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EP0190820A2
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Zirconium thin-film metal conductor systems
Assignee: Tektronix Inc
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Filing: 1986-01-09
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Granted: —
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Expires: 2006-01-09
Abstract
Abstract A thin-film metal conductor system using a zirconium adhesion layer is disclosed. The system is formed by first p-lating a layer of zirconium over a substrate material and any electrical components, such as resistors,which are fixed on the substrate. A conductive layer is then deposited over those portions of the zirconium layer which are to provide conductive pathways. The resulting unit is thermally treated in an oxidizing environment, such as air, to oxidize the exposed portions of the zirconium layer and tehreby form reginos of zirconium oxide. The zirconium oxide is nonconductive and protects underlying composnents from moisture and physical abrasion.
Inventors
- 👤 Earl R. Helderman
- 👤 Robert E. Holmes
- 👤 Robert R. Zimmerman
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 08:51
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H05; H05K; H05K3/00; H05K3/38; H05K3/388; H10W70/60; H10W70/62; H10W70/66; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K1/0313; H05K1/032; H05K1/0346; H05K1/09; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
42 words
A method for forming an electrically conductive pathway comprising: providing on a substrate, a layer of zirconium which extends from a first location on the substrate to a second location on the substrate; and providing a conductive layer over the zirconium layer.
Claim 2
Independent Claim
42 words
A method for forming an electrically conductive pathway comprising: providing on a substrate, a layer of zirconium which extends from a first location on the substrate to a second location on the substrate; and providing a conductive layer over the zirconium layer.
Claim 3
Dependent Claim
28 words
The method of claim 1 comprising providing the zirconium laver at a thickness of from 2.5 x 10 -6 cm to 2.0 x 1 0 -5 cm .
Claim 4
Dependent Claim
28 words
The method of claim 1 comprising forming the conductive layer in a pattern which leaves the zirconium layer exposed in regions where a conductive pathway is not desired.
Claim 5
Dependent Claim
42 words
The method of claim 3 further comprising maintaining the electrically conductive pathway, when completed, at 250-400°C for two to six hours in an oxidizing environment to form a protective layer of zirconium oxide in the regions where the zirconium layer is exposed.
Claim 6
Dependent Claim
65 words
The method of claim 1 further comprising forming the conductive layer by: depositing a primary copper layer on the zirconium layer at a thickness of from 5.0 x 10 -6 cm to 1.0 x 10 -4 cm; and depositing a secondary copper layer on the primary copper layer at a thickness of from 1.0 x 10 -4 cm to 1.0 x 10 -3 cm .
Claim 7
Dependent Claim
58 words
The method of claim 5 further comprising: depositing a nickel layer on the secondary copper layer at a thickness of from 5.0 x 10 -6 cm to 5.0 x 10 -5 cm; and depositing a gold layer on the nickel layer at a thickness of from 5.0 x 10 -6 cm to 4.0 x 10 -5 cm .
Claim 8
Dependent Claim
69 words
The method of claim 1 further comprising forming the conductive layer of a plurality of metal layers by: depositing a primary gold layer on the zirconium layer at a thickness of from 5.0 x 10 cm to 1.0 x 10 -4 cm; and depositing a secondary gold layer on the primary gold layer at a thickness of from 1.0 x 10 -4 cm to 1.0 x 10 -3 cm.
Claim 9
Dependent Claim
31 words
The method of claim 1 in which the substrate is comprised of a material selected from the group consisting of alumina, quartz, fused silica, beryllia, glass, forsterite, polyimide, and oxidized silicon.
Claim 10
Dependent Claim
14 words
The method of claim 1 in which the substrate has electrical components affixed thereto.
Claim 11
Dependent Claim
16 words
The method of claim 9 in which at least some of the electrical components comprise resistors.
Claim 12
Dependent Claim
13 words
A thin-film metal conductor system manufactured according to the process of claim 1.
Claim 13
Dependent Claim
24 words
A thin-film metal conductor system which comprises: a substrate; a layer of zirconium on the substrate; and a conductive layer on the zirconium layer.
Claim 14
Dependent Claim
24 words
A thin-film metal conductor system which comprises: a substrate; a layer of zirconium on the substrate; and a conductive layer on the zirconium layer.
Claim 15
Dependent Claim
34 words
The thin-film metal conductor system of claim 12 in which the conductive layer is present in a pattern such that the zirconium layer is exposed in regions where a conductive pathway is not desired.
Claim 16
Dependent Claim
50 words
The thin-film metal conductor system of claim 13 in which a protective layer of zirconium oxide exists in the regions where the zirconium layer was exposed, the zirconium oxide having been formed by maintaining the system of claim 13 at 250-400°C for two to six hours in an oxidizing environment.
Claim 17
Dependent Claim
26 words
The thin-film metal conductor system of claim 12 in which the zirconium layer is from 2.5 x 10 -6 cm to 2.0 x 10 -5 cm.
Claim 18
Dependent Claim
73 words
The thin-film metal conductor system of claim 12 in which the conductive layer is comprised of a plurality of metal layers comprising: a primary copper layer on the zirconium layer at a thickness of from 5.0 x 10 -6 cm to 1.0 x 10 -4 cm; and a secondary copper layer on the primary copper layer at a thickness of from 1.0 x 10 -4 cm to 1.0 x 10 -3 cm .
Claim 19
Dependent Claim
65 words
The thin-film metal conductor system of claim 16 in which the metal layers further comprise: a nickel layer on the secondary copper layer at a thickness of from 5.0 x 10 -6 cm to 5 . 0 x 10 -5 cm; and a gold layer on the nickel laver at a thickness of from 5.0 x 10 -6 cm to 4.0 x 10 -5 cm.
Claim 20
Dependent Claim
71 words
The thin-film metal conductor system of claim 12 in which the conductive layer comprises a plurality of metal layers comprising: a primary gold layer on the zirconium layer at a thickness of from 5.0 x 10 -6 cm to 1.0 x 10 -4 cm; and a secondary gold layer on the primary gold layer at a thickness of from 1.0 x 10 -4 cm to 1.0 x 10 -3 cm .
Claim 21
Dependent Claim
42 words
A circuit board comprising: a substrate; thin-film conductive pathways, each including a layer of zirconium on the substrate and a conductive layer on the zirconium layer; and nonconductive regions of zirconium oxide on the substrate, the regions being located between the pathways.
Claim 22
Dependent Claim
42 words
A circuit board comprising: a substrate; thin-film conductive pathways, each including a layer of zirconium on the substrate and a conductive layer on the zirconium layer; and nonconductive regions of zirconium oxide on the substrate, the regions being located between the pathways.
References Cited (Backward Citations)
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