US7755039B2
Active / In Force
US
⏱️ 1.0 years remaining
3-dimensional differential pumping system and method thereof
Assignee: Korea Basic Science Institute
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Filing: 2007-10-26
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Granted: 2010-07-13
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Expires: 2027-10-26
Abstract
Abstract A differential pumping system in which a vacuum chamber is manufactured to have a plurality of vacuum pumps and conductance limit plates between the vacuum pumps. The differential pumping system in which an ion is implanted from an ionization source, passes through the vacuum chamber and is detected by a detection unit includes a plurality of vacuum pumps in the vacuum chamber and one or more conductance limit plates between the vacuum pumps, and the conductance limit plates form an angle less than 90° with the transmission direction of the ion. According to such a constitution, higher degree of vacuum and the ion transmission efficiency are maintained without increasing the length of the vacuum chamber. Furthermore, it is possible to minimize the attenuation of an ion detection signal due to a collision with a neighboring neutral molecule, improving the sensitivity of an ion detection device.
Inventors
- 👤 Myoung Choul Choi
- 👤 Jong Shin YOO
- 👤 Hyun Sik Kim
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 01:46
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/62; G01N27/622; G01N27/623; H; H01; H01J; H01J49/00; H01J49/02; H01J49/06; H01J49/067; H01J49/24; H01J49/26; H01J49/34; H01J49/36; H01J49/38
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
87 words
A differential pumping system in which an ion is implanted from an ionization source, passes through a vacuum chamber and is detected by a detection unit, the differential pumping system comprising: a plurality of vacuum pumps which are arranged within the vacuum chamber; and one or more conductance limit plates which are arranged between the vacuum pumps within the vacuum chamber, wherein the conductance limit plates are arranged to form an angle less than 90° with the transmission direction of the ion implanted from the ionization source.
Claim 2
Dependent Claim
87 words
A differential pumping system in which an ion is implanted from an ionization source, passes through a vacuum chamber and is detected by a detection unit, the differential pumping system comprising: a plurality of vacuum pumps which are arranged within the vacuum chamber; and one or more conductance limit plates which are arranged between the vacuum pumps within the vacuum chamber, wherein the conductance limit plates are arranged to form an angle less than 90° with the transmission direction of the ion implanted from the ionization source.
Claim 3
Dependent Claim
37 words
The differential pumping system as claimed in claim 1 , wherein the plurality of vacuum pumps are respectively arranged above and below or left and right of the conductance limit plate interposed therebetween in the vacuum chamber.
Claim 4
Dependent Claim
54 words
The differential pumping system as claimed in claim 1 , wherein the conductance limit plates have an orifice at center and are blocked up at remaining portions except the center, and the conductance limit plates pass only an ion concentrated by an electric field and limit the movement of a neighboring neutral gas molecule.
Claim 5
Dependent Claim
52 words
The differential pumping system as claimed in claim 1 , wherein the inner space of the vacuum chamber is divided into a plurality of sections by the conductance limit plates, and the conductance limit plates form a difference of the degree of vacuum between the plurality of sections of the vacuum chamber.
Claim 6
Dependent Claim
37 words
The differential pumping system as claimed in claim 1 , wherein the plurality of three-dimensionally arranged vacuum pumps and the conductance limit plates are applied to a Fourier transform ion cyclotron resonance mass spectrometer (FT-ICR MS) system.
Claim 7
Dependent Claim
66 words
A differential pumping method using the differential pumping system according to claim 1 comprising the steps of: implanting an ion into the vacuum chamber; passing the ion implanted into the vacuum chamber through a plurality of vacuum pumps having a great difference of the degree of vacuum; and detecting the ion passing through the plurality of vacuum pumps within the vacuum chamber by a detection unit.
Claim 8
Dependent Claim
37 words
The differential pumping method as claimed in claim 6 , wherein the plurality of vacuum pumps are arranged respectively above and below or left and right of the conductance limit plate interposed therebetween in the vacuum chamber.
Claim 9
Dependent Claim
54 words
The differential pumping method as claimed in claim 6 , wherein the conductance limit plates have an orifice at center and are blocked up at remaining portions except the center, and the conductance limit plates passes only an ion concentrated by an electric field and limit the movement of a neighboring neutral gas molecule.
Claim 10
Dependent Claim
52 words
The differential pumping method as claimed in claim 6 , wherein the inner space of the vacuum chamber is divided into a plurality of sections by the conductance limit plates, and the conductance limit plates form a difference of the degree of vacuum between the plurality of sections of the vacuum chamber.
Claim 11
Dependent Claim
28 words
The differential pumping method as claimed in claim 6 , wherein the respective steps are applied to a Fourier transform ion cyclotron resonance mass spectrometer (FT-ICR MS) system.
References Cited (Backward Citations)
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