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Method for preparing highly heat-conductive substrate and copper wiring sheet usable in the same

Assignee: Toshiba Corp
•
Filing: 1985-02-05
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Granted: —
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Expires: 2005-02-05
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Abstract

Abstract A method for preparing a highly heat conductive substrate which comprises interposing an active layer with a thickness of 0.5 to 10 µm comprising silver (Ag) and an active metal selected from the group consisting of titanium, zirconium and hafnium, and also copper (Cu) optionally, between an aluminium nitride (AIN) substrate and a copper member; and joining said aluminium nitride (AIN) substrate and said copper (Cu) member with each other by heating. A copper wiring sheet comprising the above active layer is also usable in the method.

Inventors

  • 👤 Masako Nakahashi
  • 👤 Makoto Shirokane
  • 👤 Tatsuo Yamazaki
  • 👤 Hisashi Yoshino
  • 👤 Akio Hori
  • 👤 Hiromitsu Takeda

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-04 16:36
CPC Classifications
C; C04; C04B; C04B35/00; C04B35/622; C04B35/64; C04B35/645; B; B23; B23K; B23K35/00; B23K35/22; B23K35/24; B23K35/26; B23K35/268; B32; B32B; B32B15/00; B32B15/01; B32B15/018; C04B37/00; C04B37/02; C04B37/023; C04B37/026; C22; C22C; C22C11/00; C22C11/06; C22C14/00; C22C5/00; C22C5/06; C22C9/00; H; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K3/00; H05K3/38; H10; H10W; H10W40/00; H10W40/01; H10W40/03; H10W40/037; H10W40/20; H10W40/25; H10W40/255; H10W70/00; H10W70/01; H10W70/02; H10W70/60; H10W70/67; H10W70/68; H10W70/6875; H10W72/00; H10W72/30; H10W99/00; B32B15/02; B32B15/20; B32B2250/00; B32B2250/44; B32B2255/00; B32B2255/20; B32B2255/205; B32B2307/00; B32B2307/30; B32B2307/302; B32B2307/304; B32B2307/70; B32B2307/732; B32B2457/00; B32B2457/14; B32B3/00; B32B3/10; B32B9/00; B32B9/005; B32B9/04; B32B9/041; C04B2235/00; C04B2235/65; C04B2235/658; C04B2235/6581; C04B2237/00; C04B2237/02; C04B2237/12; C04B2237/122; C04B2237/125; C04B2237/126; C04B2237/127; C04B2237/30; C04B2237/32; C04B2237/36; C04B2237/366; C04B2237/40; C04B2237/407; C04B2237/50; C04B2237/62; C04B2237/70; C04B2237/708; C04B2237/72; C04B2237/76; C04B2237/86

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 67 words
A method for preparing a highly heat conductive substrate which comprises interposing an active layer with a thickness of 0.5 to 10 µm comprising silver and an active metal selected from the group consisting of titanium, zirconium and hafnium, and also copper optionally, between an aluminium nitride substrate and a copper member; and joining said aluminium nitride substrate and said copper member with each other by heating.
Claim 2
Independent Claim 67 words
A method for preparing a highly heat conductive substrate which comprises interposing an active layer with a thickness of 0.5 to 10 µm comprising silver and an active metal selected from the group consisting of titanium, zirconium and hafnium, and also copper optionally, between an aluminium nitride substrate and a copper member; and joining said aluminium nitride substrate and said copper member with each other by heating.
Claim 3
Dependent Claim 48 words
The method according to Claim 1, wherein said active layer comprises a silver layer with a thickness of 0.2 to 9 µm, a layer of said active metal with a thickness of 0.1 to 5 um and a copper layer with a thickness of 0 to 9 µm.
Claim 4
Dependent Claim 13 words
The method according to Claim 2, wherein said active metal layer comprises titanium.
Claim 5
Dependent Claim 51 words
The method according to Claim 1, wherein a Cu wiring sheet having said active layer provided on the surface of said copper member is joined to said aluminuim nitride substrate in such a manner so that the active layer on the copper member may be in contact with the AlN substrate.
Claim 6
Dependent Claim 48 words
The method according to Claim 4, wherein said active layer comprises a silver layer with a thickness of 0.2 to 9 µm, a layer of said active metal with a thickness of 0.1 to 5 µm and a copper layer with a thickness of 0 to 9 um.
Claim 7
Dependent Claim 13 words
The method according to Claim 5, wherein said active metal layer comprises titanium.
Claim 8
Dependent Claim 46 words
A Cu wiring sheet which comprises having an active layer with a thickness of 0.5 to 10 µm comprising silver and an active metal selected from the group consisting of titanium, zirconium and hafnium, and also copper optionally provided on the surface of a copper sheet.
Claim 9
Dependent Claim 46 words
A Cu wiring sheet which comprises having an active layer with a thickness of 0.5 to 10 µm comprising silver and an active metal selected from the group consisting of titanium, zirconium and hafnium, and also copper optionally provided on the surface of a copper sheet.
Claim 10
Dependent Claim 48 words
The sheet according to Claim 7, wherein said active layer comprises a silver layer with a thickness of 0.2 to 9 um, a layer of said active metal with a thickness of 0.1 to 5 um and a copper layer with a thickness of 0 to 9 um.
Claim 11
Dependent Claim 13 words
The sheet according to Claim 8, wherein said active metal layer comprises titanium.

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