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EP0169664A1 Expired / Lapsed EP ⏱️ 0.0 years remaining

Apparatus for determining the degree of oxidation of an oxide coating

Assignee: Toshiba Corp
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Filing: 1985-06-20
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Granted: —
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Expires: 2005-06-20
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Abstract

Abstract A method and apparatus determines the thickness of a copper oxide coating of an object by measuring the quantity of light reflected from the object in at least two wavelength zones, and then determining a value for a relationship between those quantities, for example, the ratio or difference of those quantities. The value is then compared to a predetermined, regular correspondence between such values and copper oxide thicknesses to determine the object's copper oxide thickness.

Inventors

  • 👤 Mamoru C/O Patent Division Tominaga
  • 👤 Leo C/O Patent Division Mori
  • 👤 Junetsu C/O Patent Division Akiyama

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-01 12:23
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/25; G01N21/31; G01N21/314; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0625

Claims Analysis

Total Claims: 34
Claim 1
Independent Claim 77 words
An apparatus for determining the thickness of a copper oxide coating on an object comprising: means for determining the quantities of light reflected from said object in different wavelength zones; and means, coupled to said determining means, for calculating a value representing a relationship between said quantities of reflected light and for thereby determing the thickness of the oxide coating of said object from a predetermined regular correspondence between oxide coating thicknesses and values for said relationship.
Claim 2
Independent Claim 77 words
An apparatus for determining the thickness of a copper oxide coating on an object comprising: means for determining the quantities of light reflected from said object in different wavelength zones; and means, coupled to said determining means, for calculating a value representing a relationship between said quantities of reflected light and for thereby determing the thickness of the oxide coating of said object from a predetermined regular correspondence between oxide coating thicknesses and values for said relationship.
Claim 3
Dependent Claim 25 words
The apparatus of claim 1 wherein said calculating means includes means for determining a value equal to the ratio of said quantities of reflected light.
Claim 4
Dependent Claim 25 words
The apparatus of claim 1 wherein said calculating means includes means for determining a value equal to the difference between said quantities of reflected light.
Claim 5
Dependent Claim 57 words
The apparatus of claim 1, 2 or 3 wherein said quantities determining means includes at least two colour filters for filtering said reflected light into different wavelength zones and a first photodetector, said filters and said first photodetector being configured such that light reflected from said object passes through said colour filters and strikes said first photodetector.
Claim 6
Dependent Claim 20 words
The apparatus of claim 4 wherein said calculating and determining means includes a data processor coupled to said first photodetector.
Claim 7
Dependent Claim 25 words
The apparatus of claim 4 or 5 further including means for rotating said colour filters such that said reflected light alternately passes through said filters.
Claim 8
Dependent Claim 25 words
The apparatus fo claim 5 and 6 further including means for transmitting information regarding the rate of rotation of said filters to said data processor.
Claim 9
Dependent Claim 57 words
The apparatus of claim 7 wherein said rate information transmitting means includes an LED and a second photodetector mounted on opposite sides of said rotating means, said rotating means also including at least one transparent portion located to allow light from said LED to strike said second photodetector at least once during each rotation of said filters.
Claim 10
Dependent Claim 28 words
The apparatus of claim 6, 7 or 8 wherein said rotating means includes means, coupled to said data processor, for controlling the rate of rotation of said filters.
Claim 11
Independent Claim 31 words
The apparatus of any one of claims 4 to 9 wherein said two colour filters are each sharp cut-off filters with transmission thresholds of approximately 500 nm and 660 nm, respectively.
Claim 12
Dependent Claim 41 words
The apparatus of claim 1, 2 or 3 wherein said quantities determining means includes: a first beam splitter to split said reflected light into first and second beams; and first and second photodetectors for receiving said first and second beams, respectively.
Claim 13
Dependent Claim 54 words
The apparatus of claim 11 wherein said first beam splitter has a first dichroic mirror and further including a second beam splitter with a second dichoic mirror for splitting said second beam into third and fourth beams, and wherein said second photodetector comprises third and fourth photodetectors for receiving said third and fourth beams.
Claim 14
Dependent Claim 31 words
The apparatus of claim 11 or 12 wherein said first beam splitter has a dichroic mirror and further including a colour filter mounted between said first beam splitter and said object.
Claim 15
Dependent Claim 35 words
The apparatus in claim 11 or 12 further including a colour filter mounted between said first beam splitter and said object and a second colour filter mounted in the light path of said first beam.
Claim 16
Independent Claim 23 words
The apparatus of any one of claims 11 to 14 wherein at least one of said photodetectors is coupled to a data processor.
Claim 17
Independent Claim 54 words
A system for testing manufactured objects coated with copper oxide comprising: means for applying a copper oxide coating to said objects; means for moving said objects through said copper oxide coating means; means for illuminating said objects with light; and, downstream of said applying means; apparatus according to any one of the preceding claims.
Claim 18
Dependent Claim 13 words
The system of claim 16 wherein said calculating means includes a data processor.
Claim 19
Dependent Claim 32 words
The system of claim 17 wherein said moving means includes means for varying the speed of said items, said moving means being coupled to said data processor for receiving speed control signals.
Claim 20
Dependent Claim 46 words
The system of claim 17 or 18 wherein said copper oxide coating applying means includes means for varying the rate of application of said copper oxide to said objects, said application rate varying means being coupled to said data processor for receiving application rate control signals.
Claim 21
Independent Claim 74 words
A device for determining the thickness of a layer of copper oxide on an object comprising: illumination means producing a light having a known spectral distribution; illuminating light guide means for directing said light from said illumination means onto said object; reflecting light guide means for directing reflections of said light from said object to a first area; and, mounted in said first area, apparatus according to any one of claims 1 to 14.
Claim 22
Dependent Claim 44 words
The device of claim 20 wherein said illumination means includes an incandescent light source and a reflective mirror mounted to direct light from said incandescent light source into said illuminating light guide, and wherein said illuminating and reflecting light guides both include optical fibers.
Claim 23
Dependent Claim 21 words
The device of claim 21 wherein optical fibers of said light guides are randomly disposed in a light guide end part.
Claim 24
Dependent Claim 26 words
The device of claim 21 or 22 further including a hot mirror or cold filter mounted between said incandescent light source and said illuminating light guide.
Claim 25
Independent Claim 96 words
A device for process control comprising: means for performing a manufacturing process involving at least one object; means for determining the quantities of light reflected by said at least one object in at least two wavelength zones; and means, coupled to said determing means, for calculating a value representing the relationship of said quantities of reflected light, for determining a process variable from said value using a predetermined regular correspondence between relationship values and a process variable values, and for sending to said manufacturing process performing means process control signals derived from said determined process variable.
Claim 26
Independent Claim 96 words
A device for process control comprising: means for performing a manufacturing process involving at least one object; means for determining the quantities of light reflected by said at least one object in at least two wavelength zones; and means, coupled to said determing means, for calculating a value representing the relationship of said quantities of reflected light, for determining a process variable from said value using a predetermined regular correspondence between relationship values and a process variable values, and for sending to said manufacturing process performing means process control signals derived from said determined process variable.
Claim 27
Dependent Claim 24 words
The device of claim 23 wherein said quantities determining means has the features defined in any one of claims 4 or 11 to 15.
Claim 28
Dependent Claim 18 words
The device of claim 24 or 25 wherein said calculating, determining and sending means includes a data processor.
Claim 29
Independent Claim 95 words
A method for determing the thickness of a copper oxide coating on an object comprising the steps of: measuring the quantity of light reflected by said object in different wavelength zones; calculating a value for a relationship between said quantities of reflected light, preferably by calculating a value for the ratio of said quantities of reflected light or for the difference between said quantities of reflected light; and comparing said value of said relationship to a predetermined regular corresponence between thickness values and relationship values thereby to determine the thickness of said copper oxide coating.
Claim 30
Independent Claim 95 words
A method for determing the thickness of a copper oxide coating on an object comprising the steps of: measuring the quantity of light reflected by said object in different wavelength zones; calculating a value for a relationship between said quantities of reflected light, preferably by calculating a value for the ratio of said quantities of reflected light or for the difference between said quantities of reflected light; and comparing said value of said relationship to a predetermined regular corresponence between thickness values and relationship values thereby to determine the thickness of said copper oxide coating.
Claim 31
Independent Claim 73 words
A method for manufacturing items coated with copper oxide comprising the steps of: applying a copper oxide coating to said items; measuring the quantities of light reflected from said items in predetermined wavelength zones; calculating a value for the relationship between said quantities of reflected light; and determining the thickness of said copper oxide coating by comparing said value with a predetermined regular correspondence between values for thicknesses and values of said relationship.
Claim 32
Independent Claim 73 words
A method for manufacturing items coated with copper oxide comprising the steps of: applying a copper oxide coating to said items; measuring the quantities of light reflected from said items in predetermined wavelength zones; calculating a value for the relationship between said quantities of reflected light; and determining the thickness of said copper oxide coating by comparing said value with a predetermined regular correspondence between values for thicknesses and values of said relationship.
Claim 33
Independent Claim 90 words
A method for process control comprising the steps of: performing a manufacturing process involving at least one object; measuring the quantity of light reflected by said at least one object in two wavelength zones; calculating a value for the relationship of said quantities of reflected light; determining a process variable from said value using a predetermined regular correspondence between values for said process variables and values of said relationship; forming a process control signal based on said process variable; and using said process control signals to control said manufacturing process.
Claim 34
Independent Claim 90 words
A method for process control comprising the steps of: performing a manufacturing process involving at least one object; measuring the quantity of light reflected by said at least one object in two wavelength zones; calculating a value for the relationship of said quantities of reflected light; determining a process variable from said value using a predetermined regular correspondence between values for said process variables and values of said relationship; forming a process control signal based on said process variable; and using said process control signals to control said manufacturing process.

References Cited (Backward Citations)

DE1623319A1 Cited
US3737237A Cited
DE2329181A1 Cited
DE2400904B2 Cited
DE3136448A1 Cited
DE3248157A1 Cited

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