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EP0115098A1 Expired / Lapsed EP ⏱️ 0.0 years remaining

Lateral DMOS transistor device having an injector region

Assignee: Koninklijke Philips NV
•
Filing: 1983-12-15
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Granted: —
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Expires: 2003-12-15
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Abstract

Abstract A lateral DMOS transistor (1) includes a surface-adjoining injector region (32) between the channel region (16) and the drain region (20) of the device. This injector region (32) is connected to an external source of potential and serves to substantially decrease the on-resistance of the device by injecting minority carriers into the drift region when the device is in the "on" state. This improvement in on-resistance is obtained without degrading the breakdown voltage characteristics of the transistor.

Inventors

  • 👤 Barry Mana Singer
  • 👤 Sel Colak
  • 👤 Edward Henry Stupp

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-30 14:47
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/60; H10D30/64; H10D30/65; H10D64/00; H10D64/20; H10D64/27; H10D62/00; H10D62/10; H10D62/102; H10D62/103; H10D62/105; H10D62/109

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 244 words
A lateral DMOS transistor having a semiconductor substrate of a first conductivity type, an epitaxial surface layer of a second conductivity type opposite to that of the first on a first major surface of said substrate, a surface-adjoining channel region of said first conductivity type in said epitaxial layer and forming a p-n junction therewith, a surface-adjoining source region of said second conductivity type in said channel region, a surface-adjoining drain region of said second conductivity type in said epitaxial layer and spaced apart from said channel region, an insulating layer on said surface layer and covering at least that portion of said channel region located between said source region and said drain region, a gate electrode on said insulating layer, over said portion of the channel region and electrically isolated from said surface layer, source and drain electrodes connected respectively to the source and drain regions of said transistor, and a substrate electrode on a second major surface of said substrate opposite to the first, characterized in that a surface-adjoining injector region of said first conductivity type is provided in said epitaxial surface layer of the second conductivity type and forms a p-n junction therewith, said injector region being located between said channel region and said drain region and closer to said channel region than said drain region, and that an injector electrode is electrically connected to said injector region so that an external voltage can be applied directly to said injector region.
Claim 2
Dependent Claim 244 words
A lateral DMOS transistor having a semiconductor substrate of a first conductivity type, an epitaxial surface layer of a second conductivity type opposite to that of the first on a first major surface of said substrate, a surface-adjoining channel region of said first conductivity type in said epitaxial layer and forming a p-n junction therewith, a surface-adjoining source region of said second conductivity type in said channel region, a surface-adjoining drain region of said second conductivity type in said epitaxial layer and spaced apart from said channel region, an insulating layer on said surface layer and covering at least that portion of said channel region located between said source region and said drain region, a gate electrode on said insulating layer, over said portion of the channel region and electrically isolated from said surface layer, source and drain electrodes connected respectively to the source and drain regions of said transistor, and a substrate electrode on a second major surface of said substrate opposite to the first, characterized in that a surface-adjoining injector region of said first conductivity type is provided in said epitaxial surface layer of the second conductivity type and forms a p-n junction therewith, said injector region being located between said channel region and said drain region and closer to said channel region than said drain region, and that an injector electrode is electrically connected to said injector region so that an external voltage can be applied directly to said injector region.
Claim 3
Dependent Claim 44 words
A lateral DMOS transistor as in calim 1 wherein the doping concentration N and thickness d of said epitaxial surface layer are selected in accordance with the REduced SURface Field (RESURF) technique so that approximately N x d = 10 12 atoms/cm 2 .
Claim 4
Dependent Claim 44 words
A lateral DMOS transistor as in calim 1 wherein the doping concentration N and thickness d of said epitaxial surface layer are selected in accordance with the REduced SURface Field (RESURF) technique so that approximately N x d = 10 12 atoms/cm 2 .
Claim 5
Dependent Claim 27 words
A lateral DMOS transistor as in claim 1, wherein said surface- - adjoining injector region is located adjacent to, but not in contact with, said channel region.
Claim 6
Dependent Claim 31 words
A lateral DMOS transistor as in claim 1, wherein said injector region has a thickness of about one micrometer and a surface doping level of about 10 19 atoms/cm 3 .

References Cited (Backward Citations)

US4007478A Cited
FR2458907A1 Cited
US4300150A Cited

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