Abstract The present invention relates to a shield for limiting the radiation received by electromagnetic energy radiation detectors (3, 4) to the radiation provided to the detectors by the optics (13) of an electromagnetic energy detection system. The shield comprises a member (1) transparent to a predetermined spectrum of radiation. An opaque thin film (6) is deposited on a surface of the member, the thin film having apertures (8) defined therein, the detectors viewing the optics through the member and the apertures. The thin film shields the detectors from electromagnetic radiation generated outside the field of view of the optics, thereby improving the sensitivity of the detection system. Virtually any desired thickness for the member may be used, thus allowing very close placement of the shield to the detectors and permitting use of very high density arrays.
An electromagnetic radiation detection system comprising a shield for limiting the radiation received by an array of detectors to the radiation provided by the optics within the system, characterized in that the shield comprises a first member (1) transparent to a predetermined spectrum of electromagnetic radiation with an opaque thin film (6) deposited on a surface of said member (1) and with apertures (8) defined in said thin film (6).
Claim 2
Dependent Claim
70 words
An electromagnetic radiation detection system comprising a shield for limiting the radiation received by an array of detectors to the radiation provided by the optics within the system, characterized in that the shield comprises a first member (1) transparent to a predetermined spectrum of electromagnetic radiation with an opaque thin film (6) deposited on a surface of said member (1) and with apertures (8) defined in said thin film (6).
Claim 3
Dependent Claim
65 words
System according to claim 1, characterized in that said member (1) consists of a semiconductor substrate having first and second opposing surfaces; the detectors (3,4) are located in spaced relatior on the first surface of said substrate with each detector being viewed by the optics (13) through the second surface; and the opaque thin film (6) is deposited on the second surface of the substrate.
Claim 4
Dependent Claim
47 words
System according to claim 2, characterized in that a further semiconductor substrate (16) is mounted to the opaque thin film (6) so that the opaque thin film is sandwiched between both substrates (1,16) with the further substrate (16) being transparent to a predetermined spectrum of electromagnetic radiation.
Claim 5
Dependent Claim
31 words
System according to claim 3, characterized in that the thin film (6) has a thickness in the range of approximately a few tenths of a micron to approximately a few microns.
Claim 6
Dependent Claim
37 words
System according to claim 4, characterized in that the detectors (4) as viewed from the optics (13) have a particular geometrical configuration, and that the apertures (8) as viewed from the optics have a substantially matching configuration.
Claim 7
Dependent Claim
12 words
System according to claim 5, characterized by a reflecting thin film (6).
Claim 8
Dependent Claim
12 words
System according to claim 5, characterized by an absorbing thin film (6).
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