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US7323356B2
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LnCuO(S,Se,Te)monocrystalline thin film, its manufacturing method, and optical device or electronic device using the monocrystalline thin film
Assignee: Hoya Corp
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Filing: 2003-02-19
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Granted: 2008-01-29
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Expires: 2023-02-19
Abstract
Abstract Disclosed is a method of producing an LnCuOX single-crystal thin film (wherein Ln is at least one selected from the group consisting of lanthanide elements and yttrium, and X is at least one selected from the group consisting of S, Se and Te), which comprises the steps of growing a base thin film on a single-crystal substrate, depositing an amorphous or polycrystalline LnCuOX thin film on the base thin film to form a laminated film, and then annealing the laminated film at a high temperature of 500° C. or more. While a conventional LnCuOX film produced by growing an amorphous film through a sputtering process under appropriate conditions and then annealing the film at a high temperature was unexceptionally a polycrystalline substance incapable of achieving high emission efficiency and electron mobility required for a material of light-emitting devices or electronic devices, the method of the present invention can grow a thin film with excellent crystallinity suitable as a single crystal to an building black of light-emitting diodes, semiconductor leasers, filed-effect transistors, or a hetero-bipolar transistors.
Inventors
- 👤 Hideo Hosono
- 👤 Masahiro Hirano
- 👤 Hiromichi Ota
- 👤 Masahiro Orita
- 👤 Hidenori Hiramatsu
- 👤 Kazushige Ueda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 00:49
CPC Classifications
C; C30; C30B; C30B33/00; C30B1/00; C30B1/02; C30B23/00; C30B23/02; C30B29/00; C30B29/10; C30B29/16; C30B29/22; H; H10; H10D; H10D62/00; H10D62/80; H10P; H10P14/00; H10P14/20; H10P14/22; H10P14/29; H10P14/2901; H10P14/2921; H10P14/32; H10P14/3202; H10P14/3234; H10P14/3236; H10P14/3241; H10P14/34; H10P14/3402; H10P14/3434; H10P14/3436; H10H; H10H20/00; H10H20/80; H10H20/81; H10H20/822
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
102 words
A method of producing an LnCuOX single-crystal thin film, wherein Ln is at least one selected from the group consisting of lanthanide elements and yttrium, and X is at least one selected from the group consisting of S, Se and Te, said method comprising the steps of: growing a base thin film on a single-crystal substrate; depositing an amorphous or polycrystalline LnCuOX thin film on said base thin film to form a laminated film; enclosing said laminated film in a closed vacuum environment, and then annealing said laminated film at a high temperature of 500° C. or more in said vacuum environment.
Claim 2
Independent Claim
102 words
A method of producing an LnCuOX single-crystal thin film, wherein Ln is at least one selected from the group consisting of lanthanide elements and yttrium, and X is at least one selected from the group consisting of S, Se and Te, said method comprising the steps of: growing a base thin film on a single-crystal substrate; depositing an amorphous or polycrystalline LnCuOX thin film on said base thin film to form a laminated film; enclosing said laminated film in a closed vacuum environment, and then annealing said laminated film at a high temperature of 500° C. or more in said vacuum environment.
Claim 3
Dependent Claim
41 words
The method as defined in claim 1 , wherein said base thin film is made of either one material selected from the group consisting of Cu, Cu2S, CuS, Cu2O, CuO, CuCl, CuCl2, CuI, Ag, Ag2S, Ag2O, AgO, AgCl, AgI and Au.
Claim 4
Dependent Claim
30 words
The method as defined in claim 1 , wherein said single-crystal substrate is made of either one material selected from the group consisting of YSZ, Y2O3, STO, Al2O3 and MgO.
Claim 5
Dependent Claim
53 words
The method as defined in claim 1 , wherein said base thin film is a Cu thin film, and said single-crystal substrate is made of either one material selected from the group consisting of YSZ, Y2O3 and MgO, wherein said Cu thin film is grown on a (100) plane of said single-crystal substrate.
Claim 6
Dependent Claim
20 words
The method as defined in claim 1 , wherein said annealing step is performed in an atmosphere containing LnCuOX vapor.
Claim 7
Dependent Claim
36 words
The method as defined in claim 1 , which includes the step of covering the surface of said deposited amorphous or polycrystalline LnCuOX thin film by an YSZ single-crystal plate in advance of said enclosing step.
Claim 8
Dependent Claim
75 words
The method as defined in claim 1 , which includes the steps of: preparing an additional laminated film composed of said amorphous or polycrystalline LnCuOX thin film, said base thin film and said single-crystal substrate, or composed of said amorphous or polycrystalline LnCuOX thin film and said single-crystal substrate; and attaching the respective surfaces of said additional laminated film and said laminated film formed in said depositing step together in advance of said enclosing step.
Claim 9
Independent Claim
129 words
A method of producing an Ln 1−y M y CuOX single-crystal thin film, wherein Ln is at least one selected from the group consisting of lanthanide elements and yttrium, 0<y<1, and M is at least one selected from the group consisting of Mg, Ca, Sr, Ba and Zn and X is at least one selected from the group consisting of S, Se and Te, said method comprising the steps of: growing a base thin film on a single-crystal substrate; depositing an amorphous or polycrystalline Ln 1−y M y CuOX thin film on said base thin film to form a laminated film; enclosing said laminated film in a closed vacuum environment, and then annealing said laminated film at a high temperature of 500° C. or more in said vacuum environment.
Claim 10
Independent Claim
129 words
A method of producing an Ln 1−y M y CuOX single-crystal thin film, wherein Ln is at least one selected from the group consisting of lanthanide elements and yttrium, 0<y<1, and M is at least one selected from the group consisting of Mg, Ca, Sr, Ba and Zn and X is at least one selected from the group consisting of S, Se and Te, said method comprising the steps of: growing a base thin film on a single-crystal substrate; depositing an amorphous or polycrystalline Ln 1−y M y CuOX thin film on said base thin film to form a laminated film; enclosing said laminated film in a closed vacuum environment, and then annealing said laminated film at a high temperature of 500° C. or more in said vacuum environment.
Claim 11
Independent Claim
162 words
A method of producing a single-crystal LnCuOX 1−x X′ x or Ln 1−y M y CuOX 1−x X′ x solid-solution thin film, wherein 0<y<1, 0<x<1; Ln is at least one selected from the group consisting of lanthanide elements and yttrium; M is at least one selected from the group consisting of Mg, Ca, Sr, Ba and Zn and each of X and X′ is at least one selected from the group consisting of S, Se and Te, wherein X and X′ are different elements, said method comprising the steps of: preparing a substrate consisting of the LnCuOX single-crystal thin film or the Ln 1−y M y CuOX single-crystal thin film; depositing an LnCuOX 1−x X′ x or Ln 1−y M y CuOX 1−x X′ x thin film on said substrate to form a laminated film; enclosing said laminated film in a vacuum chamber, and then annealing said laminated film at a high temperature of 500° C. or more in said vacuum environment.
Claim 12
Independent Claim
162 words
A method of producing a single-crystal LnCuOX 1−x X′ x or Ln 1−y M y CuOX 1−x X′ x solid-solution thin film, wherein 0<y<1, 0<x<1; Ln is at least one selected from the group consisting of lanthanide elements and yttrium; M is at least one selected from the group consisting of Mg, Ca, Sr, Ba and Zn and each of X and X′ is at least one selected from the group consisting of S, Se and Te, wherein X and X′ are different elements, said method comprising the steps of: preparing a substrate consisting of the LnCuOX single-crystal thin film or the Ln 1−y M y CuOX single-crystal thin film; depositing an LnCuOX 1−x X′ x or Ln 1−y M y CuOX 1−x X′ x thin film on said substrate to form a laminated film; enclosing said laminated film in a vacuum chamber, and then annealing said laminated film at a high temperature of 500° C. or more in said vacuum environment.
Claim 13
Independent Claim
122 words
A method of producing an LnCuOX 1−x X′ x single-crystal solid solution thin film, wherein 0<x<1, Ln is at least one selected from the group consisting of lanthanide elements and yttrium, and X and X′ is at least one selected from the group consisting of S, Se and Te, wherein X and X′ are different elements, said method comprising the steps of: growing a base thin film on a single-crystal substrate; depositing an amorphous or polycrystalline LnCuOX 1-x X′ x solid solution thin film on said base thin film to form a laminated film; enclosing said laminated film in a closed vacuum environment, and then annealing said laminated film at a high temperature of 500° C. or more in said vacuum environment.
Claim 14
Independent Claim
122 words
A method of producing an LnCuOX 1−x X′ x single-crystal solid solution thin film, wherein 0<x<1, Ln is at least one selected from the group consisting of lanthanide elements and yttrium, and X and X′ is at least one selected from the group consisting of S, Se and Te, wherein X and X′ are different elements, said method comprising the steps of: growing a base thin film on a single-crystal substrate; depositing an amorphous or polycrystalline LnCuOX 1-x X′ x solid solution thin film on said base thin film to form a laminated film; enclosing said laminated film in a closed vacuum environment, and then annealing said laminated film at a high temperature of 500° C. or more in said vacuum environment.
References Cited (Backward Citations)
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