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Patent EP0211202A1 successfully refreshed from Google Patents.
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EP0211202A1 Expired / Lapsed EP ⏱️ 0.0 years remaining

Control device for coordinate measuring tools

Assignee: Carl Zeiss SMT GmbH
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Filing: 1986-06-19
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Granted: —
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Expires: 2006-06-19
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Abstract

Abstract Translated from German Zur kontinuierlichen Abtastung der Werkstückkontur (11) im sog. "Scanning"-Betrieb ist eine Steuerung (5,6) vorgesehen, bei der die Richtung der Bahngeschwindigkeit des Tastkopfes abhängig von der Differenz zwischen Istwert und Sollwert der Tasterauslenkung geändert wird. Der Betrtag|? soll| der Bahngeschwindigkeit wird dabei konstant gehalten. A control (5, 6) is provided for the continuous scanning of the workpiece contour (11) in the so-called "scanning" mode, in which the direction of the path speed of the probe is changed depending on the difference between the actual value and the target value of the probe deflection. The amount |? should | the web speed is kept constant.

Inventors

  • 👤 Gerhard Trieb
  • 👤 Karl Schepperle
  • 👤 Karl-Eugen Aubele

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-28 11:53
CPC Classifications
G; G05; G05B; G05B19/00; G05B19/02; G05B19/18; G05B19/401; B; B82; B82Y; B82Y15/00; G05B2219/00; G05B2219/30; G05B2219/37; G05B2219/37193; G05B2219/50; G05B2219/50134

Claims Analysis

Total Claims: 0
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References Cited (Backward Citations)

US3292495A Cited
DE2242355B1 Cited
DE2242355C2 Cited
US4224670A Cited
DE2921166A1 Cited

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