§
Luxuse
Patent Intelligence
Sign In
Patent EP0101867A2 successfully refreshed from Google Patents.
← Back to Patent Explorer
EP0101867A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Plasma ion source

Assignee: Hitachi Ltd
•
Filing: 1983-07-15
•
Granted: —
•
Expires: 2003-07-15
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract A plasma ion source according to the present invention is constructed of a discharge chamber (3) in which a plasma is produced by plasma generation means, an acceleration electrode (4) which is disposed in adjacency to the discharge chamber in order to extract ions from the produced plasma, a deceleration electrode (5) which is disposed in adjacency to the acceleration electrode in order to decelerate the extracted ions, a ground electrode (6) which is disposed in adjacency to the deceleration electrode, an insulator container (8) which is disposed so as to surround the discharge chamber and the respective electrodes, and a shield ring electrode (12) of ground potential which is disposed in the vicinity of the deceleration electrode and along an inner wall surface of the insulator container in order to prevent any discharge from arising across the deceleration electrode and the ground electrode.

Inventors

  • 👤 Noriyuki Sakudo
  • 👤 Osami Okada
  • 👤 Susumu Ozasa
  • 👤 Katsumi Tokiguchi
  • 👤 Hidemi Koike
  • 👤 Shunroku Taya
  • 👤 Mitsunori Komatsumoto
  • 👤 Mitsuo Komatsu

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-07 13:46
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/16; H01J27/022

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 140 words
A plasma ion source comprising a discharge chamber (3) in which a plasma is produced by plasma generation means, an acceleration electrode (4) which is disposed in adjacency to said discharge chamber in order to extract ions from the produced plasma, a deceleration electrode (5) which is disposed in adjacency to said acceleration electrode in order to decelerate the extracted ions, a ground electrode (6) which is disposed in adjacency to said deceleration electrode, a container (8) made of an insulator which is disposed so as to surround said discharge chamber and the respective electmdes, and a shield ring electrode (12) of ground potential which is disposed in the vicinity of said deceleration electrode and along an inner wall surface of the insulator container in order to prevent any discharge from arising across said deceleration electrode and said ground electrode.
Claim 2
Dependent Claim 140 words
A plasma ion source comprising a discharge chamber (3) in which a plasma is produced by plasma generation means, an acceleration electrode (4) which is disposed in adjacency to said discharge chamber in order to extract ions from the produced plasma, a deceleration electrode (5) which is disposed in adjacency to said acceleration electrode in order to decelerate the extracted ions, a ground electrode (6) which is disposed in adjacency to said deceleration electrode, a container (8) made of an insulator which is disposed so as to surround said discharge chamber and the respective electmdes, and a shield ring electrode (12) of ground potential which is disposed in the vicinity of said deceleration electrode and along an inner wall surface of the insulator container in order to prevent any discharge from arising across said deceleration electrode and said ground electrode.
Claim 3
Dependent Claim 41 words
A plasma ion source according to Claim 1, wherein said plasma generation means is constructed of means for producing the plasma by exerting a microwave electric field and a magnetic field on a feed gas introduced into said discharge chamber (3).
Claim 4
Dependent Claim 32 words
A plasma ion source according to Claim 1 or 2, wherein said shield ring electrode (12") has a spring (18) for contacting with said inner wall surface of said insulator container (8).
Claim 5
Dependent Claim 51 words
A plasma ion source according to any of Claims 1 to 3, wherein said shield ring electrode (12 1 ) is so constructed that a distance between a surface thereof opposing to said insulator container (8) and an inner surface of said insulator container increases gradually toward said acceleration electrode (4).

References Cited (Backward Citations)

No citation records indexed.

USPTO Annuity & Maintenance Windows

Maintenance schedule is calculated for granted US utility patents.

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag