Photosolubilizable composition

Claim 2

A photosolubilizable composition containing a first compound capable of producing an acid by irradiation by photolysis and a second compound having at least one silyl ether or silyl ester group capable of being decomposed by an acid selected from a Compound (a) and a Compound (b), whose solubility in a developing solution is increased due to the action of an acid, wherein said Compound (a) is a compound including at least one silyl ether group represented by formula (I): and said Compound (b) is a compound including at least one silyl ester group represented by formula (II):

Claim 3

A photosolubilizable composition as in Claim 1, wherein said Compound (a) is a Compound (c) having at least one silyl ether group of said formula (I) and at least one hydrophilic group.

Claim 4

A photosolubilizable composition as in Claim 1, wherein the Compound (a) is a compound including at least one silyl ether group represented by formula (Ia) or (Ib): wherein R 11 represents an m 1 -valent aliphatic or aromatic hydrocarbon residue; R 12 , R 13 , and R 14 each represents a hydrogen atom, an alkyl group, an alkenyl group, an aryl group, an aralkyl group, a halogen atom, or -OR 16 ; R 15 represents a divalent aliphatic or aromatic hydrocarbon residue; R 16 represents an alkyl group, an aryl group, or an aralkyl group; or R 15 and R 16 may combine with each other to form a part of an aliphatic or aromatic ring; m 1 and n 1 each represents a positive integer; and a 1 and bleach represents 0 or 1.

Claim 5

A photosolubilizable composition as in any of claims 1 to 3, wherein said Compound (b) is a compound including at least one silyl ester group represented by formula (IIa) or (IIb): wherein R 21 represents an m 2- valent aliphatic or aromatic hydrocarbon residue; R 22 , R23, and R 24 each represents a hydrogen atom, an alkyl group, an alkenyl group, an aryl group, an aralkyl group, an alkoxy group, a halogen atom, or R 25 and R 26 each represents a divalent aliphatic or aromatic hydrocarbon residue; R 27 represents an alkyl group, an aryl group, or an aralkyl group; m 2 and n 2 each represents a positive integer; and a 2 and b 2 each represents 0 or 1.

Claim 6

A photosolubilizable composition as in Claim 2, wherein said Compound (c) is a compound including at least one silyl ether group represented by formula (Ia) or (Ib): wherein R 11 represents an m l -valent aliphatic or aromatic hydrocarbon residue; R12, R 13 , and R 14 each represents a hydrogen atom, an alkyl group, an alkenyl group, an aryl group, an aralkyl group, a halogen atom, or - OR 16 ; R 15 represents a divalent aliphatic or aromatic hydrocarbon residue; R 16 represents an alkyl group, an aryl group, or an aralkyl group; or R 15 and R 16 may combine with each other to form a part of an aliphatic or aromatic ring; m 1 and n 1 each represents a positive integer; and a 1 and b 1 each represents 0 or 1, and at least one hydrophilic group represented by one of the following formulae: and wherein ℓ 3 represents an integer of 1 to 4; m 3 and n 3 each represents an integer of 0 or more; and R 31 represents an alkyl group or a phenyl group.

Claim 7

A photosolubilizable composition as in Claim 5, wherein Compound (c) includes the group (̵CH 2 CH 2 -O)̵ n3 as the hydrophilic group.

Claim 8

A photosolubilizable composition as in any of Claims 1 to 6, wherein said first compound capable of producing an acid is orthoquinonediazidosulfonyl chloride, an s-triazine derivative substituted by a halomethyl group, or an oxadiazole derivative substituted by a halomethyl group.

Claim 9

A photosolubilizable composition as in any of Claims 1 to 7, wherein the ratio of the first compound to the second compound is from 0.001/1 to 2/1.

Claim 10

A photosolubilizable composition as in Claim 8, wherein the ratio of the first compound to the second compound is from 0.02/1 to 0.8/1.