Patent US1470797A successfully refreshed from Google Patents.
Patent EP0100206A1 successfully refreshed from Google Patents.
EP0100206A1
Expired / Lapsed
EP
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Apparatus for treating an article in a vacuum chamber
Assignee: Oerlikon USA Holding Inc
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Filing: 1983-07-21
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Granted: —
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Expires: 2003-07-21
Abstract
Abstract 57 An apparatus for controlling the temperature of a semiconductor wafer in a plasma or vacuum environment comprises a wafer support in the form of a head having a first fluid heat exchanger for selectively cooling or heating the head, a conformat on the upper surface of the head for forming an hermetic seal with a wafer pressed against the upper surface, and means coating with a wafer on the upper surface to form a second fluid heat exchanger for cooling the wafer, and clamp means for clamping a wafer against the conformat.
Inventors
- 👤 E. James Egerton
- 👤 William E. Millikin
- 👤 Richard L. Baril
- 👤 Walter R. Cook
- 👤 Alex Nef
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-27 15:55
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0434; C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/541; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
74 words
Apparatus for treating an article in a vacuum chamber comprising support means having an article-supporting surface, mechanical means for releasably clamping an article to be treated against said article-supporting surface, means for circulating a first cooling fluid between said article-supporting surface and an article which is clamped to said article-supporting surface, and means for circulating a second cooling fluid through portions of said support means so as to remove heat from said support means.
Claim 2
Dependent Claim
74 words
Apparatus for treating an article in a vacuum chamber comprising support means having an article-supporting surface, mechanical means for releasably clamping an article to be treated against said article-supporting surface, means for circulating a first cooling fluid between said article-supporting surface and an article which is clamped to said article-supporting surface, and means for circulating a second cooling fluid through portions of said support means so as to remove heat from said support means.
Claim 3
Dependent Claim
13 words
Apparatus according to Claim 1, wherein said support means is a first electrode.
Claim 4
Dependent Claim
23 words
Apparatus according to Claim 2, wherein said first electrode has a longitudinal axis and said article supporting surface extends transversely of said axis.
Claim 5
Dependent Claim
33 words
Apparatus according to Claim 3, further including a second electrode spaced from and confronting said article-supporting surface, and means for varying the angular position of said first electrode relative to said second electrode.
Claim 6
Dependent Claim
57 words
Apparatus according to Claim 4, comprising a vacuum chamber into which said electrodes project, said vacuum chamber having an opening and said first electrode including means extending out of said vacuum chamber via said opening, and further wherein said means for varying the angular position of said first electrode comprises means located outside of said vacuum chamber.
Claim 7
Dependent Claim
51 words
Apparatus according to Claim 5, wherein said means for varying the angular position of said first electrode comprises a levelling plate affixed to said first electrode and force-applying means attached to said plate and engaged with said chamber for changing the position of said levelling plate relative to said vacuum chamber.
Claim 8
Dependent Claim
52 words
Apparatus according to Claim 2, wherein said first electrode comprises first, second and third plates attached to one another, said article-supporting surface being a first surface of said first plate and said means for circulating a cooling fluid between said article-supporting surface and an article comprising a groove in said first surface.
Claim 9
Dependent Claim
26 words
Apparatus according to Claim 7, wherein said means for circulating a second coaling fluid comprises a passageway formed by and between said second and third plates.
Claim 10
Dependent Claim
39 words
Apparatus according to Claim 8, wherein said first electrode comprises a hollow tube extending at right angles to said article-supporting surface and further including conduit means in said tube for circulating cooling fluids through said groove and said passageway.
Claim 11
Dependent Claim
15 words
An article treated by an apparatus according to any one of Claims 1 to 9.
References Cited (Backward Citations)
US4261762A
Cited
US4311427A
Cited
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