EP0093868A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Electron beam apparatus
Assignee: International Business Machines Corp
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Filing: 1983-03-25
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Granted: —
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Expires: 2003-03-25
Abstract
Abstract he electron potential of an electron beam is switched between different values without moving the focal plane by effectively changing the axial position of the electron source at the same time that the electron potential is changed. The effective change in axial position of the electron source exactly compensates for the altered effectiveness which magnetic lenses have upon an electron beam of altered electron potential such that the final focal plane remains at the same position without adjusting the field strength of any magnetic lens. As shown in the figure a first and second electron beam sources (32, 34) generate electron beams (64,66), which are focused by coil-lenses (48, 50) and deflected by plates (52, 54). Between sources (32, 34) and the electron optical column (20) is beam selector (56). The selector (56) comprises deflection plates (58) and shield (60). When plates (58) are at potential V1 one beam passes through shield (60) and when plates (58) are at potential V2 the other beam passes through the shield. The two beams (64, 66) have different energies.
Inventors
- 👤 Tai-Hon Philip Chang
- 👤 Philip James Coane
- 👤 Fritz-Jurgen Hohn
- 👤 Dieter Paul Kern
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 04:11
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/30; H01J37/3002; H01J37/3007
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
69 words
Electron beam apparatus comprising means for generating alternatively two electron beams having different energies (electron potentials) and common means for focusing the two beams, characterised by the provision of means (56, 63, Vl, V2: 90, 94, 92) effective in operation of increasing the actual or apparent electron source (object) to image (focus) plane distance so that both beams are focussed by the common means in the same image plane.
Claim 2
Dependent Claim
69 words
Electron beam apparatus comprising means for generating alternatively two electron beams having different energies (electron potentials) and common means for focusing the two beams, characterised by the provision of means (56, 63, Vl, V2: 90, 94, 92) effective in operation of increasing the actual or apparent electron source (object) to image (focus) plane distance so that both beams are focussed by the common means in the same image plane.
Claim 3
Dependent Claim
132 words
Electron beam apparatus, comprising means for generating a first electron beam having a first electron potential; means for generating a second electron beam having a second electron potential different from said first electron potential; an electron optical column positioned to receive either of said electron beams; means for determining which electron beam is received by said electron optical column; and the effective source of said second electron beam being effectively positioned at a different axial distance from said electron optical column than the effective source of said first electron beam to compensate for the difference in electron potential, so as to cause said electron optical column automatically to focus either beam onto the same final focal plane without changing the field strength of any electron optical lens in said electron optical column.
Claim 4
Dependent Claim
132 words
Electron beam apparatus, comprising means for generating a first electron beam having a first electron potential; means for generating a second electron beam having a second electron potential different from said first electron potential; an electron optical column positioned to receive either of said electron beams; means for determining which electron beam is received by said electron optical column; and the effective source of said second electron beam being effectively positioned at a different axial distance from said electron optical column than the effective source of said first electron beam to compensate for the difference in electron potential, so as to cause said electron optical column automatically to focus either beam onto the same final focal plane without changing the field strength of any electron optical lens in said electron optical column.
Claim 5
Dependent Claim
74 words
Electron beam apparatus as claimed in Claim 2 wherein said means for generating a first electron beam comprises a first electron beam source, said means for generating a second electron beam comprises a second electron beam source, and said means for determining which electron beam is received by said electron beam column comprises electron beam selection apparatus for directing either of said electron beams along said electron optical column while simultaneously blocking the other.
Claim 6
Dependent Claim
42 words
Electron beam apparatus as claimed in Claim 2 or 3 wherein said first and second electron beam sources are axially positioned at different physical distances from said electron beam column to compensate at least in part for the difference in electron potential.
Claim 7
Dependent Claim
37 words
Electron beam apparatus as claimed in Claim 3 or 4, wherein an individual electron optical lens is associated with each of said electron beam sources to compensate at least in part for the difference in electron potential.
Claim 8
Dependent Claim
38 words
Electron beam apparatus as claimed in Claim 2, wherein said means for generating a first electron beam and said means for generating a second electron beam together comprise an electron beam source having a cathode and four electrodes.
Claim 9
Dependent Claim
73 words
Electron beam apparatus as claimed in Claim 2, wherein said means for generating a first electron beam comprises a first electrode for emitting electrons, a second electrode biased more positively than said first electrode for accelerating said emitted electrons to form said first beam, and a third electrode between said first and second electrodes and biased more negatively than said first electrode for controlling the amount of current in said first electron beam.
Claim 10
Dependent Claim
119 words
Electron beam apparatus as claimed in Claim 7, wherein said means for generating a second electron beam comprises a fourth electrode for further accelerating the electrons of said first beam thereby to form said second beam, said means for determining which electron beam is received by said electron optical column comprising means for biasing said fourth electrode either at a predetermined more positive potential than said second electrode or at the same potential as said second electrode, said first beam being received by said column when said fourth electrode is at the same potential as said second electrode and said second beam being received by said column when said fourth electrode is biased at said predetermined more positive potential.
Claim 11
Dependent Claim
46 words
Electron beam apparatus as claimed in Claim 8 wherein said positioning means comprises a fifth electrode between said second and fourth electrodes for focussing said second electron beam differently than said first electron beam to compensate at least in part for the difference in electron potential.
Claim 12
Dependent Claim
43 words
Electron beam apparatus as claimed in any one of claims 1 to 9, wherein said electron beams have different numbers of intermediate focal points before reaching the same final focal plane to compensate at least in part for the difference in electron potential.
References Cited (Backward Citations)
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