 Gerard Marie Martin
- 👤 Jose Maluenda
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 02:35
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/20; H10P74/207; G; G01; G01R; G01R31/00; G01R31/28; G01R31/282; G01R31/2831; H10P74/23; H10P74/27; H10P74/277; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/43
Claims Analysis
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References Cited (Backward Citations)
EP0113828A2
Cited
EP0119059A2
Cited
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