Patent EP0134573A2 successfully refreshed from Google Patents.
EP0134573A2
Expired / Lapsed
EP
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Precision probe positioner
Assignee: International Business Machines Corp
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Filing: 1984-08-29
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Granted: —
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Expires: 2004-08-29
Abstract
Abstract This precision probe uses optical feedback in the X and Y dimensions to locate a microprobe (3) in the airspace over a test pad (1-2), and uses pressure feedback in the Z dimension to control Z approach and penetration. The precision probe inspects a target (1-1) by coarse positioning a guided microprobe to make contact at a selected probe pad (1-2). Guidance is optical, by light reflected, from a target by a dual mirror focusing system of concave mirror (4) and flat mirror (5), to a transducer. Up and down Z positioning of the microprobe is carried out by a shaft positioned by an air diaphragm (9) which is driven to the target by applied air pressure delivered via an air tube (10), providing the desired penetration of microprobe to microtarget. The probe is retracted by atmospheric pressure. In operation, the microprobe is coarsely positioned by the computer (2) and the coarse positioner in the air space above the X-Y coordinates for the probe pad. but tolerances may be such that the microprobe is not precisely positioned within the airspace periphery of the probe pad. Assuming that the precision required is greater than the tolerances available or desired, fine positioning is required. Fine positioning with guidance sensing, using computer preparation of fine positioning control signals and control signal responsive mechanisms built into the microprobe, accomplishes the fine positioning. Precision X-Y positioning is carried out by the voice coil microactuators (11,13), respectively in response to computer control signals delivered via the control cable (14).
Inventors
- 👤 Ferdinand Hendriks
- 👤 Russell Highsmith Taylor
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-24 03:05
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/06705; B; B25; B25J; B25J19/00; B25J19/02; B25J19/021; B25J9/00; B25J9/10; B25J9/1005; B25J9/1015; B25J9/14; G05; G05D; G05D3/00; G05D3/12; G05D3/20
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
370 words
A precision probe system for probinq a target remotely distinguishable from a background, the probe system having coarse X-Y-Z positioning mechanism, fine X-Y-Z positioning mechanism, effector mechanism and control mechanism, characterized by a) effector carriaqe means (12) coarsely positionable by the course X-Y-Z positioning mechanism (2) in the general vicinity of a microtarget; b) microprobe means having a probe carrier (7) and probe (3) arranged with limited X-Y-Z frocdom in said offector carriage means, said probe having a probe tip and a probe mounting end opposite said probe tip along an axis; c) remote sensing means (6), mounted in fixed relationship to said microprobe means, for providing a recognition signal at the control mechanism when said microprobe means is aligned with a microtarget (1-1, 1-2); d) radiation focusing means (4,5), substantially coaxial with said microprobe means, operative to transmit a physical representation from probe tip to probe mounting end of said probe, for providing a physical represent ation to said remote sensing means for use in sensing a target in line with said microprobe means; e) X transducer means (11) operatively associated with said probe carrier to provide fine positioning for said probe carrier in the X dimension; f) Y transducer means (13) operatively associated with said probe carrier to provide fine positioning for said probe carrier in the Y dimension; g) Z transducer means (9) operatively associated with said probe carrier to provide fine positioning for said probe carrier in the Z dimension, having controllable position until impeded in travel in the Z dimension and, when impeded, having controllable pressure; h) microprobe mounting means (7) attaching said probe at its probe mounting end to said microprobe carrier means; i) X-Y control connection means (14), responsive to the control mechanism, for providing control signals to said X fine positioning means and to said Y fine positioning means, to position said probe within the microtarget airspace; j) Z control connection means, (10), responsive to the control mechanism, for providing control signals to said Z fine positioning means, to. transport said probe tip to contact the surface of the selected microtarget and apply probe contact pressure within a specified range, and selectively to withdraw said probe from contact with the selected microtarget.
Claim 2
Dependent Claim
370 words
A precision probe system for probinq a target remotely distinguishable from a background, the probe system having coarse X-Y-Z positioning mechanism, fine X-Y-Z positioning mechanism, effector mechanism and control mechanism, characterized by a) effector carriaqe means (12) coarsely positionable by the course X-Y-Z positioning mechanism (2) in the general vicinity of a microtarget; b) microprobe means having a probe carrier (7) and probe (3) arranged with limited X-Y-Z frocdom in said offector carriage means, said probe having a probe tip and a probe mounting end opposite said probe tip along an axis; c) remote sensing means (6), mounted in fixed relationship to said microprobe means, for providing a recognition signal at the control mechanism when said microprobe means is aligned with a microtarget (1-1, 1-2); d) radiation focusing means (4,5), substantially coaxial with said microprobe means, operative to transmit a physical representation from probe tip to probe mounting end of said probe, for providing a physical represent ation to said remote sensing means for use in sensing a target in line with said microprobe means; e) X transducer means (11) operatively associated with said probe carrier to provide fine positioning for said probe carrier in the X dimension; f) Y transducer means (13) operatively associated with said probe carrier to provide fine positioning for said probe carrier in the Y dimension; g) Z transducer means (9) operatively associated with said probe carrier to provide fine positioning for said probe carrier in the Z dimension, having controllable position until impeded in travel in the Z dimension and, when impeded, having controllable pressure; h) microprobe mounting means (7) attaching said probe at its probe mounting end to said microprobe carrier means; i) X-Y control connection means (14), responsive to the control mechanism, for providing control signals to said X fine positioning means and to said Y fine positioning means, to position said probe within the microtarget airspace; j) Z control connection means, (10), responsive to the control mechanism, for providing control signals to said Z fine positioning means, to. transport said probe tip to contact the surface of the selected microtarget and apply probe contact pressure within a specified range, and selectively to withdraw said probe from contact with the selected microtarget.
Claim 3
Dependent Claim
27 words
A precision probe system according to Claim 1, wherein said remote sensing means are optical sensing means and wherein said radiation focusing means are optical focusing means.
Claim 4
Dependent Claim
37 words
A precision probe system according to Claim 1, wherein said Z fine positioning means comprises an air bellows, and said Z control connection means comprises a reversible controlled air pressure-vacuum transducer and variable setting maximum pressure means.
Claim 5
Dependent Claim
77 words
A precision probe system according to Claim 2, wherein said optical sensing means comprises dual mirror means (4,5) including a concave reflector (4) mounted on said probe carrier centered about an extension of the axis of said probe, inside said basket, and including flat reflector (15) surface arrayed parallel to the axis of said probe at its probe mounting end, positioned in line with the axis of said microprobe means in operative juxtaposition with said phototransducer means.
Claim 6
Dependent Claim
40 words
5 . A precision probe system according to Claim 2, wherein said optical sensing means comprises an internal lumen (3-1), substantially axial to said probe, extending from probe tip to probe mounting end in operative juxtaposition with said phototransducer means.
References Cited (Backward Citations)
No citation records indexed.
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