EP0061237A1
Expired / Lapsed
EP
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Optical methods for controlling layer thickness
Assignee: Energy Conversion Devices Inc
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Filing: 1982-02-23
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Granted: —
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Expires: 2002-02-23
Abstract
Abstract An optical method and associated apparatus for controlling the thickness of a layer of material as it is deposited upon a substrate advanced through a glow discharge chamber. A source of radiant energy (110) such as laser or white light, and a detector (114) are so positioned that the energy of the source is reflected from the substrate to the detector. A control system accepts the output of the detector to generate control signals responsive to layer thickness for adjusting the deposition parameters of the chamber.
Inventors
- 👤 Robert F. Edgerton
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 08:46
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0683; H; H10; H10P; H10P74/00; H10P74/20; H10P74/203
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
81 words
Apparatus for controlling the thickness of a layer of material deposited upon a substrate as it is advanced through a deposition chamber comprising: a) at least one source of radiant energy; b) at least one detector; c) said source, substrate and detector being arrayed so that radiant energy from said source is substantially reflected from said substrate to said detector; and d) means engaged to said detector for adjusting the deposition rate within said chamber in response to said reflected energy.
Claim 2
Dependent Claim
81 words
Apparatus for controlling the thickness of a layer of material deposited upon a substrate as it is advanced through a deposition chamber comprising: a) at least one source of radiant energy; b) at least one detector; c) said source, substrate and detector being arrayed so that radiant energy from said source is substantially reflected from said substrate to said detector; and d) means engaged to said detector for adjusting the deposition rate within said chamber in response to said reflected energy.
Claim 3
Dependent Claim
23 words
Apparatus as defined in claim 1 wherein: a) said source is a source of white light; and b) said detector includes a monochrometer.
Claim 4
Dependent Claim
26 words
Apparatus as defined in claim wherein: a) said source is a source of monochromatic light; and b) said detector is a detector of said monochromatic light.
Claim 5
Dependent Claim
14 words
Apparatus as defined in claim 1 wherein said means is a feedback control system.
Claim 6
Dependent Claim
13 words
Apparatus as defined in claim 4 wherein said means additionally includes a microprocessor.
Claim 7
Dependent Claim
37 words
Apparatus as defined in claim 1 comprising a plurality of sources and a corresponding plurality of detectors arrayed along the length of said chamber to measure the thickness of said layer at a plurality of locations therein.
Claim 8
Independent Claim
82 words
A method for controlling the thickness of a layer of material deposited upon a substrate as it advances through a chamber comprising the steps of-: . a) applying radiant energy to said layer so that a substantial portion thereof is reflected; then b) detecting said reflected radiant energy; then c) analyzing said reflected radiant energy as said substrate progresses through said chamber; and d) continuously adjusting the deposition parameters so that a layer of predetermined thickness is deposited on said moving web.
Claim 9
Independent Claim
82 words
A method for controlling the thickness of a layer of material deposited upon a substrate as it advances through a chamber comprising the steps of-: . a) applying radiant energy to said layer so that a substantial portion thereof is reflected; then b) detecting said reflected radiant energy; then c) analyzing said reflected radiant energy as said substrate progresses through said chamber; and d) continuously adjusting the deposition parameters so that a layer of predetermined thickness is deposited on said moving web.
References Cited (Backward Citations)
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