Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
110 words
A process for ion nitriding aluminum or aluminum alloy as an article to be treated, comprising the steps of disposing said article to be treated in a sealed vessel; removing the residual oxygen gas in said vessel; heating the surface of said article to a prescribed nitriding temperature by introducing a heating gas into said vessel and causing discharge therein; activating the surface of said article by introducing an activating gas into said vessel and causing discharge therein; and ion nitriding the surface of said article by introducing a nitriding gas into said vessel and causing discharge therein, thereby forming an aluminum nitride layer having high hardness and wear resistance.
Claim 2
Dependent Claim
110 words
A process for ion nitriding aluminum or aluminum alloy as an article to be treated, comprising the steps of disposing said article to be treated in a sealed vessel; removing the residual oxygen gas in said vessel; heating the surface of said article to a prescribed nitriding temperature by introducing a heating gas into said vessel and causing discharge therein; activating the surface of said article by introducing an activating gas into said vessel and causing discharge therein; and ion nitriding the surface of said article by introducing a nitriding gas into said vessel and causing discharge therein, thereby forming an aluminum nitride layer having high hardness and wear resistance.
Claim 3
Dependent Claim
29 words
A process according to Claim 1, wherein said activating gas is at least one rare gas selected from the group consisting of helium, neon, argon, kripton, xenon and radon.
Claim 4
Dependent Claim
28 words
A process according to Claim 2, wherein said discharge in the activating step is one of direct current glow discharge, alternating current glow discharge and ion beam sputtering.
Claim 5
Dependent Claim
33 words
A process according to Claim 3, wherein the pressure in said vessel in the activating step is in the range of from 10- 3 to 5 Torr (1.33·10 -6 to 6.67·10 -3 bar).
Claim 6
Dependent Claim
25 words
A process according to Claim 2, wherein said nitriding gas is selected from nitrogen gas, ammonia gas and a mixed gas of nitrogen and hydrogen.
Claim 7
Dependent Claim
26 words
A process according to Claim 5, wherein said discharge in the ion nitriding step is one of direct current glow discharge and alternating current glow discharge.
Claim 8
Dependent Claim
34 words
A process according to Claim 6, wherein the pressure in said vessel in the ion nitriding step is in the range of from 10- 1 to 20 Torr (1.33·10 -4 to 2.67·10 -2 bar).
Claim 9
Dependent Claim
22 words
A process according to Claim 1, wherein the ion nitriding step is carried out at a temperature ranging from 300 to 550°C.
Claim 10
Dependent Claim
55 words
A process according to Claim 1, wherein said residual oxygen gas is removed by repeating a series of the reduction of pressure in said vessel and the subsequent replacement of the residual oxygen gas by a gas introduced therein, and said ion nitriding step is carried out at a temperature ranging from 300 to 550°C.
Claim 11
Dependent Claim
34 words
A process according to Claim 9, wherein said reduction of pressure is carried out by a vacuum pump selected from a rotary pump and a combination of a rotary pump and a diffusion pump.
Claim 12
Dependent Claim
38 words
A process according to Claim 10, wherein said introduced gas in the removing step is one of hydrogen gas and a rare gas,.and said ion nitriding step is carried out at a temperature ranging from 300 to 550°C.
Claim 13
Dependent Claim
41 words
A process according to Claim 2, wherein said heating gas in the heating step is selected from hydrogen gas, nitrogen gas and a rare gas, and said ion nitriding step is carried out at a temperature ranging from 300 to 550°C.
Claim 14
Dependent Claim
25 words
A process according to Claim 13, wherein said discharge in the heating step is one of direct current glow discharge and alternating current glow discharge.