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Semiconductor device structure including a dielectrically-isolated insulated-gate transistor

Assignee: General Electric Co
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Filing: 1984-10-18
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Granted: —
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Expires: 2004-10-18
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Abstract

Abstract An insulated-gate transistor is dielectrically isolated from other semiconductor devices in a monolithic semiconductor device structure. The insulated-gate transistor, in one form, includes, in successively adjoining relationship, a source region, a base region, a voltage-supporting region and a minority carrier injection region. The interfaces between selected, adjacent pairs of these device regions are oriented in their entireties orthogonal to a major surface of the semiconductor device structure that is planar. As a consequence, the insulated-gate transistor achieves a high current capacity as well as high voltage operation without the need for electric field rings. The insulated-gate transistor, in another form, constitutes a bidirectional device with the interfaces, between adjacent device regions being oriented as in the foregoing insulated gate transistor so as to also achieve the same advantages.

Inventors

  • 👤 Bantval Jayant Baliga
  • 👤 Tat-Sing Paul Chow

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-29 13:05
CPC Classifications
H; H10; H10D; H10D12/00; H10D12/411; H10D12/421; H10D30/00; H10D30/60; H10D86/00; H10D86/201; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/019; H10W10/10

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 139 words
A semiconductor device structure comprising a substrate, a plurality of insulating tubs disposed on said substrate, and, disposed in each insulating tub, at least one respective semiconductor device, said insulating tubs dielectrically spacing the respective semiconductor device therein from the semiconductor devices in all other insulating tubs and also from the substrate, said semiconductor device structure further comprising: an insulated-gate transistor constituting one of said respective semiconductor devices and including, in successively adjoining relationship, a source region, a base region, a voltage-supporting region, and a minority-carrier injection region, each of said regions extending into said semiconductor device structure from a major, planar surface; said minority carrier injection region and said voltage-supporting region defining an interface therebetween, the entirety of which interface is oriented transverse to said major surface so as to enhance the current capacity of said insulated-gate transistor.
Claim 2
Dependent Claim 139 words
A semiconductor device structure comprising a substrate, a plurality of insulating tubs disposed on said substrate, and, disposed in each insulating tub, at least one respective semiconductor device, said insulating tubs dielectrically spacing the respective semiconductor device therein from the semiconductor devices in all other insulating tubs and also from the substrate, said semiconductor device structure further comprising: an insulated-gate transistor constituting one of said respective semiconductor devices and including, in successively adjoining relationship, a source region, a base region, a voltage-supporting region, and a minority-carrier injection region, each of said regions extending into said semiconductor device structure from a major, planar surface; said minority carrier injection region and said voltage-supporting region defining an interface therebetween, the entirety of which interface is oriented transverse to said major surface so as to enhance the current capacity of said insulated-gate transistor.
Claim 3
Dependent Claim 52 words
The semiconductor device structure of claim 1 wherein said voltage-supporting region and said base region define a second interface therebetween, said second interface being oriented in its entirety transverse to said major surface so as to permit high voltage operation of said insulated-gate transistor without the need for electric field rings therein.
Claim 4
Dependent Claim 24 words
The semiconductor device structure of claim 2 wherein said first-mentioned and said second interfaces are oriented in their entireties orthogonal to said major surface.
Claim 5
Dependent Claim 33 words
The semiconductor device structure of claim 1 wherein said insulating tub in which said insulated-gate transistor is disposed shares a common insulating portion with at least another of said plurality of insulating tubs.
Claim 6
Dependent Claim 31 words
The semiconductor device structure of claim 4 wherein, in said insulated-gate transistor, said source region, said base region, said voltage-supporting region and said minority-carrier injection region each comprise silicon semiconductor material.
Claim 7
Dependent Claim 29 words
The semiconductor device structure of claim 1 wherein said insulating tub in which said insulated-gate transistor is disposed is spaced from the remainder of said plurality of insulating tubs.
Claim 8
Dependent Claim 30 words
The semiconductor device structure of claim 6 wherein, in said insulated-gate-transistor, said source region, said base region, said voltage-supporting region and said minority-carrier injection region each comprise silicon semiconductor material.
Claim 9
Dependent Claim 177 words
A semiconductor device structure compris- i n g a substrate, a plurality of insulating tubs disposed on said substrate, and, disposed in each insulating tub, at least one respective semiconductor device, said insulating tubs dielectrically spacing the respective semiconductor device therein from the semiconductor devices in all other insulating tubs and also from the substrate, said semiconductor device structure further comprising: a bidirectional insulated-gate transistor constituting one of said respective semiconductor devices and including, in successively adjoining relationship, a first minority carrier injection region, a first base region, a voltage-supporting region, a second base region, and a second minority carrier injection region, each of said regions extending into said semiconductor device structure from a major, planar surface; said first minority carrier injection region and said first base region defining a first interface therebetween and said second minority carrier injection region and said second base region defining a second interface therebetween, said first and second interfaces being oriented in their entireties transverse to said major surface so as to enhance the current capacity of said bidirectional insulated-gate transistor.
Claim 10
Dependent Claim 177 words
A semiconductor device structure compris- i n g a substrate, a plurality of insulating tubs disposed on said substrate, and, disposed in each insulating tub, at least one respective semiconductor device, said insulating tubs dielectrically spacing the respective semiconductor device therein from the semiconductor devices in all other insulating tubs and also from the substrate, said semiconductor device structure further comprising: a bidirectional insulated-gate transistor constituting one of said respective semiconductor devices and including, in successively adjoining relationship, a first minority carrier injection region, a first base region, a voltage-supporting region, a second base region, and a second minority carrier injection region, each of said regions extending into said semiconductor device structure from a major, planar surface; said first minority carrier injection region and said first base region defining a first interface therebetween and said second minority carrier injection region and said second base region defining a second interface therebetween, said first and second interfaces being oriented in their entireties transverse to said major surface so as to enhance the current capacity of said bidirectional insulated-gate transistor.
Claim 11
Dependent Claim 70 words
The semiconductor device structure of claim 7 wherein said voltage-supporting region and said first base region define a third interface therebetween and said voltage-supporting region and said second base region define a fourth interface therebetween, said third and fourth interfaces being oriented in their entireties transverse to said major surface so as to permit high voltage operation of said bidirectional insulated-gate transistor without the need for electric field rings therein.
Claim 12
Dependent Claim 25 words
The semiconductor device structure of claim 9 wherein said first, second, third and fourth interfaces are oriented in their entireties orthogonal to said major surface.
Claim 13
Dependent Claim 34 words
The semiconductor device structure of claim 8 wherein said insulating tub in which said bidirectional insulated-gate transistor is disposed shares a common insulating portion with at least another of said plurality of insulating tubs.
Claim 14
Dependent Claim 36 words
The semiconductor device structure of claim 11 wherein, in said bidirectional insulated-gate transistor, said first and second minority carrier injection regions, said first and second base regions and said voltage-supporting region each comprise silicon semiconductor material.
Claim 15
Dependent Claim 30 words
The semiconductor device structure of claim 8 wherein said insulating tub in which said bidirectional insulated-gate transistor is disposed is spaced from the remainder of said plurality of insulating tubs.
Claim 16
Dependent Claim 36 words
The semiconductor device structure of claim 13 wherein, in said bidirectional insulated-gate transistor, said first and second minority carrier injection regions, said first and second base regions and said voltage-supporting region each comprise silicon semiconductor material.

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