Method of manufacturing thin film components
Abstract
Abstract (THE RESISTANE OF) "OPEN" HOLES AND "SHUNT" HOLES ARE PRODUCED BY A LASER BEAM IN AN ELECTRICAL COMPONENT COMPRISING A SUBSTRATE HAING COATED THEREON AT LEAST TOW CONDUCTIVE LAYERS SEPARATED BY A NONCONDUCTIVE LAYER. (IS ADJUSTED BY APPLYING A LASER BEAM TO TH COMPONENT.) ONE EXAMPLE OF THE UTILITY OF SUCH A TECHNIQUE IS THE ADJUSTMENT OF RESISTANCE OF THE ELECTRICAL COMPONENT. IF THE RESISTANCE OF THE COMPONENT IS LESS THAN A DESIRED VALUE IT IS INCREASED BY FORMING OPEN HOLES IN ONE OR BOTH OF THE CONDUCTIVE LAYERS WITH A HIGH ENERGY LASER PULS OF SHORT DURATION WHICH EVAPORATES THE LAYERS THROUGH WHICH IT PASSES. IF THE RESISTANCE IS GREATER THAN THE DESIRED VALUE IT IS DECREASED BY FORMING SHUNT HOLES BETWEEN THE CONDUCTIVE LAYERS WITH LOWER ENERGY PULSE OF LONGER DURATION WHICH PARTIALLY EVAPORATES AND MELTS THE LAYERS THROUGH WHICH IT PASSES THUS CAUSING A CONNECTION BETWEEN THE CONDUCTIVE LAYERS.
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Bibliographic Details
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-10-01 | 1977-04-02 | 1977-10-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-10-01 | 1981-04-02 | 1981-10-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-10-01 | 1985-04-02 | 1985-10-02 | $7700.00 | Window Closed / Lapsed |