US7116411B2
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Method of performing resist process calibration/optimization and DOE optimization for providing OPE matching between different lithography systems
Assignee: ASML Netherlands BV
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Filing: 2004-08-26
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Granted: 2006-10-03
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Expires: 2024-08-26
Abstract
Abstract A method of optimizing a process for use with a plurality of lithography systems. The method includes the steps of: (a) determining a calibrated resist model for a given process and a target pattern utilizing a first lithography system; (b) selecting a second lithography system to be utilized to image the target pattern utilizing the given process, the second lithography system capable of being configured with one of a plurality of diffractive optical elements, each of the plurality of diffractive optical elements having corresponding variable parameters for optimizing performance of the given diffractive optical element; (c) selecting one of the plurality of diffractive optical elements and simulating the imaging performance of the second lithography system utilizing the selected one of the plurality of diffractive optical elements, the calibrated resist model and the target pattern; and (d) optimizing the imaging performance of the selected one of the plurality of diffractive optical elements by executing a genetic algorithm which identifies the values of the parameters of the selected one of the plurality of diffractive optical elements that optimizes the imaging of the target pattern.
Inventors
- 👤 Sangbong Park
- 👤 Jang Fung Chen
- 👤 Armin Liebchen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 23:51
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70491; G03F7/705; G03F7/70058; G03F7/70091; G03F7/70108; G03F7/70425; G03F7/70458; G03F7/70525
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
182 words
A method of optimizing a process for use with a plurality of lithography system, said method comprising the steps of: (a) determining a calibrated resist model for a given process and a target pattern utilizing a first lithography system; (b) selecting a second lithography system to be utilized to image said target pattern utilizing said given process, said second lithography system capable of being configured with one of a plurality of diffractive optical elements, each of said plurality of diffractive optical elements having corresponding variable parameters for optimizing performance of the given diffractive optical element; (c) selecting one of said plurality of diffractive optical elements and simulating the imaging performance of said second lithography system utilizing said selected one of said plurality of diffractive optical elements, said calibrated resist model and said target pattern; and (d) optimizing the imaging performance of said selected one of said plurality of diffractive optical elements by executing a genetic algorithm which identifies the values of the parameters of the selected one of the plurality of diffractive optical elements that optimizes the imaging of the target pattern.
Claim 2
Independent Claim
182 words
A method of optimizing a process for use with a plurality of lithography system, said method comprising the steps of: (a) determining a calibrated resist model for a given process and a target pattern utilizing a first lithography system; (b) selecting a second lithography system to be utilized to image said target pattern utilizing said given process, said second lithography system capable of being configured with one of a plurality of diffractive optical elements, each of said plurality of diffractive optical elements having corresponding variable parameters for optimizing performance of the given diffractive optical element; (c) selecting one of said plurality of diffractive optical elements and simulating the imaging performance of said second lithography system utilizing said selected one of said plurality of diffractive optical elements, said calibrated resist model and said target pattern; and (d) optimizing the imaging performance of said selected one of said plurality of diffractive optical elements by executing a genetic algorithm which identifies the values of the parameters of the selected one of the plurality of diffractive optical elements that optimizes the imaging of the target pattern.
Claim 3
Dependent Claim
94 words
The method of claim 1 , further comprising the step of: repeating step (c) and step (d) for each of said plurality of diffractive optical elements; storing, in memory, the parameter values associated with each of the plurality of diffractive optical elements which correspond to the optimal imaging performance for the given diffractive optical element; and comparing the optimal imaging performance for each of the plurality of diffractive optical elements and selecting the diffractive optical element having the best imaging performance as the diffractive optical element to be utilized in said second lithography system.
Claim 4
Dependent Claim
20 words
The method of claim 1 , wherein both said first lithography system and said second lithography system include a scanner.
Claim 5
Dependent Claim
218 words
A computer program product, comprising executable code transportable by at least one machine readable medium, wherein execution of the code by at least one programmable computer causes the at least one programmable computer to perform a sequence of steps for optimizing a process for use with a plurality of lithography systems, said sequence of steps comprising: (a) determining a calibrated resist model for a given process and a target pattern utilizing a first lithography system; (b) selecting a second lithography system to be utilized to image said target pattern utilizing said given process, said second lithography system capable of being configured with one of a plurality of diffractive optical elements, each of said plurality of diffractive optical elements having corresponding variable parameters for optimizing performance of the given diffractive optical element; (c) selecting one of said plurality of diffractive optical elements and simulating the imaging performance of said second lithography system utilizing said selected one of said plurality of diffractive optical elements, said calibrated resist model and said target pattern; and (d) optimizing the imaging performance of said selected one of said plurality of diffractive optical elements by executing a genetic algorithm which identifies the values of the parameters of the selected one of the plurality of diffractive optical elements that optimizes the imaging of the target pattern.
Claim 6
Dependent Claim
218 words
A computer program product, comprising executable code transportable by at least one machine readable medium, wherein execution of the code by at least one programmable computer causes the at least one programmable computer to perform a sequence of steps for optimizing a process for use with a plurality of lithography systems, said sequence of steps comprising: (a) determining a calibrated resist model for a given process and a target pattern utilizing a first lithography system; (b) selecting a second lithography system to be utilized to image said target pattern utilizing said given process, said second lithography system capable of being configured with one of a plurality of diffractive optical elements, each of said plurality of diffractive optical elements having corresponding variable parameters for optimizing performance of the given diffractive optical element; (c) selecting one of said plurality of diffractive optical elements and simulating the imaging performance of said second lithography system utilizing said selected one of said plurality of diffractive optical elements, said calibrated resist model and said target pattern; and (d) optimizing the imaging performance of said selected one of said plurality of diffractive optical elements by executing a genetic algorithm which identifies the values of the parameters of the selected one of the plurality of diffractive optical elements that optimizes the imaging of the target pattern.
Claim 7
Dependent Claim
95 words
The program product of claim 4 , further comprising the step of: repeating step (c) and step (d) for each of said plurality of diffractive optical elements; storing, in memory, the parameter values associated with each of the plurality of diffractive optical elements which correspond to the optimal imaging performance for the given diffractive optical element; and comparing the optimal imaging performance for each of the plurality of diffractive optical elements and selecting the diffractive optical element having the best imaging performance as the diffractive optical element to be utilized in said second lithography system.
Claim 8
Dependent Claim
21 words
The program product of claim 4 , wherein both said first lithography system and said second lithography system include a scanner.
References Cited (Backward Citations)
US6781682B1
Cited
US6678240B2
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