Device for the contactless measurement of surface roughness

Abstract

Abstract The invention relates to a device for the contactless measurement of surface roughness, which further develops and improves a device disclosed in German Offenlegungsschrift 3,020,044. In addition to the vertical surface roughness parameters, the correlation length representing a horizontal surface roughness parameter is determined. This is made possible due to the fact that the mirror (9) in Fig. 1 is divided and has different reflection factors, and that the detector (15) is constructed as a pair (15a, 15b) of detectors. It is preferable for one mirror half to be reflective, while the other mirror half is non-reflective. In this case, it can be advantageous for the reflective mirror half to be made from the same material as the surface to be tested. The effects of the steady radiation superimposed by the mirrors (9a, 9b) can also be generated by superimposition of corresponding direct currents relative to the detector currents, or by adding corresponding computed values in the evaluation computer. <IMAGE>

Inventors

• 👤 Klaus Dr.-Ing. habil. 7257 Ditzingen Leonhardt

Bibliographic Details