US8278636B2
Active / In Force
US
⏱️ 2.8 years remaining
Radiation sources and methods of generating radiation
Assignee: ASML Netherlands BV
•
Filing: 2009-08-13
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Granted: 2012-10-02
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Expires: 2029-08-13
Abstract
Abstract A radiation source is configured to generate radiation. The radiation source includes a fuel droplet generator constructed and arranged to generate a stream of droplets of fuel that are directed to a plasma generation site; a laser constructed and arranged to generate a laser beam that is directed to the plasma generation site, an angle between the direction of movement of the stream of droplets and the direction of the laser beam being less than about 90 °; and a collector constructed and arranged to collect radiation generated by a plasma formed at the plasma formation site when the beam of radiation and a droplet collide. The collector is configured to reflect the radiation substantially along an optical axis of the radiation source. The laser beam is directed to the plasma generation site through an aperture provided in the collector.
Inventors
- 👤 Erik Roelof Loopstra
- 👤 Hendrikus Gijsbertus Schimmel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 19:27
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/7015; G03F7/70175; G03F7/70008; G03F7/70033; G21; G21K; G21K1/00; G21K1/06; H; H05; H05G; H05G2/00; H05G2/001; H05G2/002; H05G2/0023; H05G2/008; H05G2/0082; G21K2201/00; G21K2201/06; G21K2201/064; G21K2201/067
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
164 words
A radiation source configured to generate radiation, the radiation source comprising: a fuel droplet generator constructed and arranged to generate a stream of droplets of fuel that are directed to a plasma generation site; a laser constructed and arranged to generate a single laser beam that is directed to the plasma generation site; a controller configured to control the position or orientation of the fuel droplet generator and/or the laser to control the direction of the laser beam and/or the direction of movement of the stream of droplets to control an angle between the laser beam and the stream of droplets; and a collector constructed and arranged to collect radiation generated by a plasma formed at the plasma formation site when the beam of radiation and a droplet collide, the collector being configured to reflect the radiation substantially along an optical axis of the radiation source, wherein the laser beam is directed to the plasma generation site through an aperture provided in the collector.
Claim 2
Dependent Claim
164 words
A radiation source configured to generate radiation, the radiation source comprising: a fuel droplet generator constructed and arranged to generate a stream of droplets of fuel that are directed to a plasma generation site; a laser constructed and arranged to generate a single laser beam that is directed to the plasma generation site; a controller configured to control the position or orientation of the fuel droplet generator and/or the laser to control the direction of the laser beam and/or the direction of movement of the stream of droplets to control an angle between the laser beam and the stream of droplets; and a collector constructed and arranged to collect radiation generated by a plasma formed at the plasma formation site when the beam of radiation and a droplet collide, the collector being configured to reflect the radiation substantially along an optical axis of the radiation source, wherein the laser beam is directed to the plasma generation site through an aperture provided in the collector.
Claim 3
Dependent Claim
38 words
The radiation source of claim 1 , wherein the stream of droplets are directed such that the stream of droplets has a component of movement along the optical axis of the radiation source pointing away from the collector.
Claim 4
Dependent Claim
46 words
The radiation source of claim 1 , wherein the laser beam and the stream of droplets are directed such that the laser beam and the stream of droplets have a component of movement along the optical axis of the radiation source pointing away from the collector.
Claim 5
Dependent Claim
32 words
The radiation. source of claim 1 , wherein the angle between the direction of movement of the stream of droplets and the direction of the laser beam is less than 85 °.
Claim 6
Dependent Claim
32 words
The radiation source of claim 1 , wherein the angle between the direction of movement of the stream of droplets and the direction of the laser beam is less than 45 °.
Claim 7
Dependent Claim
26 words
The radiation source of claim 1 , wherein the stream of droplets are directed to the plasma generation site through an aperture provided in the collector.
Claim 8
Dependent Claim
17 words
The radiation source of claim 1 , wherein the radiation source is configured to generate EUV radiation.
Claim 9
Dependent Claim
31 words
The radiation source of claim 1 , wherein the angle between the direction of movement of the stream of droplets and the direction of the laser beam is less than 90°.
Claim 10
Independent Claim
141 words
A method of generating radiation, comprising: directing a stream of droplets of fuel from a fuel droplet generator to a plasma generation site; directing a laser beam generated by a single laser to the plasma generation site; controlling the position or orientation of the fuel droplet generator and/or the laser to control the direction of the laser beam and/or the direction of movement of the stream of droplets to control an angle between the laser beam and the stream of droplets; collecting radiation generated by a plasma formed at the plasma formation site when the beam of radiation and a droplet collide with a collector; and reflecting the radiation substantially along an optical axis of the radiation source, wherein the laser beam and/or the stream of droplets are directed to the plasma generation site through an aperture provided in the collector.
Claim 11
Independent Claim
141 words
A method of generating radiation, comprising: directing a stream of droplets of fuel from a fuel droplet generator to a plasma generation site; directing a laser beam generated by a single laser to the plasma generation site; controlling the position or orientation of the fuel droplet generator and/or the laser to control the direction of the laser beam and/or the direction of movement of the stream of droplets to control an angle between the laser beam and the stream of droplets; collecting radiation generated by a plasma formed at the plasma formation site when the beam of radiation and a droplet collide with a collector; and reflecting the radiation substantially along an optical axis of the radiation source, wherein the laser beam and/or the stream of droplets are directed to the plasma generation site through an aperture provided in the collector.
Claim 12
Dependent Claim
102 words
A radiation source configured to generate radiation, the radiation source comprising: a fuel droplet generator constructed and arranged to generate a stream of droplets of fuel that are directed to a plasma generation site; a laser constructed and arranged to generate a single laser beam that is directed to the plasma generation site; and a controller configured to control the position or orientation of the fuel droplet generator and/or the laser to control the direction of the laser beam and/or the direction of movement of the stream of droplets to control an angle between the laser beam and the stream of droplets.
Claim 13
Dependent Claim
102 words
A radiation source configured to generate radiation, the radiation source comprising: a fuel droplet generator constructed and arranged to generate a stream of droplets of fuel that are directed to a plasma generation site; a laser constructed and arranged to generate a single laser beam that is directed to the plasma generation site; and a controller configured to control the position or orientation of the fuel droplet generator and/or the laser to control the direction of the laser beam and/or the direction of movement of the stream of droplets to control an angle between the laser beam and the stream of droplets.
Claim 14
Dependent Claim
45 words
The radiation source of claim 10 , wherein the direction of the laser beam and/or the stream of droplets is controlled to control the time taken for a droplet of the stream of droplets to pass through at least a part of the laser beam.
Claim 15
Dependent Claim
26 words
The radiation source of claim 10 , wherein an angle between the stream of droplets and the direction of the laser beam is less than 90°.
Claim 16
Dependent Claim
26 words
The radiation source of claim 10 , wherein the stream of droplets are directed to the plasma generation site through an aperture provided in the collector.
Claim 17
Independent Claim
84 words
A method of generating radiation, the method comprising: directing a stream of droplets of fuel from a fuel droplet generator to a plasma generation site; directing a laser beam generated by a single laser to the plasma generation site; and controlling the position or orientation of the fuel droplet generator and/or the laser to control the direction of the laser beam and/or the direction of movement of the stream of droplets to control an angle between the laser beam and the stream of droplets.
Claim 18
Independent Claim
84 words
A method of generating radiation, the method comprising: directing a stream of droplets of fuel from a fuel droplet generator to a plasma generation site; directing a laser beam generated by a single laser to the plasma generation site; and controlling the position or orientation of the fuel droplet generator and/or the laser to control the direction of the laser beam and/or the direction of movement of the stream of droplets to control an angle between the laser beam and the stream of droplets.
Claim 19
Dependent Claim
122 words
A fuel droplet-laser beam collision time increasing apparatus arranged to generate radiation, the apparatus comprising: a fuel droplet generator constructed and arranged to generate a stream of droplets of fuel that are directed to a plasma generation site; a laser constructed and arranged to generate a single laser beam that is directed to the plasma generation site, an angle between the direction of movement of the stream of droplets and the direction of the laser beam being less than about 90°; and a controller constructed and arranged to control the position or orientation of the fuel droplet generator and/or the laser to control the angle between the direction of movement of the stream of droplets and the direction of the laser beam.
Claim 20
Dependent Claim
122 words
A fuel droplet-laser beam collision time increasing apparatus arranged to generate radiation, the apparatus comprising: a fuel droplet generator constructed and arranged to generate a stream of droplets of fuel that are directed to a plasma generation site; a laser constructed and arranged to generate a single laser beam that is directed to the plasma generation site, an angle between the direction of movement of the stream of droplets and the direction of the laser beam being less than about 90°; and a controller constructed and arranged to control the position or orientation of the fuel droplet generator and/or the laser to control the angle between the direction of movement of the stream of droplets and the direction of the laser beam.
Claim 21
Independent Claim
117 words
A method of increasing the collision time between a droplet of fuel and at least a part of a laser beam, the collision resulting in the generation of radiation, the method comprising: directing a stream of droplets of fuel from a fuel droplet generator to a plasma generation site; directing a laser beam generated by a single laser to the plasma generation site, an angle between the stream of droplets and the direction of the laser beam being less than about 90°; and controlling the position or orientation of the fuel droplet generator and/or the laser to control the angle between the direction of movement of the stream of droplets and the direction of the laser beam.
Claim 22
Independent Claim
117 words
A method of increasing the collision time between a droplet of fuel and at least a part of a laser beam, the collision resulting in the generation of radiation, the method comprising: directing a stream of droplets of fuel from a fuel droplet generator to a plasma generation site; directing a laser beam generated by a single laser to the plasma generation site, an angle between the stream of droplets and the direction of the laser beam being less than about 90°; and controlling the position or orientation of the fuel droplet generator and/or the laser to control the angle between the direction of movement of the stream of droplets and the direction of the laser beam.
Claim 23
Dependent Claim
211 words
A lithographic apparatus comprising: a radiation source configured to generate radiation, the radiation source comprising a fuel droplet generator constructed and arranged to generate a stream of droplets of fuel that are directed to a plasma generation site, a laser constructed and arranged to generate a single laser beam that is directed to the plasma generation site, a controller configured to control the position or orientation of the fuel droplet generator and/or the laser to control the direction of the laser beam and/or the direction of movement of the stream of droplets to control an angle between the laser beam and the stream of droplets, and a collector constructed and arranged to collect radiation generated by a plasma formed at the plasma formation site when the beam of radiation and a droplet collide, the collector being configured to reflect the radiation substantially along an optical axis of the radiation source to an intermediate focus, wherein the laser beam is directed to the plasma generation site through an aperture provided in the collector; a support constructed and arranged to support a patterning device, the patterning device being configured to pattern radiation that passes through the intermediate focus; and a projection system constructed and arranged to project the patterned radiation onto a substrate.
Claim 24
Dependent Claim
211 words
A lithographic apparatus comprising: a radiation source configured to generate radiation, the radiation source comprising a fuel droplet generator constructed and arranged to generate a stream of droplets of fuel that are directed to a plasma generation site, a laser constructed and arranged to generate a single laser beam that is directed to the plasma generation site, a controller configured to control the position or orientation of the fuel droplet generator and/or the laser to control the direction of the laser beam and/or the direction of movement of the stream of droplets to control an angle between the laser beam and the stream of droplets, and a collector constructed and arranged to collect radiation generated by a plasma formed at the plasma formation site when the beam of radiation and a droplet collide, the collector being configured to reflect the radiation substantially along an optical axis of the radiation source to an intermediate focus, wherein the laser beam is directed to the plasma generation site through an aperture provided in the collector; a support constructed and arranged to support a patterning device, the patterning device being configured to pattern radiation that passes through the intermediate focus; and a projection system constructed and arranged to project the patterned radiation onto a substrate.
Claim 25
Dependent Claim
149 words
A lithographic apparatus comprising: a radiation source configured to generate radiation, the radiation source comprising: a fuel droplet generator constructed and arranged to generate a stream of droplets of fuel that are directed to a plasma generation site; a laser constructed and arranged to generate a single laser beam that is directed to the plasma generation site; and a controller configured to control the position or orientation of the fuel droplet generator and/or the laser to control the direction of the laser beam and/or the direction of movement of the stream of droplets to control the angle between the laser beam and the stream'of droplets; a support constructed and arranged to support a patterning device, the patterning device being configured to pattern radiation that passes from the radiation source and through an intermediate focus; and a projection system constructed and arranged to project the patterned radiation onto a substrate.
Claim 26
Dependent Claim
149 words
A lithographic apparatus comprising: a radiation source configured to generate radiation, the radiation source comprising: a fuel droplet generator constructed and arranged to generate a stream of droplets of fuel that are directed to a plasma generation site; a laser constructed and arranged to generate a single laser beam that is directed to the plasma generation site; and a controller configured to control the position or orientation of the fuel droplet generator and/or the laser to control the direction of the laser beam and/or the direction of movement of the stream of droplets to control the angle between the laser beam and the stream'of droplets; a support constructed and arranged to support a patterning device, the patterning device being configured to pattern radiation that passes from the radiation source and through an intermediate focus; and a projection system constructed and arranged to project the patterned radiation onto a substrate.
Claim 27
Dependent Claim
181 words
A lithographic apparatus comprising: a fuel droplet-laser beam collision time increasing apparatus arranged to generate radiation, the fuel droplet-laser beam collision time increasing apparatus comprising a fuel droplet generator constructed and arranged to generate a stream of droplets of fuel that are directed to a plasma generation site, a laser constructed and arranged to generate a single laser beam that is directed to the plasma generation site, an angle between the direction of movement of the stream of droplets and the direction of the laser beam being less than about 90°, and a controller constructed and arranged to control the position or orientation of the fuel droplet generator and/or the laser to control the angle between the direction of movement of the stream of droplets and the direction of the laser beam; a support constructed and arranged to support a patterning device, the patterning device being configured to pattern radiation that passes from the fuel droplet-laser beam collision time increasing apparatus and through an intermediate focus; and a projection system constructed and arranged to project the patterned radiation onto a substrate.
Claim 28
Dependent Claim
181 words
A lithographic apparatus comprising: a fuel droplet-laser beam collision time increasing apparatus arranged to generate radiation, the fuel droplet-laser beam collision time increasing apparatus comprising a fuel droplet generator constructed and arranged to generate a stream of droplets of fuel that are directed to a plasma generation site, a laser constructed and arranged to generate a single laser beam that is directed to the plasma generation site, an angle between the direction of movement of the stream of droplets and the direction of the laser beam being less than about 90°, and a controller constructed and arranged to control the position or orientation of the fuel droplet generator and/or the laser to control the angle between the direction of movement of the stream of droplets and the direction of the laser beam; a support constructed and arranged to support a patterning device, the patterning device being configured to pattern radiation that passes from the fuel droplet-laser beam collision time increasing apparatus and through an intermediate focus; and a projection system constructed and arranged to project the patterned radiation onto a substrate.
Claim 29
Independent Claim
151 words
A device manufacturing method comprising: generating radiation, said generating radiation comprising directing a stream of droplets of fuel from a fuel droplet generator to a plasma generation site, directing a laser beam generated by a single laser to the plasma generation site, controlling the position or orientation of the fuel droplet generator and/or the laser to control the angle between the direction of movement of the stream of droplets and the direction of the laser beam, collecting radiation generated by a plasma formed at the plasma formation site when the beam of radiation and a droplet collide with a collector, and reflecting the radiation substantially along an optical axis of the radiation source, wherein the laser beam and/or the stream of droplets are directed to the plasma generation site through an aperture provided in the collector; patterning the radiation with a pattering device; and projecting the patterned radiation onto a substrate.
Claim 30
Independent Claim
151 words
A device manufacturing method comprising: generating radiation, said generating radiation comprising directing a stream of droplets of fuel from a fuel droplet generator to a plasma generation site, directing a laser beam generated by a single laser to the plasma generation site, controlling the position or orientation of the fuel droplet generator and/or the laser to control the angle between the direction of movement of the stream of droplets and the direction of the laser beam, collecting radiation generated by a plasma formed at the plasma formation site when the beam of radiation and a droplet collide with a collector, and reflecting the radiation substantially along an optical axis of the radiation source, wherein the laser beam and/or the stream of droplets are directed to the plasma generation site through an aperture provided in the collector; patterning the radiation with a pattering device; and projecting the patterned radiation onto a substrate.
Claim 31
Independent Claim
102 words
A device manufacturing method comprising: generating radiation, said generating radiation comprising directing a stream of droplets of fuel from a fuel droplet generator to a plasma generation site, directing a laser beam generated by a single laser to the plasma generation site, and controlling the position or orientation of the fuel droplet generator and/or the laser to control the direction of the laser beam and/or the direction of movement of the stream of droplets to control an angle between the laser beam and the stream of droplets; patterning the radiation with a pattering device; and projecting the patterned radiation onto a substrate.
Claim 32
Independent Claim
102 words
A device manufacturing method comprising: generating radiation, said generating radiation comprising directing a stream of droplets of fuel from a fuel droplet generator to a plasma generation site, directing a laser beam generated by a single laser to the plasma generation site, and controlling the position or orientation of the fuel droplet generator and/or the laser to control the direction of the laser beam and/or the direction of movement of the stream of droplets to control an angle between the laser beam and the stream of droplets; patterning the radiation with a pattering device; and projecting the patterned radiation onto a substrate.
Claim 33
Independent Claim
132 words
A device manufacturing method comprising: generating radiation by increasing the collision time between a droplet of fuel and at least a part of a laser beam, said increasing the collision time comprising directing a stream of droplets of fuel from a fuel droplet generator to a plasma generation site, directing a laser beam generated by a single laser to the plasma generation site, an angle between the stream of droplets and the direction of the laser beam being less than about 90°, and controlling the position or orientation of the fuel droplet generator and/or the laser to control the angle, between the direction of movement of the stream of droplets and the direction of the laser beam; patterning the radiation with a patterning device; and projecting the patterned radiation onto a substrate.
Claim 34
Independent Claim
132 words
A device manufacturing method comprising: generating radiation by increasing the collision time between a droplet of fuel and at least a part of a laser beam, said increasing the collision time comprising directing a stream of droplets of fuel from a fuel droplet generator to a plasma generation site, directing a laser beam generated by a single laser to the plasma generation site, an angle between the stream of droplets and the direction of the laser beam being less than about 90°, and controlling the position or orientation of the fuel droplet generator and/or the laser to control the angle, between the direction of movement of the stream of droplets and the direction of the laser beam; patterning the radiation with a patterning device; and projecting the patterned radiation onto a substrate.
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