Patent EP0180222A2 successfully refreshed from Google Patents.
EP0180222A2
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EP
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Surface roughening method
Assignee: Fuji Electric Co Ltd
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Filing: 1985-10-31
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Granted: —
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Expires: 2005-10-31
Abstract
Abstract 57 A surface roughening method, preferably for a substrate of a solar cell, comprising coating the substrate with a photoresist material having light-shielding particles mixed therein, exposing and developing the photoresist coating and then etching the substrate with a suitable etchant.
Inventors
- 👤 Masakazu Fuji Electric Corporate Research Ueno
- 👤 Toshiaki Fuji Electric Corporate Research Kato
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 08:58
CPC Classifications
C; C03; C03C; C03C15/00; H; H10; H10F; H10F77/00; H10F77/40; H10F77/42; H10F77/484; H10F77/488; H10F77/70; H10F77/707; H10P; H10P50/00; H10P50/69; H10P50/691; H10P50/692; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/52
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
56 words
A surface roughening method, comprising the following steps: coating the surface of a substrate of interest with a photoresist incorporating light-shielding micro-particles; exposing and developing the photoresist coat; and etching the substrate with an etchant capable of etching the material of which the substrate is made, but not etching the undeveloped photoresist behind the light-shielding particles.
Claim 2
Dependent Claim
56 words
A surface roughening method, comprising the following steps: coating the surface of a substrate of interest with a photoresist incorporating light-shielding micro-particles; exposing and developing the photoresist coat; and etching the substrate with an etchant capable of etching the material of which the substrate is made, but not etching the undeveloped photoresist behind the light-shielding particles.
Claim 3
Dependent Claim
17 words
The method of Claim 1, in which the substrate is glass and the etchant is hydrofluoric acid.
Claim 4
Dependent Claim
27 words
The method of Claim 1, in which the substrate is aluminum and the light-shielding particles are silver glass beads having a diameter of about 10 µ m.
Claim 5
Independent Claim
128 words
A method of roughening the surface of a piece of glass, comprising: coating said glass surface with a coat having a thickness of about 1 p m with a positive working photoresist material, said material having mixed therein light-shielding particles and being non-reacting with hydrofluoric acid; exposing the coating to light for a sufficient time to react with the photoresist material so that only the portions behind the light-shielding particles remain unexposed; developing the photoresist material; and etching the surface of the glass with hydrofluoric acid for a sufficient time to react with that portion of the glass surface not covered by the light-shielding particles to produce a glass surface upon which multiple cylindrical glass columns are dispersed in location corresponding to the locations of the light-shielding particles.
Claim 6
Independent Claim
128 words
A method of roughening the surface of a piece of glass, comprising: coating said glass surface with a coat having a thickness of about 1 p m with a positive working photoresist material, said material having mixed therein light-shielding particles and being non-reacting with hydrofluoric acid; exposing the coating to light for a sufficient time to react with the photoresist material so that only the portions behind the light-shielding particles remain unexposed; developing the photoresist material; and etching the surface of the glass with hydrofluoric acid for a sufficient time to react with that portion of the glass surface not covered by the light-shielding particles to produce a glass surface upon which multiple cylindrical glass columns are dispersed in location corresponding to the locations of the light-shielding particles.
References Cited (Backward Citations)
No citation records indexed.
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