Patent EP0067860B1 successfully refreshed from Google Patents.
← Back to Patent Explorer
EP0067860B1 Expired / Lapsed EP ⏱️ 0.0 years remaining

Methods and apparatus for forming thin-film heterojunction solar cells from i-iii-vi2 chalcopyrite compounds, and solar cells produced thereby

Assignee: Boeing Co
•
Filing: 1981-12-21
•
Granted: 1989-06-28
•
Expires: 2001-12-21
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract An improved thin-film, large area solar cell, and methods for forming the same, having a relatively high light-to-electrical energy conversion efficiency and characterized in that the cell comprises a p-n type heterojunction formed of: (i) a first semiconductor layer comprising a photovoltaic active material selected from the class of I-III-VI2 chalcopyrite ternary materials which is vacuum deposited in a thin "composition-graded" layer ranging from on the order of about 2.5 microns to about 5.0 microns ( SIMILAR 2.5 mu m to SIMILAR 5.0 mu m) and wherein the lower region of the photovoltaic active material preferably comprises a low resistivity region of p-type semiconductor material having a superimposed region of relatively high resistivity, transient n-type semiconductor material defining a transient p-n homojunction; and (ii), a second semiconductor layer comprising a low resistivity n-type semiconductor material; wherein interdiffusion (a) between the elemental constituents of the two discrete juxtaposed regions of the first semiconductor layer defining a transient p-n homojunction layer, and (b) between the transient n-type material in the first semiconductor layer and the second n-type semiconductor layer, causes the transient n-type material in the first semiconductor layer to evolve into p-type material, thereby defining a thin layer heterojunction device characterized by the absence of voids, vacancies and nodules which tend to reduce the energy conversion efficiency of the system.

Inventors

  • 👤 Reid A. Mickelsen
  • 👤 Wen Shuh Chen

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-05 19:10
CPC Classifications
H; H10; H10F; H10F10/00; H10F10/10; H10F10/16; H10F10/167; H10F10/169; H10F71/00; H10F71/128; H10F77/00; H10F77/10; H10F77/12; H10F77/126; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/541; Y02P; Y02P70/00; Y02P70/50; Y10; Y10S; Y10S148/00; Y10S148/063; Y10S148/12

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 148 words
A method for forming a photovoltaic transducer including a substrate, a contact on the substrate, a first semiconductor layer deposited on the contact, and a second semiconductor layer deposited on the first layer, the layers defining thin-film heterojunction, the method comprising the steps of: (a) forming the first layer of I―III―VI 2 , chalcopyrite material by.simultaneous elemental evaporation, the layer having a low-resistivity, A-type region enriched in the I material and a high-resistivity, B-type region deficient in the I material, the two regions being sequentially formed one upon the other and defining a transient homojunction; and (b) forming the second layer of B-type semiconductor material by depositing a II―VI material on the high resistivity region while permitting interdiffusion within the first layer to convert the high-resistivity region from B-type to A-type, thereby defining a thin-film heterojunction, wherein A-type=n-type or p-type and B-type=p-type, if A-type=n-type; or n-type if A-type=p-type.
Claim 2
Independent Claim 148 words
A method for forming a photovoltaic transducer including a substrate, a contact on the substrate, a first semiconductor layer deposited on the contact, and a second semiconductor layer deposited on the first layer, the layers defining thin-film heterojunction, the method comprising the steps of: (a) forming the first layer of I―III―VI 2 , chalcopyrite material by.simultaneous elemental evaporation, the layer having a low-resistivity, A-type region enriched in the I material and a high-resistivity, B-type region deficient in the I material, the two regions being sequentially formed one upon the other and defining a transient homojunction; and (b) forming the second layer of B-type semiconductor material by depositing a II―VI material on the high resistivity region while permitting interdiffusion within the first layer to convert the high-resistivity region from B-type to A-type, thereby defining a thin-film heterojunction, wherein A-type=n-type or p-type and B-type=p-type, if A-type=n-type; or n-type if A-type=p-type.
Claim 3
Dependent Claim 38 words
the method of claim 1 wherein the I―III―VI 2 chalcopyrite material is CulnSe 2 , and wherein the II-VI material is selected from the group consisting of: CdS; Cd 1-x Zn x S; and CdS 1-x Se x
Claim 4
Dependent Claim 12 words
The method of claim 1 wherein the low resistivity region is p-type.
Claim 5
Dependent Claim 15 words
The method of claim 1 further comprising heating the transducer following depositing the second layer.
Claim 6
Dependent Claim 11 words
The method of claim 2 wherein the II-VI material is CdS.
Claim 7
Dependent Claim 66 words
A photovoltaic transducer produced according to the method of claim 1 or 4 comprising: (a) a first semiconductor layer of I―III―VI 2 chalcopyrite material having a low resistivity region enriched in the I material and a high resistivity region deficient in the I material; and (b) a second semiconductor layer of II-VI material in face-to-face contact with the high resistivity region to define a thin-film heterojunction.
Claim 8
Dependent Claim 20 words
The transducer of claim 6 wherein the I―III―VI 2 chalcopyrite material is CuInSe 2 and the II-VI material is CdS.
Claim 9
Dependent Claim 26 words
The transducer of claim 7 wherein the first region is p-type, the second region is n-type that evolves into p-type, and the second layer is n-type.
Claim 10
Dependent Claim 139 words
An apparatus for forming a photovoltaic transducer according to the method of claim 1 comprising a thin-film heterojunction including a substrate, a ternary material on the substrate, and a semiconductor material on the ternary material, the apparatus comprising: (a) means for forming a low resistivity base metal contact on the substrate; (b) means for forming a transient p-n-type thin film homojunction of a l―lll―Vl 2 chalcopyrite material on the contact by simultaneous elemental evaporation of the constituent elements; (c) means for monitoring and controlling the co-evaporation of the I and III materials, the control means using electron impact emission spectroscopy for monitoring the ratio of the 1:111 materials and thereby controlling the composition of the transient homojunction and permitting the formation of a first region enriched in the I material and a second region deficient in the I material.
Claim 11
Dependent Claim 21 words
The apparatus of claim 9 further comprising means for maintaining the substrate at a temperature in the range of about 350-500°C.

References Cited (Backward Citations)

No citation records indexed.

USPTO Annuity & Maintenance Windows

Maintenance schedule is calculated for granted US utility patents.

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag