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EP0175378B1 Expired / Lapsed EP ⏱️ 0.0 years remaining

Dynamic random access memory (dram)

Assignee: Fujitsu Ltd
•
Filing: 1985-09-20
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Granted: 1991-11-21
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Expires: 2005-09-20
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Abstract

No abstract record available.

Inventors

  • 👤 Motoo C/O Fujitsu Limited Nakano

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-09 08:45
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/20; H10D; H10D88/00; G; G11; G11C; G11C11/00; G11C11/21; G11C11/34; G11C11/40; G11C11/401; G11C11/403; G11C11/405; H10B12/01

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 421 words
A three-transistor cell for a dynamic random access memory formed on a semiconductor substrate (1), the cell comprising a read select transistor (T₁), having a drain (3a) connected to a data bit line (DL) of the memory, and a gate (5, 15) connected to a read select line (RL, WRL) of the memory, a storage transistor (T₃), having a drain (Ch1) connected to a source (Ch3) of the read select transistor (T₁) and a source (3b) connected to a ground line (GND) of the memory, and a write select transistor (T₂) having a source (9b) connected to a gate (9b) of the storage transistor, a gate (11, 15) connected to a write select line (WL, WRL) of the memory, and a drain (9a) connected to the data bit line (DL), characterised in that the read select transistor (T₁) and the storage transistor (T₃) are formed as a dual gate transistor (T₁, T₃; T d ), a channel region (Ch1) of the read select transistor being directly connected to a channel region (Ch3) of the storage transistor to provide a channel region (Ch2, Ch3) of the dual gate transistor, the channel region (Ch1) of the read select transistor also acting as drain of the storage transistor and the channel region (Ch3) of the storage transistor also acting as source of the read select transistor, the drain (3a) of the read select transistor being the drain of the dual gate transistor and the source (3b) of the storage transistor being the source of the dual gate transistor, between which drain (3a) and source (3b) the channel region (Ch1, Ch3) of the dual gate transistor lies, and the two gates of the dual gate transistor being, respectively, the gate (5; 15) of the read select transistor and the gate (9b) of the storage transistor, which gates overlie the channel region (Ch1, Ch3) of the dual gate transistor via an interposed insulator layer (4, 7), and characterised in that the write select transistor (T₂) is formed over the read select transistor (T₁), with an interposed insulator layer (6, 7; 6, 7, 10), the drain (9a) of the write select transistor being connected directly to the drain (3a) of the read select transistor through a window or opening in the latter interposed insulator layer, and in that the source region (9b) of the write select transistor (T₂) acts also as the gate of the storage transistor (T₃) which is otherwise provided on the same side of the latter interposed insulator layer as the read select transistor.
Claim 2
Dependent Claim 58 words
A cell as claimed in claim 1, wherein the read select transistor (T₁) and the write select transistor (T₂) share a common gate (15) connected to a combined read/write select line (WRL) of the memory, the read select transistor and the write select transistor having respective gate insulator layers (4, 10) and respective different threshold voltages (Vth1, Vth2).
Claim 3
Dependent Claim 69 words
A cell as claimed in claim 2, wherein said read select transistor (T₁) and said write select transistor (T₂) formed over said read select transistor (T₁) share a common gate electrode (15-Fig. 3 (c)) with each other, said common gate electrode (15) being disposed between said read select transistor (T₁) and said write select transistor (T₂) and effective for the respective transistors through respective gate insulator layers (4, 10).
Claim 4
Dependent Claim 25 words
A cell as claimed in claim 1, wherein said storage transistor (T₃) has a gate electrode, side walls of which are covered by insulator layers.
Claim 5
Dependent Claim 22 words
A cell as claimed in claim 2, wherein the side walls of said common gate electrode (15) are covered by insulator layers.
Claim 6
Dependent Claim 52 words
A cell as claimed in claim 1, wherein said write select transistor (T2) is formed in a semiconductor layer (8) formed on an interposed insulator layer (7) over said read select transistor (T1), which semiconductor layer is, for example, a single crystal silicon layer fabricated utilizing a silicon on insulator (SOI) technology.

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