EP0161612A1
Expired / Lapsed
EP
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Ion microbeam apparatus
Assignee: Hitachi Ltd
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Filing: 1985-05-06
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Granted: —
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Expires: 2005-05-06
Abstract
Abstract An ion microbeam apparatus includes a power supply (14) for a lens (5a) for fine adjustment in addition to a power supply (9) for a lens (5b) for rough adjustment. The power supply (14) for the fine adjustment lens (5a) is supplied with a potential that controls the beam so that it assumes an optimum diameter, responsive to signals from an ion beam detector (12) and a beam deflector (8).
Inventors
- 👤 Tohru Ishitani
- 👤 Hideo Todokoro
- 👤 Yoshimi Kawanami
- 👤 Hifumi Tamura
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 04:20
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/304
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
133 words
An ion microbeam apparatus comprising: an ion source (1, 2, 3), an acceleration power supply for accelerating the ions extracted from said ion source, a first lens (5b) for roughly adjusting the focusing of the accelerated ions, a first power supply (9) for supplying a potential to said first lens (5b), a second lens (5a; 16) which is provided in the proximity of said first lens (5b) and which finely adjusts the focusing of ions, means (8, 12, 15) for measuring the diameter of an ion beam that falls on a sample (7), and a second power supply (14) which supplies a potential to said second lens (5a; 16) responsive to signals from said means (8, 12, 15) for measuring the ion beam diameter, so that the ion beam assumes an optimum diameter.
Claim 2
Dependent Claim
133 words
An ion microbeam apparatus comprising: an ion source (1, 2, 3), an acceleration power supply for accelerating the ions extracted from said ion source, a first lens (5b) for roughly adjusting the focusing of the accelerated ions, a first power supply (9) for supplying a potential to said first lens (5b), a second lens (5a; 16) which is provided in the proximity of said first lens (5b) and which finely adjusts the focusing of ions, means (8, 12, 15) for measuring the diameter of an ion beam that falls on a sample (7), and a second power supply (14) which supplies a potential to said second lens (5a; 16) responsive to signals from said means (8, 12, 15) for measuring the ion beam diameter, so that the ion beam assumes an optimum diameter.
Claim 3
Dependent Claim
45 words
The apparatus of claim 1, wherein said ion source is comprised of an emitter (1), an ion-extracting electrode (2) provided on the side of sample (7), and an ion-extracting power supply (3) which supplies a potential across said emitter (1) and said ion-extracting electrode (2).
Claim 4
Dependent Claim
71 words
The apparatus of claim 1 or 2, wherein said means for measuring the ion beam diameter is comprised of means (8) provided in the proximity of the ion beam for deflecting the ion beam, means (12) for detecting the ion beam, and a beam controller (15) for controlling the ion beam so as to assume an optimum diameter responsive to signals from said deflection means and from said beam detector means.
Claim 5
Independent Claim
24 words
The apparatus of any of claims 1 to 3, wherein said first and second lenses (5b, 5a) constitute portions of an electrostatic lens (5).
Claim 6
Independent Claim
36 words
The apparatus of any of claims 1 to 3, wherein said first lens (5b) is an electrostatic lens, and said second lens (16) is an auxiliary electrode which is provided separately from said electrostatic lens (5b).
Claim 7
Dependent Claim
30 words
The apparatus of claim 4 or 5, wherein the electrodes that constitute the electrostatic lens (5) are maintained at ground potential, except the electrode that constitutes said first lens (5b).
References Cited (Backward Citations)
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