Method and apparatus for measuring temperature in the high pressure furnace of a hot isostatic pressing

Claim 2

The method as defined in claim 2, wherein the coating metal comprises metal selected from the group consisting of Fe, Ti, Cu, Zn, Pb, Sn, Al,

Claim 3

Cr, Ni, Mo, W, Pd and Pt. 4. The method as defined in claims .[.1.]. .Iadd.12.Iaddend., 2, or 3, wherein the optical fiber means is led to the

Claim 4

outside through a lower cover of the hot isostatic pressing apparatus. 5. The method as defined in claim 4, wherein the optical fiber means has a

Claim 5

collimator at said open-end of said closed end pipe. 6. The method as defined in claim 5, wherein the optical fiber means is held at the

Claim 6

open-end of the closed-end pipe by a holding jig. 7. The method as defined in claim 6, wherein the optical fiber means is a rod-like optical material

Claim 7

which is made of a quartz glass rod. 8. The method as defined in claim 6, wherein the optical fiber means is a rod-like optical material which material is made of a sapphire rod. .[.9. The method as defined in claim 4, wherein a plurality of closed-end pipes are disposed each at a

Claim 8

different height in the inside of the furnace..]. 10. The method as defined in claim 4, wherein the measuring system comprises a radiation

Claim 9

thermometer. 11. The method as defined in claim 10, wherein the radiation thermometer detects light having a wavelength between 0.3 μm-0.6 μm.

Claim 11

zone in the furnace. 13. The method as defined in claim 12, wherein the

Claim 12

closed-end pipes are made of heat resistant material. 14. The method as defined in claim 13, wherein the closed-end pipes are disposed inside the high pressure furnace with the closed-ends of said closed-end pipes being situated to the respective heating zones corresponding to heating devices

Claim 13

disposed in upper, middle and lower portions of said furnace. 15. The method of measuring the temperature in the high pressure furnace of a hot isostatic pressing apparatus as defined in claim 12, wherein a reference optical source produces a reference light which enters said exit rear end of the optical fiber means said reference light being reflected by the incident top end of said optical fiber means to form a reflection light of the optical fiber means said reflection light being combined with the radiation energy from the inside of the closed-end pipe, the combined energy is subsequently separated into the radiation light from the inside of the closed-end pipe and the reflected light, in order to determine an entire transmittance for the optical fiber means including the losses at the end faces thereof, said transmittance being used to amend the optical information based on the radiation energy from the inside of the

Claim 14

closed-end pipe. 16. The method of measuring the temperature in the high pressure furnace of a hot isostatic pressing apparatus as defined in claim 15, wherein there is provided, a first optical fiber means for receiving the radiation energy in the closed-end pipe and a second optical fiber means different from said first optical fiber means, in which said reference light is irradiated through said second optical fiber means to the incident top end of said first optical fiber means, said reference light being combined with the radiation energy from the inside of the closed-end pipe and passing through said first optical fiber means, the combined energy being separated into the radiation light from the inside of the closed-end pipe and the reference light to determine the entire transmittance of said first optical fiber means including any optical loss at the end faces of said optical fiber means, said transmittance being used to compensate the optical information based on the radiation energy from the inside of the closedend-pipe. .[.17. An apparatus of measuring the temperature in a high pressure furnace of a hot isostatic pressing apparatus which has a heat insulation layer and a heating device disposed with a high pressure vessel comprising: a pipe having an open-end and a closed-end connected by a side wall which is disposed in said furnace; means for enabling a pressure medium to pass through said pipe; an optical fiber means having an incident top end disposed in said pipe, wherein the incident top end of said optical fiber means is disposed at the open end of said pipe such that the top of said optical fiber means receives thermally radiated light from the inside of said pipe whereby convection of the pressure medium around the incident top of said optical means is prevented, and whereby a pressure medium may pass through the open-end communicated with the outside of said closed-end pipe in the high pressure vessel; cover means for said high pressure vessel; means for passing an end of said optical fiber means, that is opposite from said incident top end, for coupling said optical fiber means, to the outside of said pressure vessel; means for measuring connected to said optical fiber means, outside of said high pressure vessel, for detecting heat radiation power from the closed

Claim 15

end of said pipe transmitted through said optical fiber means..]. 18. An apparatus as in claim .[.17.]. .Iadd.32 .Iaddend.wherein said optical

Claim 16

fiber means is comprised of a single optical fiber. 19. An apparatus as in claim .[.17.]. .Iadd.32 .Iaddend.wherein said optical fiber means is

Claim 17

comprised of a bundle of optical fibers. 20. An apparatus as in claim .[.17.]. .Iadd.32 .Iaddend.wherein said optical fiber means is comprised

Claim 18

of an optical rod-like member. 21. An apparatus as in claims .[.17.]. .Iadd.32.Iaddend., 18, 19 or 20 wherein said optical fiber means is coated

Claim 19

with a metal. 22. An apparatus as in claim 21 wherein said coating metal comprises a metal selected from the group of Fe, Ti, Cu, Zn, Pb, Sn, Al,

Claim 20

Cr, Co, Ni, Mo, W, Pd, or Pt. 23. An apparatus as in claim 22 wherein said optical fiber means has a collimator disposed at the open end of the

Claim 21

closed-end pipe. 24. An apparatus as in claim 22 further comprising: a holding jig for holding the optical fiber means at the open end of said

Claim 22

pipe. 25. An apparatus as in claim 20 wherein said rod-like member is made

Claim 23

of a quartz glass rod. 26. An apparatus as in claim 20 wherein said rod-like member is made of a sapphire rod. .[.27. An apparatus as in claim 17 further comprising: a plurality of closed-end pipes each disposed at different heights in the

Claim 24

inside of said furnace..]. 28. An apparatus as in .[.claims 17 or 27.]. .Iadd.claim 32.Iaddend.wherein said means for measuring comprises a

Claim 25

radiation thermometer. 29. An apparatus as in claim 28, wherein said radiation thermometer detects light wavelengths between 0.3 μm-0.6

Claim 26

μm. 30. An apparatus as in claim .[.17.]. .Iadd.32 .Iaddend.further comprising a closure at the open-end of said pipe; a means for fixing said optical fiber means into said closure; and photo-electric conversion means for conversion of the energy transmitted

Claim 27

by said optical fiber. 31. An apparatus as in claim .[.17.]. .Iadd.32.Iaddend., wherein said measuring means is fixed to said cover means and wherein a photoelectric conversion is carried out in said measuring means which converges the radiation transmitted through said

Claim 28

optical fiber means to create an electrical signal. 32. An apparatus of measuring the temperature in a high pressure furnace of a hot isostatic pressing apparatus which has a heat insulating layer and a heating device creating heating zones disposed with a high pressure vessel comprising: a plurality of closed-end pipes each of different lengths having an open-end and a closed-end connected by a side wall each having its open-end communicated with the outside of said high pressure furnace with each of said pipes being disposed within said furnace; and wherein the closed ends are situated such that the closed-end of each of said pipes is in equilibrium with the peripheral temperature of said furnace and may issue radiation heat corresponding to each of the heating zones of said furnace to the inside of each of the closed-end of said pipes; means for enabling a pressure medium to pass through said pipes; optical fiber means having an incident top end disposed in each of said pipes, wherein the incident top end of said optical fiber means is disposed at the open-end of each of said pipes such that the incident end face of said optical fiber means receives thermally radiated light from the insides of said pipes; whereby convection of the pressure medium around the incident top of said optical means is prevented, and whereby a pressure medium may pass through the open-end communicated with the outside of said closed-end pipe in the high pressure vessel cover means for said high pressure vessel; means for passing the ends of said optical fiber means, that is opposite from said incident top end, for coupling said optical fiber means, to the outside of said pressure vessel; means for measuring coupled to each of said optical fiber means for detecting the heat radiation transmitted through said optical fiber means; compensating means coupled to said measuring means for compensating for the temperature due to heat radiation power entering from the side wall of said closed end pipe in each of the heating zones in said high pressure furnace, thereby measuring the temperature distribution in each of the

Claim 29

heating zones of said furnace. 33. An apparatus as in .[.claims 17 or.]. .Iadd.claim .Iaddend.32 wherein said pipes are made of heat resistant

Claim 30

material. 34. An apparatus as in .[.claims 17 or.]. .Iadd.claim .Iaddend.32 further comprising: reference light sources corresponding in number to the number of optical fiber means for providing reference light which enters the exiting end of said optical fiber means such that the transmitted reference light is reflected on the incident end face of said optical fiber means that receives the radiation energy of said closed end of the pipes; reference compensation means for compensating said measurement obtained by

Claim 31

said measurement means based on said reflected reference light. .[.35. An apparatus as in claims 17 or 32 wherein said optical fiber means comprises: a bundle of optical fibers..].